在本文中，我們提出具有高放射率特性的中紅外頻段熱輻射體，而這透過低本質損耗的介電質所構成的全介電質結構中達成。因此我們便藉由本身帶有低本質損耗的介電質圖陣來達成不同以往方法的高效率熱輻射體。藉由有限微分時域法的模擬來描述及分析全介電質熱輻射體。根據克希何夫定律描述，在熱平衡之下，對於能輻射和吸收熱輻射的任何物體而言，吸收無論在頻率、方向及極化方向下皆與輻射相同; 這定律只在熱平衡狀態下才能成立在一開始設計階段，輻射視為吸收，且吸收能在模擬軟體計算與分析設計。在模擬中，我們計算出在波長9微米電磁波中有97.56%的吸收於全介電質熱輻射體;因此可以預期全介電質熱輻射體有相當高程度的高放射率。在進一步模擬分析中，能量吸收分布圖顯示電磁能量主要被吸收於週期排列的介電質中。而為了製作中紅外頻段熱輻射體，利用黃光微影製程來定義圖案，再用電子束蒸鍍機來鍍介電質，最後使用掀離製程來完成圖案。在量測階段中，全介電質熱輻射體輻射出的能量由傅里葉轉換紅外光譜儀量測;在輻射圖譜中，我們計算分析放射率有90%與品質因數有2.5。最後，空間同調性將由模擬方式被衡量，也就是不同的入射角度對熱輻射場的影響。

A mid-infrared thermal emitter with high emissivity property is proposed and fabri-cated. The thermal emitter is based on all-dielectric architecture where the intrinsic losses of dielectric materials are low. Therefore, we achieve a highly efficient thermal emitter relative to common thermal emitter through a novel approach- the array of low loss die-lectric particles. We characterize the thermal emitter based on all-dielectric architecture via the finite difference time domain method (lumerical). Kirchhoff's law states: For an arbitrary body emitting and absorbing thermal radiation in thermodynamic equilibrium, the emissivity is equal to the absorptivity for the same frequency, same direction, and same polarization. The law holds only when the condition of thermodynamic equilibrium is satisfied. In general, a good absorber is a good emitter. In the design stage, emissivity is regarded as absorptivity, which could be calculated and analyzed in simulation software. In lumerical simulation, absorptance of 97.6% is calculated at the wavelength of 9μm in all-dielectric-based thermal emitter. It is expected that all-dielectric-based thermal emitter possesses some high extent of emissivity. Besides, in numerical simulation result, power absorbed spatial distribution indicates that electromagnetic energy is dissipated within the array of all-dielectric cavities. In the fabrication stage, UV lithography is used to define the pattern of mid-infrared thermal emitter device. It is followed by the deposition of die-lectrics via E-gun evaporation technique. The pattern is formed after the lift-off process. In the measurement setup, the amount of radiant power of all-dielectric-based thermal emitter is measured by the Fourier transform infrared spectroscopy. Then, around 90% emissivity and quality factor of 2.5 are evaluated and calculated in the emission spectrum. Spatial coherence of thermal radiation field is also estimated through the response of emission field over a wide range of incident angles in the simulation.

