本文設計、製作並測試一款智慧型線性液靜壓滑塊模組，並將其應用於液靜壓線性平台系統。此智慧型線性液靜壓滑塊模組創新處在於將液靜壓軸承之節流器與油腔進行整合，搭配適當感測器即時量測滑塊之靜態性能，並將量測數值代入已知理論得到系統即時承載力以及剛性，再配合可自主偵測供油異常之供油系統，在系統失效前提醒使用者，構成智慧型線性液靜壓軸承系統。在設計上，將同時設計兩款使用不同節流器的液靜壓滑塊，分別為毛細管節流以及複合型節流；在實驗上，將以毛細管節流液靜壓滑塊系統之性能測試為主，而複合型節流液靜壓滑塊系統則將評估其可行性。故此智慧型線性液靜壓滑塊模組具有加工、組裝及維護容易、提升運動精度、節能、失效預防及提升可靠度等優點。
在理論推導部分，首先建立相關節流器之對向墊系統理論，並進行對向墊之剛性設計以及相關設計參數的模擬，而後將此理論推廣至液靜壓滑塊模組，進行初步的滑塊構型設計。最後則進行智慧化監控之相關程式撰寫，並與滑塊模組進行整合，以期達到整體系統之完整性。

This thesis is aimed to design, fabricate and test an intelligent linear hydrostatic slide module and applied for a linear hydrostatic bearing system. The slide module integrates restrictors with bearing pads and uses appropriate sensors for real time measurement of the module. Measurement values are substituted into known theories, then calculated the real time load capacity and stiffness of the linear hydrostatic system. With autonomously detecting anomalies oil supply system, the linear hydrostatic bearing system can alert the user before system failed. This study designed two hydrostatic slide modules for two types of restrictors, including capillary restrictors and a hybrid-type restrictor, and tested the load capacity and stiffness of the capillary restrictor slide module. The hybrid-type restrictor slide module will be evaluated its feasibility. Therefore this intelligent linear hydrostatic slide module possesses the advantages of fewer components, easy manufacturing and assembly, less cost, failure prevention, enhanced accuracy and reliability.
In the theoretical part, first we started with construction of theoretical models of the opposed-pad hydrostatic bearings installed with capillary and the hybrid-type restrictors, respectively, the equations governing the load capacity and stiffness of these two-types of bearings. Then we extended these equations to hydrostatic slide module, and designed the initial configuration. Finally, we constructed the real time measurement system and the autonomously detection of anomalies oil supply system. With the slide module, we constitute the overall integrity of the intelligent linear hydrostatic bearing system.

摘要 I
Abstract II
致謝 IV
目錄 V
圖目錄 VIII
符號表 XIV
第一章 導論 1
1-1 研究背景 1
1-2 文獻回顧 3
1-2-1 液靜壓滑軌之研究 3
1-2-2 液靜壓導軌之應用[8] 4
1-2-3 液靜壓滑塊之應用 5
1-2-4 固定式節流器之研究 7
1-2-5 主動式節流器之研究 8
1-2-6 複合型節流器之研究 10
1-3研究動機與本文內容 12
第二章 液靜壓軸承對向墊流阻網路法分析 13
2-1 雷諾方程式 13
2-2 Lumped parameter modeling 17
2-3 毛細管節流液靜壓對向墊分析 20
2-4 主動式節流液靜壓對向墊分析 25
2-5 複合型節流液靜壓對向墊分析 33
第三章 液靜壓滑塊理論分析及模擬 40
3-1 液靜壓滑塊型式 40
3-2 對向墊剛性計算 42
3-2-1 流阻網路法 42
3-2-2 Rowe經驗公式[24] 43
3-3 毛細管節流器用於液靜壓對向墊系統之性能表現 46
第四章 閉式液靜壓滑塊設計 59
4-1 閉式液靜壓滑塊結構設計 59
4-1-1 毛細管節流液靜壓滑塊設計 60
4-1-2 複合型節流液靜壓滑塊設計 62
4-2 工作平台與滑軌構型設計及其結構模擬 65
4-2-1 工作平台設計 65
4-2-2 滑軌設計 67
4-2-3 滑軌結構模擬 70
4-3 線性馬達及光學尺配置規劃 73
第五章 實驗 76
5-1 液靜壓滑塊系統實驗架設 76
5-1-1 實驗架設 76
5-1-2 滑塊系統架設 79
5-2 量測及監控系統 83
5-2-1 量測設備 83
5-5-2 即時監控系統 84
5-2-3 負載施加設備 86
5-3 供油系統及其失效監控 88
5-4 實驗方法與步驟 91
5-5 實驗結果與討論 94
5-5-1 垂直負載實驗結果與討論 95
5-5-2 水平負載實驗結果與討論 99
第六章 結論與未來工作 104
6-1 結論 104
6-2 未來工作 105
參考文獻 107

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