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作者(中文):陳品妏
作者(外文):Chen, Ping Wen
論文名稱(中文):以複合鍍膜系統製備仿生二氧化鈦/聚亞醯安多層薄膜之強化機制與多功能性質探討
論文名稱(外文):Toughening Mechanisms and Multi-functionalities of Bio-inspired Titanium dioxide/Polyimide Multilayered Coatings via Hybrid Deposition
指導教授(中文):杜正恭
指導教授(外文):Duh, Jenq Gong
口試委員(中文):陳柏宇
吳芳賓
杜正恭
口試委員(外文):Chen, Po Yu
Wu, Fan Bean
學位類別:碩士
校院名稱:國立清華大學
系所名稱:材料科學工程學系
學號:102031701
出版年(民國):105
畢業學年度:104
語文別:英文
論文頁數:154
中文關鍵詞:仿生多層薄膜磨潤性質抗腐蝕特性破裂韌性韌性強化機制
外文關鍵詞:bio-inspirationmultilayered thin filmwear propertycorrosion resistancefracture toughnesstoughening mechanism
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鮑魚殼層主要由無機碳酸鈣組成,然而其韌性遠高於純碳酸鈣,此優異之機械性質乃起因於無機質與有機質所組成之類層狀結構。受鮑魚殼啟發進而發展出混合多層薄膜,本研究係採用反應式磁控濺鍍與脈衝雷射蒸鍍組成之複合系統製備出一有機/無機多層薄膜。此仿生多層薄膜主要由單層厚度分別為100 nm及150 nm之二氧化鈦(titanium dioxide)及厚度由5 nm至30 nm之聚亞醯安(polyimide)組成,利用原子力顯微鏡、掃描式電子顯微鏡與X光繞射分析薄膜性質,鮑魚殼及多層薄膜之機械性質以奈米壓痕及刮痕儀進行分析,分別經由恆電位電流儀與球對盤磨耗試驗分析薄膜之腐蝕與磨耗特性。復利用基板法以及奈米壓痕法評估薄膜破裂韌性,並深入探討其破裂機制以及多層介面間現象。
實驗結果顯示,儘管經過脫蛋白製程之鮑魚殼硬度由6.9降至4.2 GPa,其值仍在相關研究結果範圍且接近純碳酸鈣,表示蛋白質並不會影響鮑魚殼之硬度等機械性質。而在有機/無機多層膜之硬度量測結果中亦可發現,當高分子層體積比少於5%時其硬度與純無機成分相似,隨高分子厚度增加,楊式係數及硬度隨之降低。同時從刮痕試驗結果可得知高分子層增厚會降低介面強度。經磨耗試驗後100TiO2-20PI之摩擦係數降至0.4,表示高分子層所提供之荷重剪切區域可有效降低多層薄膜摩擦係數。此外,非晶態高分子層可阻斷腐蝕液藉經介擴散至基材的通道,遂使100TiO2-20PI薄膜顯現較佳抗腐蝕特性。於不同厚度周期下,單層高分子厚度10 nm 時多層薄膜可有效提升破裂韌性,當單層二氧化鈦層為100 nm,薄膜最高韌性可達3.2 MPa∙m1/2,而膜中若層數較多則對於強化破裂韌性有正向效果。
本研究以二氧化鈦與聚亞醯安多層複合薄膜,調控不同週期厚度以達到一定程度之硬度、優異抗磨耗、抗腐蝕及破裂韌性,並以深入探討性質提升之機制為目的,以期提供未來仿生薄膜之設計參考。
Abalone shells are composed mainly of minerals (i.e. calcite), yet it is much tougher as compared to that of calcite. The excellent mechanical property of nacre is attributed to its organized layered-like structure consisting of aragonite platelets and organic materials. Consequently, a hybrid multilayered configuration is inspired from nacre, and a hybrid system combining radio frequency (RF) sputtering and pulsed laser deposition (PLD) is established to synthesize the bio-inspired organic/inorganic layers sequentially in present work. The bio-inspired multilayered thin films are composed of an inorganic layer of 100 nm- and 150 nm-thick TiO2 as well as an organic layer of polyimide (PI) ranging from 5 to 30 nm. Thin films are characterized by an atomic force microscopy (AFM), scanning electron microscopy (SEM) and X-ray diffraction (XRD). Mechanical properties of thin films and nacres are evaluated using nanoindenter and scratch tester. The electrochemical and ball-on-disk wear testers are used to conduct the corrosion and tribological properties of thin films, respectively. The fracture toughness of thin films is characterized via substrate indentation and nano-indentation methods, and the fracture mechanisms and interface phenomenon have also been discussed.