致謝····················································i
摘要···················································ii
Abstract··············································iii
Table of content·······································iv
List of Figures········································vi
Chapter 1 Introduction··································1
1-1 Introduction to Metamaterials·······················1
1-2 Research Motivation·································3
1-3 Thesis organization·································4
Chapter 2 Literature review·····························6
2-1 Introduction to approaches to thermal emitters······6
2-1-1 Thermal emission by three-dimensional photonic crystal·················································6
2-1-2 Thermal emission by a one-dimensional metallic grating················································12
2-1-3 Thermal emission by plasmonic nanoantenna arrays·················································17
2-2 Introduction to all-dielectric metamaterals········21
Chapter 3 Design and simulation························24
3-1 Achieving absorption through spectral manipulation·24
3-2 Achieving high absorption through Fabry-Pérot cavity·················································29
3-3 Power absorbed spatial distribution················31
Chapter 4 Methods and Experimental setup···············32
4-1 Experimental flow··································32
4-2 UV photolithography································33
4-3 E-gun evaporation··································34
4-4 Lift-off process···································36
4-5 Fourier transform infrared spectrometer············36
4-5-1 Measurement setup································36
Chapter 5 Results and discussion·······················39
5-1 Experimental and measurement results···············39
5-1-1 Measured absorption spectrum·····················39
5-1-2 Measured emission spectrum·······················42
5-2 The realization of all-dielectric-based thermal emitter················································50
5-3 Wien's displacement law and Stefan–Boltzmann law···53
5-4 Microscopic measurement····························58
5-5 Spatial coherence of emission spectrum·············60
Chapter 6 Conclusion···································63
Reference··············································64

[1] V. G. Veselago, The electrodynamics of substances with simultaneously negative val-ues of ε and μ, Soviet Physics USPEKHI, 10 (1968) 509-514.
[2] S. Shu, Y. Zhan, C. Lee, J. Lu, Y.Y. Li, Wide angle and narrow-band asymmetric absorption in visible and near-infrared regime through lossy Bragg stacks, Scientific Reports, 6 (2016) 27061.
[3] J.B. Pendry, Negative Refraction Makes a Perfect Lens, Physical Review Letters, 85 (2000) 3966-3969.
[4] K.L. Tsakmakidis, A.D. Boardman, O. Hess, /`Trapped rainbow/' storage of light in metamaterials, Nature, 450 (2007) 397-401.
[5] T.-Y. Huang, T.-C. Yang, T.-J. Yen, Slowing light by exciting the fundamental degeneracy oscillatory mode in a negative refractive waveguide, Applied Physics Letters, 102 (2013) 111102.
[6] Y. Lai, H. Chen, Z.-Q. Zhang, C.T. Chan, Complementary Media Invisibility Cloak that Cloaks Objects at a Distance Outside the Cloaking Shell, Physical Review Letters, 102 (2009) 093901.
[7] Z. Wang, T.S. Luk, Y. Tan, D. Ji, M. Zhou, Q. Gan, Z. Yu, Tunneling-enabled spectrally selective thermal emitter based on flat metallic films, Applied Physics Letters, 106 (2015) 101104.
[8] B.J. O’Regan, Y. Wang, T.F. Krauss, Silicon photonic crystal thermal emitter at near-infrared wavelengths, Scientific Reports, 5 (2015) 13415.
[9] A. Narayanaswamy, G. Chen, Surface modes for near field thermophotovoltaics, Applied Physics Letters, 82 (2003) 3544-3546.65
[10] E. Rephaeli, S. Fan, Absorber and emitter for solar thermo-photovoltaic systems to achieve efficiency exceeding the Shockley-Queisser limit, Opt. Express, 17 (2009) 15145-15159.
[11] A. Lenert, D.M. Bierman, Y. Nam, W.R. Chan, I. Celanovic, M. Soljacic, E.N. Wang, A nanophotonic solar thermophotovoltaic device, Nat Nano, 9 (2014) 126-130.
[12] A.P. Raman, M.A. Anoma, L. Zhu, E. Rephaeli, S. Fan, Passive radiative cooling below ambient air temperature under direct sunlight, Nature, 515 (2014) 540-544.
[13] E. Rephaeli, A. Raman, S. Fan, Ultrabroadband Photonic Structures To Achieve High-Performance Daytime Radiative Cooling, Nano Letters, 13 (2013) 1457-1461.
[14] S.Y. Lin, J. Moreno, J.G. Fleming, Three-dimensional photonic-crystal emitter for thermal photovoltaic power generation, Applied Physics Letters, 83 (2003) 380-382.
[15] M. Laroche, C. Arnold, F. Marquier, R. Carminati, J.J. Greffet, S. Collin, N. Bardou, J.L. Pelouard, Highly directional radiation generated by a tungsten thermal source, Opt. Lett., 30 (2005) 2623-2625.
