在光學對準平台領域中，市售之光學對準產品都是以機械封裝為主，然而此種封裝不僅錯位容忍度差、產率低，其尺寸大、成本高。為了有效解決此種問題，本文提出採用微機電製程技術製作一個以單晶矽微結構之微光學對準平台，採用自動化耦光封裝，不僅整合性高、錯位容忍度高，且其體積小，可降低生產成本。
本研究提出一種新式微光學對準平台，結合熱致動及磁致動之設計概念，配合適當的絕熱材料PDMS作為隔絕聯結之目的，以普及的矽基材製程加工及點膠方式製作本研究之微光學對準平台。研究中以有限元素分析軟體模擬不同元件之設計結構參數，得到致動器結構最佳化之趨勢。透過實際元件製作，以及量測致動器產生之位移量，除驗證本研究之概念設計具有可行性之外，亦可了解絕熱材料及致動器之性能，並針對其產生之問題加以修正及改進。
本研究提出光學對準平台具微小化、體積化、反應速度快、低能量消耗、及系統整合性高等優點。文末亦提出一些下一代微光學對準平台之設計理念，以期望得到更佳之微光學對準平台效能，及更寬廣之應用範圍。

In the field of optical alignment platform, commercially available optical alignment of the products are mainly mechanical package, but this package is not only misplaced poor tolerance, but also low yield, large size and high cost. Effectively solving this problem, we propose the use of MEMS process technology to produce a micro-optical platform aligned by single-crystal silicon microstructures, the use of automated coupling light package, not only high integration, but also high misalignment tolerance, small size, and low production costs.
This study presents a novel micro optical alignment platform, combined with the thermal and magnetic actuator of the design concept, with appropriate insulation PDMS as an object of isolated coupling to the popularity of the silicon substrate processing production, processing and dispensing of the way research the micro-optical alignment platform. Research analog design parameters of the different elements of the structural finite element analysis software to give the best of the actuator structure induced trend. Through actual component production, measured the amount of displacement of the actuator to generate, in addition to proof the concept design of this study’s feasible, we can understand insulating material actuator, the performance, fix their problems and improve for it.
This study presents a miniaturized optical alignment stage, the volume of the reaction speed, low power consumption, and system integration advantages. End of the paper also proposes a number of next-generation micro-optical design of the alignment stage to expect a better alignment of the micro-optical platform performance, and a wider range of applications.

摘要...I
Abstract...II
誌謝...IV
目錄...VI
圖目錄...VIII
表目錄...XIII
第一章 緒論...1
1-1前言...1
1-2文獻回顧...2
1-3研究目的與動機...9
1-4全文架構...10
第二章 元件設計與理論分析...24
2-1熱致動器致動原理與設計考量...25
2-2熱致動器模擬分析...26
2-3靜磁致動器致動原理...29
2-4靜磁致動器模擬分析...29
2-5電磁致動器致動原理與模擬分析...31
2-6絕熱框架設計考量與模擬分析...32
第三章 製程與結果...51
3-1製作流程...51
3-2製程問題與討論...53
3-3製程結果...56
第四章 量測觀察與結果...68
4-1結構觀察...68
4-2同平面之位移量測...69
4-3出平面之位移量測...69
4-4微致動器溫度之變化...71
第五章 結論與未來工作...82
5-1本文成果...82
5-2未來工作...82
參考文獻...93
附錄...99

