在矽基板的光積體電路中，被動元件絕緣層覆矽光柵耦合器為主要的耦光橋梁。其中能垂直出光的光柵耦合器對於表面收發訊號的光電元件將非常重要，垂直出光將可以大量的減少封裝成本，原因為非垂直出光會需要複雜的機械封裝，但是對於光柵耦合器垂直出光將容易產生二階的繞射，此時將會明顯的降低光柵耦合器與元件的耦合效率與產生明顯的反射訊號，因此我們在研究上提出了新的概念來製作高效率並能垂直出光的光柵耦合器，在論文中我們主要分成二部分，第一部分先從元件數值模擬去設計我們元件結構的參數，同時得到垂直出光與較佳的耦合效率，第二部分為元件製作流程，依照我們的設計流程，由光柵耦合器對接耦合至標準的單模光纖其操作波長為1310 nm，光柵耦合器數值模擬結果為有-1.1 dB的耦合效率及- 24.4 dB的二階繞射訊號，其頻譜都有20 nm的線寬 (數值上模擬並無全面參數優化)，此結果相較於文獻中垂直出光光柵耦合器，我們的元件製作可經由一般的COMS製成達成，在模擬設計上也不需要複雜的數值運算來得出優良的效率。

Silicon-on-insulator grating coupler is a crucial passive device that enables the coupling of light into and out of a submicron, silicon-based photonic integrated circuit. In particular, a grating coupler with completely vertical emission is vital for interfacing surface-emitting/receiving optoelectronic devices, and can largely reduce the packaging cost and complexity due to off-normal configuration. Unfortunately, for a grating coupler with completely vertical emission, it inevitably induces the second-order diffraction that significantly degrades the coupling efficiency and enhances the backreflection. In this work, we propose and study a new concept for making a high-performance grating coupler with completely vertical emission. In the thesis, we divided into two parts, the first part is device simulation we start to design the parameter of structure to achieve a vertical emission and a better coupling efficiency, the second part is device production process. Following our design strategy, we numerically show that a 1.1 dB total coupling loss, a - 24.4 dB backreflection, and a 20 nm spectral linewidth can be achieved at the same time (without full optimization), when our grating coupler is butt-coupled to a standard single-mode fiber operating around 1310 nm wavelengths. Compared to the previous proposals such as slant grating, polymer wedge, and entrance mirror made by slit or chirped grating, our approach requires only CMOS process compatible elements and does not involve complex numerical methods to reach the desired performances.

致謝 I
摘要 II
Abstract III
目錄 IV
圖目錄 V
表目錄 VII
第1章 緒論 1
1.1 光柵耦合器 2
1.2 臨界耦合分析 6
第2章 光柵耦合器的臨界耦合設計 9
2.1 布拉格反射鏡 12
2.2 繞射光柵 16
2.3 結構參數優化 17
2.4 臨界耦合 21
2.5 光場分布與耦合效率 24
2.6 角反射鏡 28
第3章 光柵耦合器製作 31
3.1 光柵耦合器製作流程 32
第4章 光柵耦合器量測設計 44
第5章 結論與未來工作 47
參考文獻 49

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