[16] M.U. Pralle, N. Moelders, M.P. McNeal, I. Puscasu, A.C. Greenwald, J.T. Daly, E.A. Johnson, T. George, D.S. Choi, I. El-Kady, R. Biswas, Photonic crystal enhanced narrow-band infrared emitters, Applied Physics Letters, 81 (2002) 4685-4687.
[17] M. Laroche, R. Carminati, J.J. Greffet, Coherent Thermal Antenna Using a Photonic Crystal Slab, Physical Review Letters, 96 (2006) 123903.
[18] P. Nagpal, S.E. Han, A. Stein, D.J. Norris, Efficient Low-Temperature Thermophotovoltaic Emitters from Metallic Photonic Crystals, Nano Letters, 8 (2008) 3238-3243.
[19] J.A. Schuller, T. Taubner, M.L. Brongersma, Optical antenna thermal emitters, Nat Photon, 3 (2009) 658-661.66
[20] M. De Zoysa, T. Asano, K. Mochizuki, A. Oskooi, T. Inoue, S. Noda, Conversion of broadband to narrowband thermal emission through energy recycling, Nat Photon, 6 (2012) 535-539.
[21] B.J. Lee, C.J. Fu, Z.M. Zhang, Coherent thermal emission from one-dimensional photonic crystals, Applied Physics Letters, 87 (2005) 071904.
[22] R. Biswas, D. Zhou, I. Puscasu, E. Johnson, A. Taylor, W. Zhao, Sharp thermal emission and absorption from conformally coated metallic photonic crystal with triangular lattice, Applied Physics Letters, 93 (2008) 063307.
[23] I. Celanovic, N. Jovanovic, J. Kassakian, Two-dimensional tungsten photonic crystals as selective thermal emitters, Applied Physics Letters, 92 (2008) 193101.
[24] M.-L. Hsieh, J. Bur, Y.-S. Kim, S.-Y. Lin, Direct observation of quasi-coherent thermal emission by a three-dimensional metallic photonic crystal, Opt. Lett., 38 (2013) 911-913.
[25] X. Liu, T. Tyler, T. Starr, A.F. Starr, N.M. Jokerst, W.J. Padilla, Taming the Blackbody with Infrared Metamaterials as Selective Thermal Emitters, Physical Review Letters, 107 (2011) 045901.
[26] V. Rinnerbauer, Y.X. Yeng, W.R. Chan, J.J. Senkevich, J.D. Joannopoulos, M. Soljačić, I. Celanovic, High-temperature stability and selective thermal emission of polycrystalline tantalum photonic crystals, Opt. Express, 21 (2013) 11482-11491.
[27] C.-M. Wang, D.P. Tsai, Lambertian thermal emitter based on plasmonic enhanced absorption, Opt. Express, 24 (2016) 18382-18387.
[28] P. Moitra, B.A. Slovick, W. li, I.I. Kravchencko, D.P. Briggs, S. Krishnamurthy, J. Valentine, Large-Scale All-Dielectric Metamaterial Perfect Reflectors, ACS Photonics, 2 (2015) 692-698.67
[29] A.A. Basharin, M. Kafesaki, E.N. Economou, C.M. Soukoulis, V.A. Fedotov, V. Savinov, N.I. Zheludev, Dielectric Metamaterials with Toroidal Dipolar Response, Physical Review X, 5 (2015) 011036.
[30] B.-I. Popa, S.A. Cummer, Compact Dielectric Particles as a Building Block for Low-Loss Magnetic Metamaterials, Physical Review Letters, 100 (2008) 207401.
[31] P. Moitra, Y. Yang, Z. Anderson, I.I. Kravchenko, D.P. Briggs, J. Valentine, Realization of an all-dielectric zero-index optical metamaterial, Nat Photon, 7 (2013) 791-795.
[32] Y.H. Fu, A.I. Kuznetsov, A.E. Miroshnichenko, Y.F. Yu, B. Luk/'yanchuk, Directional visible light scattering by silicon nanoparticles, Nat Commun, 4 (2013) 1527.
