在此篇論文中提出了透過雙質量塊的振動系統來設計與實現微機電共振式磁力計，用以提高共振式磁力計之磁場感測靈敏度，相較於傳統以單一質量塊系統作為基本架構的共振式磁力計，雙質量塊系統的設計可以增加系統的動態響應進而增加磁力計的感測靈敏度。透過設計、模擬以及半導體製程實現元件，用以驗證雙質量塊振動系統的效能，本文中所設計的元件透過SOI晶片( Silicon-on-insulation wafer )實現使其製程相對簡單，本篇所設計的雙質量塊振動系統之共振式雙軸磁力計對比於單質量塊振動系統，在感測同平面方向磁場以及出平面方向磁場分別有61%和98%的增益，在磁場解析度方面，同平面方向磁場和出平面方向磁場解析度也都分別增加了3.36倍以及2.91倍。

This study designs and implements the approach to improve the performance of resonant magnetometer using the dual mass vibrating system. As compare with the existing single mass vibrating system, the presented dual mass design could increase the dynamic response and further improve the sensing signal of the magnetometer. In application, the present design has been implemented on the Silicon-on-insulation (SOI) wafer with a relatively simple manufacturing process. The measurements indicate: the sensitivity improvements of the present dual mass design are respectively 61% for in-plane magnetic field and 98% for out-of-plane magnetic field. On the other hand, the resolution improvements of the present dual mass design are respectively 336% for in-plane magnetic field and 291% for out-of-plane magnetic field.

目錄 iii
圖目錄 v
表目錄 xi
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 7
1-2-1 感測機制比較 7
1-2-2 電容感測式 11
1-2-3 結論 14
1-3 研究動機 15
第二章 元件設計與理論分析 29
2-1 感測增益流程 29
2-2 結構設計及感測原理 30
2-3 理論與感測性能分析 32
2-3-1 勞倫茲力理論分析 32
2-3-2 元件動態分析 33
2-3-3 運動電流分析 35
2-3-4 感測電路分析 37
2-3-5 雜訊分析 40
2-3-6 參數設計 41
2-4 性能模擬 42
第三章 製程與結果 55
3-1 元件製程流程 55
3-2 製程結果 57
第四章 元件量測結果 68
4-1 靜態量測 68
4-2 動態量測 70
4-3 性能量測 71
4-3-1 感測電路量測 71
4-3-2 性能量測架設 72
4-3-3 性能量測結果 73
第五章 結論及未來工作 90
5-1 結論 90
5-2 未來工作 94
參考文獻 100

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