本論文主旨是以酸蝕刻液將p型多晶矽晶片(polycrystalline silicon wafer)表面形成擁有低反射率之奈微結構，製作出低成本高效率之太陽能電池。首先將裸片(bare wafer)浸泡於氫氟酸、硝酸與水的混合液體中，形成表面黑色之晶片後，以UVB積分球(UVB integrating sphere)量測其表面反射率(Reflectance)，並且找尋平均在400-1000nm波長有低反射率之配方，接著使用爐管進行磷擴散，但擴散後不將磷玻璃(phosphosilicate glass, PSG)去除，最後在矽晶片正反面分別網印(screen printing)上銀漿和鋁漿後，放入烤箱高溫燒結，完成元件後再切邊絕緣。此架構用表面之奈微結構代替抗反射層(antireflection coating, ARC)，以保留磷玻璃的方式取代鈍化層(passivation layer)，如此一來便降低製作成本和步驟。

The purpose of this study is to fabricate a low-cost and high-efficiency solar cell with nanostructured surface formed by chemical etching. First, we etch bare wafers with an acidic solution in order to form the nanostructure which makes the wafers look like black silicon. Then, the reflectances of the etched wafers are measured by the UVB integrating sphere. We choose a mixture of appropriate acidic solutions to obtain low average reflectance between the wavelength of 400 to 1000 nm. After that, wafers are processed by using the following procedures: phosphorus diffusion without removing phosphorous silicate glass(PSG) layers, forming front and rear contacts by screen-printing, respectively, silver and aluminum paste, and cofiring in a furnace followed by edge isolation. We not only use the nanostructured surface for the purpose of not depositing an antireflection coating(ARC) on the front surface, but also keep the PSG layer formed on the silicon surface during the phosphorous diffusion process for a passivation layer. In this way, lots of cost and steps may be saved.

第一章 序論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-3 研究構想與目的 6
1-4 論文架構 6
第二章 基本原理 7
2-1 半導體基礎物理 7
2-1-1 半導體晶體特性與結構 7
2-1-2 載子的產生與復合[25] 8
2-2 太陽能電池元件 10
2-2-1 p-n接面 10
2-2-2 太陽能電池之運作 11
2-2-3 太陽能光譜與頻率響應 12
2-2-4 太陽能電池的等效電路 13
2-2-5 太陽能電池的參數介紹 15
2-2-6 量子效率 19
2-2-7 太陽能電池的效率損失 20
2-2-8 背表面電場 21
2-3 少數載子生命週期[35] 22
第三章 研究方法及實驗步驟 24
3-1 太陽能電池製作流程 24
3-2 製程步驟介紹 26
3-2-1 前置處理 26
3-2-2 酸蝕刻 27
3-2-3 磷擴散 27
3-2-4 磷玻璃去除 28
3-2-5 抗反射層沉積 28
3-2-6 網印電極 29
3-2-7 電極共燒 30
3-2-8 切邊絕緣 31
第四章 數據分析與討論 32
4-1 少數載子生命週期與iVOC之量測結果與討論 32
4-1-1 表面奈微結構生成對少數載子生命期的影響 32
4-1-2 擴散後之少數載子生命週期與iVOC量測 34
4-2 具抗反射奈微結構之反射率討論 36
4-3 掃描式電子顯微鏡下之觀察 38
4-3-1 表面結構之比較 39
4-3-2 BSF厚度 43
4-4 實驗組與對照組之太陽能電池結果比較 45
第五章 結論 47
參考文獻 48

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