本實驗室近年積極發展大面積液態刮刀塗佈製程，有機發光二極體製程方面已成功將塗佈面積上升到5.5 cm × 15 cm，連續供料製程元件面積達到4 cm × 6 cm。連續供料製程因由手動製程進展至自動化製程，雖已大幅提高塗佈良率並解決長距離塗佈膜厚不均問題，但膜面不均勻及膜面缺陷導致元件一外加偏壓便燒毀。為此，本論文以提升大面積有機發光二極體元件製程良率為主軸進行製程手法改善。另外，為達到塗佈公尺等級薄膜並量產之目標，本論文亦開發120 cm生產線機台。
經製程手法改善，連續供料自動化製程已可穩定製作4 cm × 6.5 cm大面積元件，其電流效率最高可達到24.58 cd/A，膜厚均勻度也大幅度提升，膜厚差異均在5奈米以內。將相同的連續供料手法運用在120 cm自動刮刀機，目前已成功塗佈100cm長之PEDOT:PSS AI4083均勻薄膜，其前端與後端膜厚差異僅10 nm；且成功使用生產線機台重複製作出4 cm × 6.5 cm面積元件。
未來將優化元件電性及壽命並開發更大面積製程以塗佈更大面積薄膜。
關鍵字：大面積液態刮刀塗佈、連續供料、大面積有機發光二極體、自動化製程、膜厚均勻、120 cm生產線、100cm長之PEDOT:PSS AI4083均勻薄膜

Our group has devoted to developing large area blade-coating process in recent years. By using continuous delivery process, we can coat a 6 cm × 15 cm organic thin film uniformly and fabricate the organic light-emitting diode device with 4 cm × 6 cm emission area. Since the continuous delivery process has been progressed from manual to automatically process, the uniformity of the organic film can be solved when doing long distance coating. However, there’re still having some defects on the film, such as aggregation or crystallization of small molecular materials and marks of dragging particles. These defects will burn when applying a bias voltage and cause a damage of devices. Therefore, the study is to promote the process stability of large area organic light-emitting diode and to improve the technique of manufacturing process. Moreover, in order to achieve the target of coating meter-scale organic thin film and pilot run, the study also develops 120 cm production line equipment.
After improving the techniques of manufacturing process, automatically continuous delivery process can stably fabricate the organic light-emitting diode device with emission area 4 cm × 6.5 cm and achieve the maximum current efficiency to 24.58 cd/A. Also, the method can enhance the uniformity of film which thickness difference between the front end and back end with only 5 nm. Then, we use the same process in 120 cm production line. It has been successfully applied to coat 100 cm film of PEDOT: PSS AI4083 uniformly which thickness difference between front end and back end with only 10 nm. By using the production line equipment, we can duplicate the large area organic light-emitting diode device with emission area 4 cm × 6.5 cm successfully.
In the near future, we will improve the operated lifetime and characteristic of large area device, and develop new technique to coat much larger organic thin film.
Key words : large area blade-coating process, continuous delivery, OLED device with emission area 4 cm × 6.5 cm, automatically process, uniform thin film, 120 cm production line, coat 100 cm film

目錄
摘要………………………………………………………………………………………………………………i
Abstract………………………………………………………………………………………………ii
致謝……………………………………………………………………………………………………………iv
目錄………………………………………………………………………………………………………………v
圖目錄……………………………………………………………………………………………………vii
表目錄………………………………………………………………………………………………………xi
Chapter1緒論…………………………………………………………………………………………1
1-1 前言……………………………………………………………………………………………………1
1-2 研究動機……………………………………………………………………………………………2
1-3 論文架構……………………………………………………………………………………………3
Chapter2 有機發光二極體理論………………………………………………………4
2-1 有機發光二極體基礎理論…………………………………………………………4
2-2 螢光與磷光發光原理……………………………………………………………………6
Chapter3 OLED元件製作流程…………………………………………………………9
3-1 ITO蝕刻……………………………………………………………………………………………9
3-2 ITO表面處理…………………………………………………………………………………11
3-3 有機薄膜塗佈…………………………………………………………………………………12
3-4 陰極蒸鍍……………………………………………………………………………………………13
3-5 元件封裝……………………………………………………………………………………………14
Chapter4 連續下料製程改善及生產線設備開發………………………15
4-1連續下料製程………………………………………………………………………………………15
4-2 30 cm連續下料設備………………………………………………………………………16
4-3 實驗動機………………………………………………………………………………………………17
4-4 大面積元件(4 cm × 6 cm)燒毀………………………………………………17
4-4.1 shadow mask改善………………………………………………………………………17
4-4.2 減少下料痕跡…………………………………………………………………………………20
4-5 製程及設備震動改善………………………………………………………………………27
4-5.1 連續供料滑台震動………………………………………………………………………28
4-5.2 刮刀與玻璃基板摩擦…………………………………………………………………29
4-6 連續供料方式改善……………………………………………………………………………30
4-6.1 單點下刮刀連續供料(圖4-27)………………………………………………31
4-6.2 雙端點下刮刀連續供料………………………………………………………………32
4-7 元件正極端漏電改善…………………………………………………………………………42
4-7.1 降低電壓在ITO電極的壓降………………………………………………………42
4-7.2 總膜厚提升測試………………………………………………………………………………43
4-8 元件封裝…………………………………………………………………………………………………51
4-8.1 壓克力封裝………………………………………………………………………………………51
4-8.2 大面積螺旋封裝……………………………………………………………………………52
4-9 120 cm生產線系統……………………………………………………………………………55
4-9.1 手套箱設計………………………………………………………………………………………56
4-9.2 腔體內機台配線……………………………………………………………………………57
4-9.3 自動下料裝置…………………………………………………………………………………60
4-9.4 自動熱風裝置與系統整合……………………………………………………………62
4-9.5 PEDOT:PSS溶液塗佈……………………………………………………………………66
4-9.6 使用生產線設備重現30 cm連續下料設備元件結果………77
Chapter5 結論與未來展望……………………………………………………………………82

[1] 陳金鑫, 黃孝文, OLED夢幻顯示器-OLED材料與元件, 五南圖書.
[2] M. Pope, H. P. Kallmann, P. Magnante, J. Chem. Phys., 38,2042(1963).
[3] R. H. Partridge, Polymer, 24, 733(1983)
[4] C. W. Tang, S. A. VanSlyke, Appl. Phys. Lett.,51, 913(1987).
[5] J. H. Burroughes, D. D. C. Bradley, A.R. Brown, R. N. Marks, K. Mackay, R. H. Friend, P. L. Burns, A. B. Holmes, Nature, 347, 539(1990)
[6] J. Chen, C. Shi, Q. Fu, F. Zhao, Y. Hu, Y. Feng, D. Ma, J. Mater. Chem., 22, 5164(2012)