在本研究中，我們主要在金光柵表面電漿(SPR)系統下，加入鐵磁性材料形成金/鐵/金之三明治結構，以提升橫向磁光柯爾效應(TMOKE)的表面電漿增強現象，並應用於非標定、高敏感度的光學生物量測。經材料選擇與結構尺寸優化，而後整合PDMS微流道系統封裝；其中包含微泵浦(micropump)及閥門(normally-close valves)等動件並加入PDMS稜鏡設計降低反射雜訊，成一32×22 mm2的自動化生醫感測晶片。我們分析了元件特性及生物量測的能力，其最大磁光訊號約為0.04 且能觀察到磁光訊號在共振波長附近對環境折射率具有相當高的靈敏度。首先透過整合好的磁光感測晶片來量測不同濃度的蔗糖水溶液，所測得之本質解析度與蔗糖水(bulk solution)的最小解析濃度分別約為1.47×10-6 RIU與0.007%(wt)；之後利用高親和力的avidin/biotin生物組合做動態(real time)量測：預先將biotin透過BSA標定接於元件金表面，後通入不同濃度之avidin驗證表面電漿磁光訊號對表面附近之生物檢體具有線性量測與定量分析的特性，計算得出avidin 之解析度約為31nM。

In this thesis, a high-sensitivity biosensor is demonstrated by exploiting surface plasma(SP) enhanced transverse magneto-optical Kerr effect(TMOKE). The size of the device is 32×22 mm2 with the prism, microfluidic system and ferromagnetic plasmonic grating integrated on a single chip with the ability to deliver and detect bio-agents systematically. The SP grating made on an optimized composite Au/Fe/Au layer exhibits a very dispersive Kerr Parameter variation near the surface plasmon resonance wavelength. After the fabricating process, we characterized the magneto optical effect of the composite ferromagnetic grating and the capabilities for detecting bio-molecules. The maximum of measured Kerr signal is about 0.04 with convert factor of 0.087 nm-1. Through this integrated system, we have demonstrated the detection of sucrose solution in low concentrations. The calculated resolution for bulk solution is about 10-6 RIU, corresponding to a minimal concentration of 0.007 %(wt). Moreover, a preliminary experimental result on studying avidin biotin interaction was also shown. The sensitivity of avidin detection in PBS solution is about 31 nM, which is limited by the fluctuation of flowing media during measurement. The whole system is potential to accomplish a compact, noncontact optical detection scheme.

Abstract I
摘要 II
目錄 III
圖目錄 V
表目錄 VIII
第一章 緒論 1
1.1 表面電漿 1
1.2 微流體系統 2
1.3 研究動機 3
1.4 文章架構 5
第二章 理論背景 6
2.1 表面電漿基本原理 6
2.2 偏振方向與表面電漿模態之關係 8
2.3 激發表面電漿波 10
2.4 磁光效應原理 14
2.5 磁光柯爾效應 16
2.6 表面電漿磁光效應 18
2.7 生物感測器之應用 20
第三章 實驗模擬與元件設計 23
3.1 時域有限差分法(FDTD) 23
3.2 材料分析 29
3.3 非等向性色散曲線 31
3.4 元件最佳化設計 33
第四章 元件製作及量測系統 38
4.1 元件製作流程圖 38
4.2 元件製作流程說明 39
4.3 微流道製作 44
4.4 量測系統架設 48
4.5 功率放大器與電磁鐵製作 49
第五章 實驗量測與分析 50
5.1 磁光訊號量測 50
5.2 蔗糖水溶液的量測與解析度估計 51
5.3 生物檢體組 52
5.4 生物檢體量測方法 54
5.5 動態生物量測 55
第六章 結果與討論 57
6.1 結論 57
6.2 改善 58
參考資料 59

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