The hardness of deproteined shell decreases to 4.2 from 6.9 GPa after deproteinized process, yet the values are still in range of literature (4~9 GPa) and close to those of calcite around 7 GPa. It means that the protein does not affect the mechanical properties of nacre. The interesting result of multilayers for hardness measurement also shows similar trend to shell while the polymer thickness is less than 5 % organic layer. Then, the hardness and elastic modulus significantly decrease with increasing PI thickness. Based on the results of adhesion test, it can be confirmed the thinner polymer in multilayer, the stronger interface strength. The wear test illustrates that a minimum coefficient of friction around 0.4 is found in 20 nm-thick PI in 100 nm-thick TiO2 series. The tribological enhancement is resulted from the shear zone provided by polymer layer under loads. Meanwhile, thicker PI in multilayered coating blocks the path for corrosion solution so that the 20 nm-thick PI exhibits better corrosion resistance. For fracture toughness, 10 nm-thick PI layer in all multilayers shows better fracture toughness. 100TiO2/10PI multilayer even reveals the maximum fracture toughness of 3.2 MPa∙m1/2, suggesting that more layers in coatings also provide positive contribution on fracture toughness.
The bilayer thickness of hybrid multilayered thin films developed in this study with adequate hardness, good anti-wear ability, corrosion resistance, and better fracture toughness can be used as a guideline for designing bio-inspired thin films.
List of Tables VI
Figures Caption V
Abstract XI
Chapter 1 Introduction 1
Chapter 2 Literature Review 4
2.1 The Development of Bio-materials 4
2.1.1 Characteristics of Biological Materials 4
2.1.2 Mechanical Performance of Natural Armors 8
2.1.3 Review of Natural Armors: Abalone Shells 11
2.1.3.1 Hierarchical Structures and Mechanical Properties of Nacre 11
2.1.3.2 Toughening Mechanisms in Nacre 17
2.1.3.3 Multilayer Composites Inspired by Nacre 21
2.2 Sputtering Technique 27
2.2.1 RF Magnetron Sputtering 27
2.2.2 Reactive Magnetron Deposition 28
2.3 Pulsed Laser Deposition 31
2.3.1 Typical PLD systems 31
2.3.2 Formation of Polymer Films by Pulsed Laser Deposition 34
2.4 Review of Multilayer Coatings 36
2.4.1 Strengthening Mechanisms 36
2.4.1.1 Shear Modulus Difference Hardening 37
2.4.1.2 Crack Arresting 38
2.4.2 The Anti-corrosion Behavior 39
2.4.3 Tribological Behavior 40
2.5 Properties Evaluations and Characterizations 44
2.5.1 Nano-indentation Method 44
2.5.2 Nano-scratch Method 45
2.5.3 Surface Roughness Measurement 46
2.5.4 Water Contact Angle and Surface Energy Measurement 46
2.6 Fracture Toughness Evaluation 50
2.6.1 Nano-indentation Method 51
2.6.2 Substrate Indentation Method 52
Chapter 3 Experimental Procedure 56
3.1 Sample Preparation 58
3.1.1 Deproteinzied Nacre 58
3.1.2 Substrate Preparation 60
3.2 Hybrid Sputtering System 60
3.3 Fabrication of TiO2/Polyimide Multilayered Thin Film 63
3.4 Measurement and Analysis 65
3.4.1 Composition Analysis 65
3.4.2 Phase Identification 65
3.4.3 Surface Characterization 65
3.4.4 Microstructure Analysis 66
3.4.5 Hardness and Elastic Modulus 66
3.4.6 Scratch Test 67
3.4.7 Tribological Property 67
3.4.8 Fracture Toughness 68
3.4.8.1 Substrate Indentation Method 68
3.4.8.2 Nano-indentation method 70
3.4.9 Electrochemical Corrosion Tests 70
3.4.10 Water Contact Angle and Surface Energy Measurements 71
Chapter 4 Results and Discussion 72
4.1 Mechanical Properties of Deproteinized Abalone Shell 72
4.1.1 Microstructure, Elastic Modulus and Hardness Evolution of Nacre 72
4.1.2 Scratch Behavior of Nacre 75
4.2 Phase identification and Microstructure Analysis of TiO2/ Polyimide 79
4.2.1 Monolayer and Multilayer Coatings with Different Bilayer Periods 79
4.2.2 Cross-sectional Microstructure of Coatings 81
4.2.3 Surface Roughness of Coatings 87
4.3 Mechanical and Adhesion Properties of TiO2-xPolyimide 91
4.3.1 Hardness and Elastic Modulus 91
4.3.2 Evaluation of Adhesion 95
4.4 Tribological Performance of Multilayer Coatings 100
4.5 Wetting Property and Surface Free Energy of Multilayer Coatings 106
4.6 Electrochemical Characteristics of Multilayer Coatings 109
4.7 Fracture Toughness Behaviors 116
4.7.1 Substrate indentation method 116
4.7.2 Nano-indentation method 123
4.7.3 Enhancement of Fracture Toughness in Multilayer Coatings 128
Chapter 5 Conclusions 142
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