[33] A. García-Etxarri, R. Gómez-Medina, L.S. Froufe-Pérez, C. López, L. Chantada, F. Scheffold, J. Aizpurua, M. Nieto-Vesperinas, J.J. Sáenz, Strong magnetic response of submicron Silicon particles in the infrared, Opt. Express, 19 (2011) 4815-4826.
[34] X. Ji, X. Zhao, P. Jing, F. Xing, Y. Huang, Narrow-band midinfrared thermal emitter based on photonic crystal for NDIR gas sensor, in: Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on, 2010, pp. 1459-1461.
[35] J.-J. Greffet, R. Carminati, K. Joulain, J.-P. Mulet, S. Mainguy, Y. Chen, Coherent emission of light by thermal sources, Nature, 416 (2002) 61-64.
[36] J. Le Gall, M. Olivier, J.J. Greffet, Experimental and theoretical study of reflection and coherent thermal emissionby a SiC grating supporting a surface-phonon polariton, Physical Review B, 55 (1997) 10105-10114.
[37] S.-Y. Lin, J.G. Fleming, E. Chow, J. Bur, K.K. Choi, A. Goldberg, Enhancement and suppression of thermal emission by a three-dimensional photonic crystal, Physical Review B, 62 (2000) R2243-R2246.68
[38] J.G. Fleming, S.Y. Lin, I. El-Kady, R. Biswas, K.M. Ho, All-metallic three-dimensional photonic crystals with a large infrared bandgap, Nature, 417 (2002) 52-55.
[39] D.L.C. Chan, M. Soljačić, J.D. Joannopoulos, Thermal emission and design in 2D-periodic metallic photonic crystal slabs, Opt. Express, 14 (2006) 8785-8796.
[40] J. Liu, U. Guler, A. Lagutchev, A. Kildishev, O. Malis, A. Boltasseva, V.M. Shalaev, Quasi-coherent thermal emitter based on refractory plasmonic materials, Opt. Mater. Express, 5 (2015) 2721-2728.
[41] T. Karakouz, A.B. Tesler, T. Sannomiya, Y. Feldman, A. Vaskevich, I. Rubinstein, Mechanism of morphology transformation during annealing of nanostructured gold films on glass, Physical chemistry chemical physics : PCCP, 15 (2013) 4656-4665.
[42] W. Li, U. Guler, N. Kinsey, G.V. Naik, A. Boltasseva, J. Guan, V.M. Shalaev, A.V. Kildishev, Refractory Plasmonics with Titanium Nitride: Broadband Metamaterial Absorber, Advanced Materials, 26 (2014) 7959-7965.
[43] U. Guler, V.M. Shalaev, A. Boltasseva, Nanoparticle plasmonics: going practical with transition metal nitrides, Materials Today, 18 (2015) 227-237.
[44] C.-M. Wang, D.-Y. Feng, Omnidirectional thermal emitter based on plasmonic nanoantenna arrays, Opt. Express, 22 (2014) 1313-1318.
[45] C.M. Soukoulis, M. Wegener, Past achievements and future challenges in the development of three-dimensional photonic metamaterials, Nat Photon, 5 (2011) 523-530.
[46] A. Boltasseva, H.A. Atwater, Low-Loss Plasmonic Metamaterials, Science, 331 (2011) 290-291.
[47] N.I. Zheludev, The Road Ahead for Metamaterials, Science, 328 (2010) 582-583.
[48] Q. Zhao, B. Du, L. Kang, H. Zhao, Q. Xie, B. Li, X. Zhang, J. Zhou, L. Li, Y. Meng, Tunable negative permeability in an isotropic dielectric composite, Applied Physics Letters, 92 (2008) 051106.69
[49] K. Bi, Y. Guo, X. Liu, Q. Zhao, J. Xiao, M. Lei, J. Zhou, Magnetically tunable Mie resonance-based dielectric metamaterials, Scientific Reports, 4 (2014) 7001.
