為了因應超精密機械產業與高承載的需要，許多工具機台採用液靜壓軸承做為設計，其中系統需要節流器做為壓力補償元件。節流器的形式會影響軸承表現，而主動式節流器會比固定式節流器有更佳的剛性表現，又以薄膜式節流器在製造上的穩定性較高。故本文將分析薄膜式節流器的設計，取代一般常見的毛細管與孔口節流器。
有關薄膜式節流器性能的模擬，過去許多研究將薄膜變形簡化，與實際節流器流阻仍有不少差異。因此本研究將針對薄膜式節流器進行分析，藉由電腦程式的數值模擬，加入薄膜變形計算，來幫助了解薄膜式節流器相關參數的影響，包含薄膜材料、組裝間隙、尺寸幾何對節流器流阻的影響。並且以理論公式與模擬程式為根據，配合不同的單向墊軸承評估最佳的薄膜式節流器參數，藉以建立單向墊軸承選配薄膜式節流器時的流程與指標。
本研究亦在設計上加入考慮薄膜的疲勞破壞與節流器加工情形，利用彈簧預壓對膜片的變形量進行調節，並模擬其性能表現。最後進行實驗量測，與模擬結果進行比對，來驗證所建立的理論模型。

In order to achieve high precision machining, hydrostatic bearing are frequently adopted in many machine tools design. Restrictor which can compensate pressure plays an important role in the hydrostatic bearing system. The performance of the hydrostatic bearing is highly dependent on the design of restrictors. The design of membrane-type restrictor, one of the self-compensation restrictors which can provide higher bearing stiffness than passive restrictors is studied.
In this study, it is of interest to study effects of parameters on the performance of the bearing system. And such that a proper way to design restrictors for associated bearing system can be identified. The parameters studied include materials of the membrane, restrictor clearance and the geometry of the restrictor.
Based on the theory and simulation program, the effects of parameters on bearing performance can be studied and then the optimal parameters of the membrane-type restrictor can be identified for a desired single pad bearing.
Concerning about the endurance failure of the membrane and the manufacturing imperfect of the restrictor, a spring is adopted to adjust the deformation of the membrane by preloading. The performance of the spring-membrane-type restrictor is also be simulated.
A test bench of membrane-type restrictor is designed to verify the simulation result. These results provide a formulation for the design of membrane-type restrictor.

摘要 I
誌謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章 緒論 1
第二章 文獻回顧 4
2.1 液靜壓軸承的研究 4
液靜壓軸承的應用 6
軸承性能比較 6
2.2 壓力調節機制 8
毛細管節流器 10
孔口節流器 11
滑閥式節流器 12
薄膜式節流器 13
2.3 薄膜式節流器的研究 15
單向薄膜節流器 15
雙向薄膜節流器 18
2.4 本章結論 21
第三章 研究目的與方法 22
3.1 研究步驟 22
3.2 理論分析 24
薄膜式節流器理想間隙公式 25
薄膜變形公式 29
雷諾方程式 33
3.3 模擬方法 36
節流段流場模擬 36
參數選配流程 38
第四章 基本薄膜式節流器模擬與結果討論 40
4.1 變形模擬程式驗證 40
4.2 膜片材料對變形量之影響 42
4.3 膜片厚度對節流性能之影響 44
4.4 組裝間隙對節流性能之影響 45
第五章 彈簧薄膜式節流器模擬與結果討論 48
5.1 節流性能模擬方法 49
搭配彈簧的膜片變形模擬 49
5.2彈簧剛性對節流性能的影響 51
5.3彈簧壓縮量對節流性能的影響 52
5.4 薄膜式節流器性能分析 55
第六章 驗證實驗 57
6.1實驗架構 57
薄膜式節流器 57
軸承搭配薄膜式節流器之剛性實驗 59
6.2 實驗步驟 62
6.3 實驗結果 64
第七章 結論與未來工作 66
7-1 結論 66
7-2 未來工作 67
參考目錄 68

參考目錄
[1] R.Bassani and B.Piccigallo, Hydrostatic Lubrication, Amsterdam, AE: Elsevier, 1992.
[2] A. M. Loeb and H. C. Rippel, “Determination of optimum proportions for hydrostatic bearings,” ASLE Transactions, pp. 241-247, 1958.
[3] W. Brian Rowe DSc, FIMechE, Hydrostatic, Aerostatic, and Hybrid Bearing Design, Elsevier, 2012, pp. 275-314.
[4] M. S. A. Kotilainen, Design and manufacturing of modular self-compensating hydrostatic journal bearings (Doctoral dissertation, Massachusetts Institute of Technology), 2000.
[5] B. Bhushan, Introduction to Tribology, New York: John Wiley and Sons, 2002.
[6] A. Harnoy, Bearing Design in Machinery: Engineering Tribology and Lubrication, New York: Marcel Dekker, 2003.
[7] B. J. Hamrock, R. S. Steven and B. O. Jacobson, Fundamentals of Fluid Film Lubrication, New York, NY: Marcel Dekker, 2004.
[8] N. R. Kane, Surface self-compensated hydrostatic bearings (Doctoral dissertation, Massachusetts Institute of Technology), 1999.
[9] D. J. G. C, “A New Type of Controlled Restrictor (M.D.R) For Double Film Hydrostatic Bearings and Its Application to High-Precision Machine Tools,” 於 Pergamon Press, Oxford, 1966.
[10] W. B. Rowe, J. P. O'Donoghue, “Diaphragm Valves for Controlling Opposed Pad Hydrostatic Bearings,” Proceedings of the Institution of Mechanical Engineers, Conference Proceedings, 184, pp. 1-9, 1969-70.
[11] S. A. Morsi, “Passively and Actively Controlled Externall Pressurized Oil-Film Bearings,” Journal of Tribology, pp. 56-63, 1972.
[12] Yuan Kang, Ping-Chen Shen, Yeon-Pun Chang, Hsing-Han Lee, Chih-Pin Chiang, “Modified predictions of restriction coefficient and flow resistance for membrane-type restrictors in hydrostatic bearing by using regression,” Tribology International, pp. 1369-1380, 9 2007.
[13] Yuan Kang, Ping-Chen Shen, Cheng-Hsign Chen, Yeon-Pun Chang and Hsing-Han Lee, “Modified determination of fluid resistance for membrane-type restrictors,” Industrial Lubrication and Tribology, 編號 122, pp. 123-131, 2007.
[14] Makoto Gohara, Kei Somaya, Masaaki Miyatake, Shigeka Yoshimoto, “Static characteristics of a water-lubricated hydrostatic thrust bearing,” Tribology International, pp. 111-116, 2014.
[15] Cusano, “Characteristics of Externally Pressurized Journal Bearing with Membrane type Variable-flow Restrictors as compensating elements”.
[16] S. Timoshenko, Theory of Plates and Shells, New York: Mcgraw-Hill College, 1959.
[17] B. C. Majumdar, "The numerical solution of hydrostatic oil journal bearings with several supply ports," Wear, pp. 389-396, 1969.
[18] Moshin, “The Use of Controlled Restrictors ofr Compensating Hydrostatic Bearing,” 於 Third International Conference on Machime Tool Design Research, 1963.
[19] 盧佳崴, “新型主動式補償液靜壓軸承設計及實驗驗證,” 清華大學動力機械工程學系學位論文, 2011.