本論文以發展大面積液態刮刀塗佈製程之有機發光二極體為主軸。主要研究於改善長距離塗佈後端料不足問題，下料量不足造成後段膜厚大幅下降以及薄膜塗佈不均勻。
本實驗室透過與廠商的密切合作，發展出大面積自動刮刀機，搭配上新研發出的自動供料技術，經過多次的刮膜測試及裝置改良，目前已可塗佈15公分長之均勻有機薄膜，並且成功製作出4公分乘以6公分之大面積發光元件。但因自動供料裝置以及塗佈設備多為半自動，且製程中人為誤差過多，導致薄膜膜厚無法穩定控制，使元件的重現性相當低。
若要量產，穩定製程是必要的條件。因此本實驗室設計出自動化塗佈裝置來改善人為操作造成的誤差，並將供料裝置與大面積自動刮刀機做同步改裝。利用自動化塗佈裝置目前已可穩定地塗佈15公分長之均勻有機薄膜，薄膜之前段膜厚與後段膜厚誤差在5奈米以內，且塗佈的重現性相當高，未來將以塗佈公尺等級有機薄膜為目標。

The dissertation aims to develop large-area liquid blade coating method for organic light-emitting diode.The main research is to improve the material insufficiency problem at the end part when coating long distance,Material insufficiency will lead to the significantly decreased thickness of the end part and to the thin films inhomogeneity.
Our group works closely with the industry to develop an automated large-area coating equipment.With the invention of automatic delivery method,after several coating tests and equipment improvement,we are able to coat 15 cm uniform organic thin film now,and we are able to successfully manufactured the 4 cm x 6 cm large-area lighting device.
For mass production,process stability is a necessary condition.Therefore,our group design an automated coating equipment to reduce the error of manual operation.By synchronizing the automatic delivery device and the automated coating equipment, we are able to coat 15 cm homogeneous organic thin film now.The thickness difference between the front part and the end part is about 5nm,and the coating repeatability is considerably high. The target is to coat meter-scale organic thin film in the future.

摘要 xi
Abstract xiii
致謝 xv
目錄 xvi
圖目錄 vii
表目錄 ix
Chapter 1 緒論 - 1 -
1-1 前言 - 1 -
1-2 研究動機 - 2 -
1-3 論文架構 - 2 -
Chapter 2 有機發光二極體理論 - 4 -
2-1有機發光二極體理論介紹 - 4 -
2-2螢光與磷光原理 - 6 -
2-3有機材料簡介 - 8 -
2-3.1 電洞注入/傳輸材料 - 8 -
2-3.2 電子傳輸材料 - 11 -
2-3.3 主客體發光層材料 - 12 -
Chapter 3有機發光二極體製程流程 - 14 -
3-1 ITO 圖形定義 - 14 -
3-2 ITO Pattern 表面清潔、處理 - 15 -
3-3 薄膜塗佈 - 16 -
3-4 電極蒸鍍 - 18 -
3-5 膜厚量測 - 20 -
Chapter 4 刮刀製程實驗改良以及研發成果 - 22 -
4-1大面積元件製程 - 22 -
4-1.1大面積薄膜塗佈 - 23 -
4-1.2 大面積(A4尺寸)元件 - 24 -
4-2半自動化與全自動化供料大面積元件製程 - 27 -
4-2.1半自動化供料裝置塗佈 - 29 -
4-2.2大面積(4 cm x6 cm)元件製程 - 34 -
4-2.3大面積(4 cm x6 cm)元件析出改善 - 36 -
4-2.4 PEDOT塗佈 - 40 -
4-2.5自動化供料裝置 - 41 -
4-2.6自動化供料裝置之大面積(4 cm x 6 cm)元件製程 - 42 -
Chapter 5 結論與未來展望 - 46 -

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