本論文利用磁光柯爾效應作為研究基礎，自行架設磁性量測系統。近年隨著奈米技術的提升，磁性元件的研究也逐漸發展至奈微米等級，為了測試系統的穩定度與量測品質，我們以NiFe 作為磁膜材料，分別量測膜厚100 nm的連續膜，以及不同長短軸比的微米橢圓。量測結果顯示，當樣品為連續膜，外加磁場達到矯頑場，系統訊號明顯地隨磁矩翻轉變化；當樣品為微米橢圓，不論是改變長軸或短軸尺寸，隨長短軸比縮小，橢圓磁膜矯頑場均逐漸下降。系統訊號因樣品尺度縮小，訊雜比隨之下降，實驗最小尺度已至短軸1 μm，長軸4 μm之橢圓磁膜，訊號仍屬明確，確立本系統能有效量測微米樣品之磁化強度。

With continuously upgrading and improving in nanotechnology, the high sensitive magnetometer is more necessary than ever before. This study designed and constructed a magnetic measurement system on the basis of magneto-optical Kerr effect (MOKE) theory for the purpose of probing the magnetization of magnetic microstructures. In order to demonstrate the performance of MOKE magnetometer, 100 nm thick NiFe Film and micro-ellipses have been fabricated and probed by magnetometer. In this measurement, the magnetometer we have established is able to obtain hysteresis loops with a good signal-to-noise ratio from magnetic microstructures. It’s observed that when the axial ratio of micro-ellipses change from large to small, the coercive field also change from large to small.

摘要 ii
Abstract iii
目錄 iv
圖目錄 vii
第一章 緒論 1
1.1 前言 1
1.2 研究動機與目的 1
第二章 原理與文獻回顧 3
2. 1 磁性材料 3
2.1.1 磁矩 4
2.1.2 磁區與磁壁 5
2.1.3 鐵磁性材料與磁滯現象 6
2.1.4 磁異向性 9
2.2 磁光柯爾效應 9
2.2.1 偏振 10
2.2.2 磁光柯爾效應原理 11
2.2.3 磁光柯爾效應訊號檢測 14
2.2.4 磁光柯爾效應種類 17
2.3 雷射 18
2.3.1 雷射模態 18
2.3.2 高斯光束 19
2.3.3 雷射聚焦 19
2.4 文獻回顧 20
2.4.1 系統架構 20
2.4.2 各種磁膜的磁化過程 23
第三章 研究方法 25
3.1 量測架構設計 25
3.1.1 系統操作流程 29
3.2 樣品製作 29
第四章 結果與討論 31
4.1 磁性連續膜量測 31
4.2 磁性橢圓量測 31
4.2.1 短軸3.0 μm 橢圓系列量測 32
4.2.2 短軸1.5 μm 橢圓系列量測 34
4.2.3 短軸1.0 μm 橢圓系列量測 36
4.2.4 各系列橢圓矯頑場比較 38
第五章 結論與未來工作 39
5.1 結論 39
5.2 未來工作 39
參考文獻 40

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