有別於一般電磁鐵式寫入方法，本論文採用一種較不廣為人使用的永久磁鐵寫入法，在增量式量測系統上製作高附加價值的參考標記。磁性量測系統由於材料取得容易、價格相對低廉、又可在較嚴苛的環境中使用，且應用層面與光學量測系統相似，因此近些年來的發展逐漸受到重視，但受限於現有技術，目前磁性量測系統的精度與解析度仍無法與中高階的光學編碼器相提並論，而其中對磁性量測系統定位精度影響較甚的便是編碼的製作品質。
本研究由理論出發、研擬可行之製程方式，對整體量測平臺進行設計，透過模擬分析與實驗驗證來實現參考標記的製作，其中量測平臺的設計包含元件的選用、尺寸外形設計、控制方法等。為了實現參考標記，參考標記製作方式的選定後，必須針對寫頭外形作設計，並分析最佳磁化參數，以得到較佳的製作品質，此外，我們將對製作完成之量測系統進行實際測試，如場形分佈、位置精度誤差、重現精度誤差等， 在本研究最後的部分，將針對以本研究方法製作的含參考標記之量測系統，進行可靠度試驗的分析，以作為評斷其實際應用上性能表現的參考依據。未來期望此方法能持續不斷的改善，提升量測系統的製造品質，並往更高階的量測系統繼續發展，以應用於工具機或機器人之位置控制。

Different from the commercial usage of electromagnet for manufacturing process, this paper utilized a permanent magnet for manufacturing process to develop index mark on an incremental measuring system. Magnetic encoders have been gradually emphasized in recent years due to its advantage of affordable price and ability to withstand and operate in harsh environment. Also, magnetic encoders have similar application as that of optical encoders. However, the accuracy and resolution of current magnet encoders are not able to compete with the mid or high level performance of optical encoders. The quality of manufacturing process is crucial in influencing the positioning accuracy of magnetic encoders.

This study first used theoretical approach to investigate different manufacturing methods. For the design of measuring platform, simulated and experimental results were used to confirm the feasibility of index mark. The design of measuring platform included the choice of materials, dimensions, and methods of system control. After the manufacturing method is finalized, the shape of the write head needs to design and analyze in order to optimize the quality of manufacturing process. In addition, measuring system was put into test to evaluate the magnetic flux distribution, positioning accuracy, and repeatable accuracy. Finally, reliability analysis was carried out on the sample to examine the performance of index mark on measuring system.

In the near future, the measuring system is expected to improve in order to enhance manufacturing quality and advance to higher level of measuring system development. These improvements will play an important role in the application of machinery and robotic positioning control.

摘要 I
ABSTRACT II
致謝 IV
目錄 V
圖目錄 VIII
表目錄 XI
第一章 緒論 1
1.1 前言 1
1.2 編碼器簡介 1
1.2.1 依檢測原理分類 1
1.2.2 依編碼方式分類 2
1.2.3 依機械結構分類 4
1. 4文獻回顧 4
1.4.1 寫入模式 4
1.4.2 磁性量測系統 6
1.5 研究動機與目標 10
1.6 論文架構 12
第二章 研究方法與設計概念 14
2.1 前言 14
2.2 寫入方法 14
2.3 覆寫頭設計 17
2.3.1 激勵源的選擇 17
2.3.2 覆寫頭外形 18
2.4 覆寫平臺設計 21
2.4.1覆寫平臺構想 21
2.4.2 致動器選用 22
2.4.3 感測器選用 23
2.4.4 控制單元 25
2.5 小結 26
第三章 有限元素法分析 27
3.1 前言 27
3.2 實體模型建立 27
3.3 永久磁鐵外形分析 30
3.4 覆寫間隙對移動方向的影響 33
3.5 入刀深度對寬度方向的影響 35
3.6 覆寫當下的影響 36
3.7 小結 37
第四章 參考標記之實現與性能測試 39
4.1 前言 39
4.2 覆寫平臺之建立 39
4.3 磁通量密度檢測 40
4.3.1 量測平台架設 40
4.3.2 永久磁鐵 41
4.3.3 覆寫頭 46
4.3.4 覆寫前膠磁 48
4.3.5 單次覆寫之記錄媒介 53
4.3.6覆寫後記錄媒介 54
4.4 定位精度檢測 63
4.4.1 增量式編碼精度量測 64
4.4.2參考標記重現精度量測 67
4.5 可靠度測試 68
4.6 小結 72
第五章 結論與未來展望 73
5.1 結論 73
5.2 未來展望 75
參考文獻 78

