本論文以乙炔(C2H2)做為碳源氣體，並調節氫氣(H2)和氬氣(Ar)的流量，使用熱裂解化學氣相沉積法的方式，目前於600oC條件下成功成長多壁奈米碳管(MWCNTs)於二氧化矽(SiO2)基板上。而本論文也有將製程氣體流量、成長溫度以及製程壓力等參數對奈米碳管成長的影響做簡單的說明。
接著我們會對使用熱裂解化學氣相沉積法成長出來的奈米碳管薄膜做化學修飾，化學修飾是利用汞弧燈(Mercury short-arc lamps)以光化學反應(Photochemical Reaction)的方式去產生活性大的自由基，希望藉由光化學反應產生的自由基和我們使用熱裂解化學氣相沉積法成長出來的奈米碳管去做反應。而在光化學反應部分則主要是使用汞弧燈對四種結構不同的有機聯胺去做照射，目的是希望藉由光化學反應產生的NO2自由基或NH2自由基能接上奈米碳管表面，而硝基對碳管來說是一拉電子基，胺基則是推電子基，藉此可以對奈米碳管的電性或功函數(Work Function)做一些調變。實驗部份我們使用了場發射電子顯微鏡(Field Emission Scanning Microscope )、四點探針(Four-Point Probe)、拉曼光譜儀(Raman Spectroscopy)、紫外光光電子能譜(Ultra-violet photoelectron Spectroscopy ) 及X 光光電子發射能譜術(X-ray Photoemission Spectroscopy) 做量測，了解奈米碳管在經化學修飾後其電性及結構上的改變。

In this study, the C2H2 was used as carbon source in the chemical vapor deposition to grow carbon nanotubes at 600oC by controlling both gas flow rate of H2 and Ar. Through changing the gas flow rate, we successfully grew multi-wall carbon nanotubes (MWCNTs). To understand the doping effects on the functionalized MWCNTs, different organic hydrazines with functional groups such as phenyl,–NO2 or –NH2 were used to chemically treat MWCNTs. To characterize the functionalization of MWCNTs, we employed the Field Emission Scanning Microscope for the morphology, and Four-Point Probe, Raman Spectroscopy, Ultra-violet photoelectron Spectroscopy and X-ray Photoemission Spectroscopy for the conducting characteristics, structure and chemical bonding after chemical modification. We found the MWCNTs acquired some nitrogenous bonding structures after the treatment of UV-irradiated 2-Nitrophenylhydrazine solution on the sample. The electric conductivity also showed improvement via the treatment of UV-irradiated 2-Nitrophenylhydrazine, which displayed addition reaction on the -bonds of MWCNTs. We therefore proposed a mechanism to illustrate the functionalization on MWCNTs.

第一章 緒論 1
1-1 前言 1
1-2 奈米碳管之簡介與應用 2
第二章 理論背景與文獻回顧 5
2-1奈米碳管的基本特性 5
2-2奈米碳管的合成方法簡介 6
2-2-1 電弧放電法 6
2-2-2 雷射剝蝕法 7
2-2-3化學氣相沉積法 8
2-3以化學修飾奈米碳管 9
2-3-1奈米碳管表面缺陷 9
2-3-2 共價鍵及非共價鍵化學修飾法 11
2-4 研究目的與動機 13
第三章 儀器設備與實驗原理 17
3-1 高溫熱裂解化學氣象沉積系統 17
3-2 掃描式電子顯微鏡 18
3-3共軛聚焦顯微拉曼光譜儀 18
3-4同步輻射光源 19
3-5 X光光電子發射能譜術(XPS) 20
3-6四點探針量測儀 20
3-7 紫外光光電子發射能譜術(UPS) 21
第四章 實驗步驟 23
4-1 多壁奈米碳管的生長 23
4-1-1 基板備製 23
4-1-2 化學氣相沉積成長奈米碳管之流程 24
4-1-3 成長條件對於奈米碳管之形貌影響討論 24
4-2 聯胺修飾奈米碳管之步驟說明 33
4-2-1聯胺光化學反應 33
4-2-2 聯胺修飾奈米碳管 34
第五章 結果與討論 36
5多壁奈米碳管經有機聯胺處理之特性分析 36
5-1導電性量測 36
5-2 有機聯胺處理前後之奈米碳管表面形貌比較 40
5-3 有機聯胺處理奈米碳管藉由紫外光光電子能譜術分析 45
5-4 拉曼光譜表徵 49
5-5 有機聯胺處理奈米碳管藉由X光光電子能譜術分析(N 1s) 52
5-6 有機聯胺修飾奈米碳管藉由X光光電子能譜術分析(C 1s) 58
5-7 有機聯胺修飾奈米碳管藉由X光光電子能譜術分析(O 1s) 63
第六章 結論 66
第七章 文獻回顧 70

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