[50] B. Slovick, Z.G. Yu, M. Berding, S. Krishnamurthy, Perfect dielectric-metamaterial reflector, Physical Review B, 88 (2013) 165116.
[51] L. Shi, J.T. Harris, R. Fenollosa, I. Rodriguez, X. Lu, B.A. Korgel, F. Meseguer, Monodisperse silicon nanocavities and photonic crystals with magnetic response in the optical region, Nat Commun, 4 (2013) 1904.
[52] A. Krasnok, S. Makarov, M. Petrov, R. Savelev, P. Belov, Y. Kivshar, Towards all-dielectric metamaterials and nanophotonics, in, 2015, pp. 950203-950203-950217.
[53] T. Moore, ABSORPTION AND SCATTERING OF LIGHT BY SMALL PARTICLES by C.F. Bohren and D.R. Huffman, Wiley Science Paperback Series, Chichester, UK, 1998, xiv+530 pp., List of references, index (£34.95; pbk), Robotica, 16 (1998) 703-703.
[54] A.I. Kuznetsov, A.E. Miroshnichenko, Y.H. Fu, J. Zhang, B. Luk’yanchuk, Magnetic light, Scientific Reports, 2 (2012) 492.
[55] K. Vynck, D. Felbacq, E. Centeno, A.I. Căbuz, D. Cassagne, B. Guizal, All-Dielectric Rod-Type Metamaterials at Optical Frequencies, Physical Review Letters, 102 (2009) 133901.
[56] Q. Zhao, J. Zhou, F. Zhang, D. Lippens, Mie resonance-based dielectric metamaterials, Materials Today, 12 (2009) 60-69.
[57] A.B. Evlyukhin, C. Reinhardt, A. Seidel, B.S. Luk’yanchuk, B.N. Chichkov, Optical response features of Si-nanoparticle arrays, Physical Review B, 82 (2010) 045404.
[58] J.C. Ginn, I. Brener, D.W. Peters, J.R. Wendt, J.O. Stevens, P.F. Hines, L.I. Basilio, L.K. Warne, J.F. Ihlefeld, P.G. Clem, M.B. Sinclair, Realizing Optical Magnetism from Dielectric Metamaterials, Physical Review Letters, 108 (2012) 097402.70
[59] C.L. Holloway, E.F. Kuester, J. Baker-Jarvis, P. Kabos, A double negative (DNG) composite medium composed of magnetodielectric spherical particles embedded in a matrix, IEEE Transactions on Antennas and Propagation, 51 (2003) 2596-2603.
[60] J.A. Schuller, R. Zia, T. Taubner, M.L. Brongersma, Dielectric Metamaterials Based on Electric and Magnetic Resonances of Silicon Carbide Particles, Physical Review Letters, 99 (2007) 107401.
[61] L. Peng, L. Ran, H. Chen, H. Zhang, J.A. Kong, T.M. Grzegorczyk, Experimental Observation of Left-Handed Behavior in an Array of Standard Dielectric Resonators, Physical Review Letters, 98 (2007) 157403.
[62] I. Staude, A.E. Miroshnichenko, M. Decker, N.T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T.S. Luk, D.N. Neshev, I. Brener, Y. Kivshar, Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks, ACS Nano, 7 (2013) 7824-7832.
[63] P. Moitra, B.A. Slovick, Z. Gang Yu, S. Krishnamurthy, J. Valentine, Experimental demonstration of a broadband all-dielectric metamaterial perfect reflector, Applied Physics Letters, 104 (2014) 171102.
[64] S. Liu, M.B. Sinclair, T.S. Mahony, Y.C. Jun, S. Campione, J. Ginn, D.A. Bender, J.R. Wendt, J.F. Ihlefeld, P.G. Clem, J.B. Wright, I. Brener, Optical magnetic mirrors without metals, Optica, 1 (2014) 250-256.
[65] F. Marquier, K. Joulain, J.P. Mulet, R. Carminati, J.J. Greffet, Y. Chen, Coherent spontaneous emission of light by thermal sources, Physical Review B, 69 (2004) 155412.