[1] 黃建中, 工具機與零組件 vol. 55: 台灣區工具機暨零組件工業同業公會, 2013.
[2] K. Miyashita, T. Takahashi, and M. Yamanaka, "Features of a magnetic rotary encoder," IEEE Transactions on Magnetics, vol. 23, pp. 2182-2184, 1987.
[3] W. I. Frank, A. B. White, and I. L. Resnick, "Precision Shaft-Position Encoders," IRE Transactions on Instrumentation, vol. PGI-5, pp. 168-173, 1956.
[4] P. Mecklenburg, W. Pehlert, and D. Sullivan, "Correction of errors in multilevel Gray coded data," IEEE Transactions on Information Theory, vol. 19, pp. 336-340, 1973.
[5] Y. Gupta, L. Garg, S. Khandelwal, S. Gupta, and S. Saini, "Design of low power and high speed multiplexer based Thermometer to Gray encoder," International Symposium on Intelligent Signal Processing and Communications Systems (ISPACS) , pp. 501-504, 2013.
[6] M. S. Kuniaki Yoshimura, Takehiko Sagara, Hideo Murata, "Magnetic Encoder Including Plural Magnetic Pole Lines Having Differing Magnetic Pitches and Plural Magnetic Resistance Effect Elements," US Patent 5172057, 1990.
[7] M. Ikeda and H. Kaku, "MR Sensor for Magnetic Encoder," IEEE Translation Journal on Magnetics in Japan, vol. 7, pp. 705-713, 1992.
[8] T. Katagiri, T. Momose, and H. Mizumoto, "An integrated single-output signal encoder for both multi-turn absolute encoder use and incremental encoder use," Conference Record of the IEEE in Industry Applications Society Annual Meeting, pp. 347-351 vol.1, 1994.
[9] SIKO. GmbH. Application of Magnetic Encoder. Available: http://www.siko-global.com/en-tw . July, 03, 2014.
[10] 東洋磁気工業株式会社. Magnetizer of Magnetic Encoder. Available: http://www.magnix.com/message.htm . July, 03, 2014.
[11] H. Okuno, M. Ishikawa, and Y. Sakaki, "Properties of SmCo film for magnetic rotary encoder," IEEE Transactions on Magnetics, vol. 23, pp. 2425-2427, 1987.
[12] L. Yin-Jao, E. T. Hwang, and S. M. Huang, "Multi-pole magnetization of high resolution magnetic encoder," Proceedings in Electrical Electronics Insulation Conference and Electrical Manufacturing & amp; Coil Winding Conference, Chicago '93 EEIC/ICWA Exposition, pp. 237-242, 1993.
[13] Y. Kikuchi, F. Nakamura, H. Wakiwaka, H. Yamada, and Y. Yamamoto, "Consideration for a high resolution of magnetic rotary encoder," IEEE Transactions on Magnetics, vol. 32, pp. 4959-4961, 1996.
[14] Y. Kikuchi, F. Nakamura, H. Wakiwaka, and H. Yamada, "Index phase output characteristics of magnetic rotary encoder using a magneto-resistive element," IEEE Transactions on Magnetics, vol. 33, pp. 3370-3372, 1997.
[15] Y. Kikuchi, F. Nakamura, H. Wakiwaka, H. Yamada, and Y. Yamamoto, "Consideration of magnetization and detection on magnetic rotary encoder using finite element method," IEEE Transactions on Magnetics, vol. 33, pp. 2159-2162, 1997.
[16] Y. Kikuchi, T. Yoneda, Y. Kataoka, K. Shiotani, H. Wakiwaka, and H. Yamada, "Considerations of output voltage waveform on magnetic linear encoder for artificial heart using linear pulse motor," Sensors and Actuators A: Physical, vol. 81, pp. 309-312, April, 01, 2000.
[17] 邱國基, "多極磁性元件之設計與製作在高精密定位系統之應用," 光電工程研究所, 國立交通大學, 2006.
[18] 內湖電機. (2014). 油質電容式充磁機. Available: http://www.magnetizer.com.tw/p3.htm . July, 03, 2014.
[19] HGST. Perpendicular Recording and Longitudinal Recording. Available: http://www.hgst.com/ . Jul, 03, 2014.
[20] SMC Co. Free Mount Cylinder. Available: http://www.smcusa.com/smc.aspx . July, 03, 2014.
[21] Asahi Kasei. Co. Hybrid Hall Effect ICs. Available: https://www.asahi-kasei.co.jp/asahi/en/ . July, 03, 2014.
[22] S. Yamashita, H. Kaku, and M. Ikeda, "Development of the Absolute Type Magnetic Encoder Suitable for Thinner Structure," IEEE Translation Journal on Magnetics in Japan, vol. 5, pp. 711-719, 1990.
[23] H. Shuanghui, L. Yong, and H. Minghui, "Study on a novel absolute magnetic encoder," IEEE International Conference on in Robotics and Biomimetics, ROBIO, pp. 1773-1776, 2009.
[24] L. Yong, H. Shuanghui, and H. Minghui, "A novel absolute magnetic encoder based on pseudorandom code," International Conference on in Information and Automation. ICIA , pp. 385-390, 2009.
[25] A. Chitayat, "Linear Encoder," US patent 5,907,200, 1999.
[26] Magnescale. (2014). Feedback Scales for NC Machine Tools. Available: http://www.mgscale.com/mgs/language/english/ . July, 03, 2014.