[1]D.-J. Bell, T.-J. Lu, N.-A. Fleck and S.-M. Spearing, “MEMS actuators and sensors:observations on their performance and selection for purpose, ”Journal of Micromechanics and Microengineering, 15, pp 153-164, 2005.
[2]http://debbiemillman.blogspot.tw/2009/12/design-matters-television-pilot-filming.html
[3]http://www.clker.com/clipart-fun-telephone.html
[4]http://3lian.com/vector/12/16447497.html
[5]http://boson4.phys.tku.edu.tw/science_works/Page204_Endoscopic_surgery_01.jpg
[6]http://www.fs.com/blog/active-optical-cable-aoc-rising-star-of-telecommunications-datacom-transceiver-markets.html
[7]http://www.phytron.com
[8]N.-C. MacDonald, “Micro-machines for moving nm-scale Objects, ”IEEE 6^th Int. Symposium on Micro Machine and Human Science, Nagoya, Japan, October, 1995, pp 53.
[9]http://hyperphysics.phy-astr.gsu.edu/hbase/hph.html#hph
[10]W. Riergmuller, and W. Benecke, “Thermally excited silicon microactuators, ”Transactions on Electron Decices, 35, pp 758-763, 1998.
[11]H. Guckel, J. Klein, T. Christeenson, K. Skrobis, M. Laudon, and E.-G. Lovell, “Thermo-magnetic metal flexure actuators, ”Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June, 1992, pp 73-75.
[12]M.-J. Sinclair, “A high force low area MEMS thermal actuator, ” Thermal and Thermomechanical Phenomena in Electron Systems, Las Vegas, NV, May, 2000, pp 127-132.
[13]H.-C. Nathanson, W.-E. Newell, R.-A. Wickstrom, and J.R. Davis, “The resonant gate transistor, ”Transducers on Electron Devices, 14, pp 117-133, 1967.
[14]W.-C. Tang, T.-H. Nguyen, and G.-T. Howe, “Laterally driven polysilicon resonant microstructures, ”Micro Electro Mechanical Systems, Salt Lake City, UT, February, 1989, pp 53-59.
[15]J.-W. Judy, and R.-S. Muller, “Magnetic microactuation of torsional polysilicon structures, ”Transducers, 1, pp 332-335, June, 1995.
[16]J.-W. Judy, R.-S. Muller, and H.-H. Zappe, “Magnetic microactuation of polysilicon flexure structures, ”Journal of Microelectromechanical Systems, 4, pp 162-169, 1995.
[17]楊學安, “電磁感應渦電流於微機電系統之分析與應用, ”國立清華大學博士論文, 2005.
[18]陳文健, “靜磁力驅動單晶矽微掃描面鏡之扭矩強化設計, ”國立清華大學碩士論文, 2008.
[19]Y. Okano, and Y. Hirabayashi, “Magnetically actuated micromirror and measurement system for motion characterisitics using specular reflection, ”IEEE Journal on Selected Topic in Quantum Electronics, 8, pp 19-25, 2002.
[20]A.-D. Yalcinkaya, H. Urey, and S. Holmstrom, “NiFe plated biaxial MEMS scanner for 2-D imaging, ”Photonics Technology Letters, 5, pp 330-332, 2007.
[21]H.-J. Cho, J. Yan, S.-T. Kowel, F.-R. Beyette, Jr. and C.-H. Ahn, “A scanning silicon micromirror using a bi-directionally movable magnetic microactuator, ” MOEMS and Miniaturized Systems, Santa Clara, CA, September, 2000, pp 106-115.
[22]M. Khoo, and C. Liu, “Development of a novel micromachined magnetostatic membrane actuator, ”Device Research Conference, Denver, CO, USA, June, 2000, pp 109-110.
[23]Y. Wu, G. Ding, C. Zhang, J. Wang, S. Mao, and H. Wang, “Design and implentmentation of a bistable microcantilever actuator for magnetostatic latching relay, ”Microelectronics Journal, 41, pp 325-330, 2010.
[24]A. Schroth, C. Lee, S. Matusumoto ,M. Tanaka and R. Maeda, “Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners, ” Sensors and Actuators A:Physical, 73, pp 144-152, 1998.
[25]Y. Zhou, B. Zhou, and S. Li, “Driving perfoemance analysis of a novel piezoelectric actuator, ” International Conference on Measuring Technology and Mechatronics Automation, Changsha City, China, March, 2010, pp 34-37.
[26]R.-S. Muller, and K.-Y. Lau, “Surface-micromachined microoptical elements and systems, ”Proceedings of the IEEE, 86, pp 705-1720, 1998.
[27]L. Fan, M.-C. Wu, K.-D. Choquette, and M.-H. Crawford, “Self-assembled microactuated XYZ stages for optical scanning and alignment, ”Solid State Sensors and Actuators, Chicago, IL, June, 1997, pp 319-322.
[28]C.-C. Lee, W.-C. Chen, Sz.-Y. Lee and W. Fang, “Design and implementation of a novel polymer joint for thermal actuator current and thermal isolation, ”MEMS, Wanchai, Hong Kong, January, 2010, pp 156-159.
[29]劉育嘉, “以CMOS-MEMS製程結合高分子填充技術發展一可調感測範圍/靈敏度之電容式觸覺感測器, ”國立清華大學碩士論文, 2009.
[30]Q.-A. Huang, and N.-K.-S. Lee, “Analysis and design of polysilicon thermal flexure actuator,” Journal of Micromechanics and Microengineering, 9, pp 64-70, 1999.
[31]J.-W. Judy, and R.-S. Muller, “Magnetic Microactuation of Torsional Polysilicon Structures,” Sensors and Actuators A: Physical, 53, pp 392-397 , 1996.
[32]J.-W. Judy, “Magnetic microactuators with polysilicon flexures,” Masters Thesis, Department of EECS, University of California Berkeley, 1994.
[33]http://www.calctool.org/CALC/phys/electromagnetism/solenoid
[34]S.-H. Lee, J. Chae, S. Yoon, N. Yazid, and K. Najaft, “Low-power thermal isolation for environmental resistant microinstruments, ” MEMS, Florida, USA, January, 2005, pp 532-535.
[35]J. Sasaki, H. Honmou, M. Itoh, A. Uda, and T. Torikai, “Self-aligned assembly technology for laser diode modulus using stripe-type AuSn solder bump flip-chip bonding, ”Laser and Electro-Optics Society Annual Meeting, San Francisco, CA, October, 1995, pp 234-235.
[36]M. Wu, S.-Y. Hsiao, C.-Y. Peng and W. Fang, “Development of tracking and focusing micro actuators for dual-stage optical pick-up head, ”J. of Optical A, 8, pp 323-329,2005.
[37]A.-S. Holmes, and K.-W. Lee, “Multilayer electroformed devices on silicon substrates, ”Demonstrates Micromaching Technologies for Industry, Birmingham, UK, 2000, pp 5/1-5/4.
[38]湯宗霖, “利用靜磁力與勞倫茲力驅動雙軸循序掃描面鏡, ”國立清華大學碩士論文, 2006.
[39]P. Li, T. Sasaki. L. F. Pan, and K.Hane, “Integrated tracking and focusing micro lens actuator based on silicon bulk micromaching, ”Transducers, Beijing, China, June, 2011, pp 1546-1549.
[40]B. Ghodsian, A. Parameswaran, M. Syrzyuki, and N. Tait, “Fabrication of affordable metallic microstructures by electroplating and photoresist molds, ”Canadian Coference on Electrical and Computer Engineering, Alberta, Canada, May, 2006, pp 68-71.
[41]D.A. Chang-Yen, R.K. Eich, and B.K. Gale, “A monolithic PDMS waveguide system fabricated using soft-lithography techniques, ”Journal of Lightwave Technology, 23, pp 2088-2093, 2005.
[42]林素貞, “開發增加位移之雙軸致動模組及其應用光學影像穩定系統, ”國立清華大學碩士論文, 2013.