本文設計一套高負載、低轉速且高迴轉精度之液靜壓臥式旋轉平台，藉由分析及評估實際加工情形，選擇性能表現可能為最佳之液靜壓軸承構型，透過現有設備進行實驗量測，並探討分析其相關的誤差參數。
在理論方面，首先計算液靜壓節流器中封油面之流阻值，藉由設計軸承油腔內部壓力與供給壓力之壓力比，使油膜剛性能達到最大；接著探討在液靜壓軸承系統中，使用定壓之液靜壓單向墊以及雙向墊軸承的承載力，並求出其油膜剛性表現；另外，在液靜壓軸承的設計過程中，檢索相關剛性及承載力計算之文獻，調整油膜厚度、封油面尺寸、流體黏滯係數、總流體流量等設計參數，期望能將不同文獻所計算出之數值與實驗結果進行比較分析，以利於設計時能更準確評估液靜壓軸承之性能。
於發包製作前，將現有設備平台進行性能量測與分析。藉由實驗所得到的結果探討理論運算及實際效能間的關係，依此關係檢討可能的誤差參數，並提出改進之方法以提高臥式旋轉台之性能。

關鍵字：液靜壓臥式旋轉軸、節流器、剛性

This thesis studies the design process of the hydrostatic bearing, and completes a horizontal hydrostatic rotary bearing design with high performance based on a properly structural design and with self-made capillary restrictors.
In theory, analyze the flow resistance of the pad and restrictors to design the pressure ratio between the source and the pocket, which conduces to design the bearing stiffness. Secondly, this study probes the function of the load capacity of the single pad and the opposed pad hydrostatic bearing, and the performance of stiffness. In addition, this work also searches the relevant literature about the computation of the stiffness and the load capacity to obtain the essential parameter which influences the bearing’s characteristics, such as the oil film thickness, the land dimension, the oil viscosity, the total flow. This work will compare and analyze the experimental results and the functions about different literatures to estimate the performance of the bearing accurately.
This thesis uses the existing horizontal hydrostatic bearing to do the experiment and analyze before the design contracts out. These experimental results compare the actual performance with the theoretic performance to make discussion about the probable parameter of error and present a method to improve the performance of the horizontal hydrostatic rotary bearing.

Key words: horizontal hydrostatic rotary bearing, restrictor, stiffness

摘要 2
Abstract 3
致謝 4
目錄 6
圖目錄 10
表目錄 13
符號表 14
第一章 導論 16
1-1 研究背景 16
1-2 文獻回顧 19
1-2-1 液靜壓軸承之研究 19
1-2-2 固定式節流液靜壓軸承之研究 19
1-2-3 主動式節流液靜壓軸承之研究 20
1-2-4 表面自補償節流器之研究 22
1-2-5 液靜壓軸承理論誤差修正之研究 22
1-2-6 複合式節流器之研究 23
1-3 研究動機與目的 23
第二章 理論分析 26
2-1 雷諾方程式 26
2-2 Lumped Parameter Modeling 32
2-3 液靜壓軸承承載力及油膜剛性 34
2-4 液靜壓軸承流體溫度變化 42
第三章 液靜壓軸頸式軸承及止推軸承設計比較 46
3-1 流阻網路法 46
3-1-1 封油面流阻推導 46
3-1-2 承載力效能分析 53
3-1-3 剛性效能分析 57
3-1-4 節流器設計分析 59
3-2 查表法 62
3-2-1 承載力效能分析 62
3-2-2 剛性效能分析 65
3-2-3 節流器設計分析 68
3-3 經驗法則 71
3-3-1 承載力效能分析 73
3-3-2 剛性效能分析 74
3-3-3 節流器設計分析 76
3-4 性能比較 77
第四章 液靜壓軸承結構分析 80
4-1 外型設計 80
4-2 結構設計 83
4-3 應力及形變分析 87
第五章 實驗研究 90
5-1 實驗架設 90
5-1-1 液靜壓臥式旋轉軸 91
5-1-2 供油設備系統及流體冷卻單元 92
5-1-3 量測設備 92
5-2 實驗方法及步驟 95
5-2-1 實驗方法 95
5-2-2 實驗步驟 96
5-3 實驗結果 100
5-3-1 初始位移及傾斜實驗結果 100
5-3-2 徑向剛性實驗結果 106
5-3-3 軸向剛性實驗結果 115
第六章 結論與未來工作 122
6-1 結論 122
6-2 未來工作 123
參考文獻 125

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