本研究以電泳沉積方式來製造聚二氟乙烯-共-三氟乙烯P(VDF-TrFE)有機壓電高分子薄膜，本方法相對其他壓電高分子製程有以下優點：(1)圖案化之特徵尺寸小；(2)圖案化過程不需利用其他化學材料蝕刻或是其他高能量製程；(3)成膜、圖案化以及極化製程可於單一製程中同步完成，大幅縮減製程程序、時間以及材料耗損。
本論文針對所製作之電泳沉積微圖案壓電高分子薄膜進行表面形態與壓電性之量測，以探討出製程最佳化參數。基礎量測中使用表面粗度儀（α-step）與壓電力顯微鏡（piezo response microscopy, PFM）來探討薄膜厚度及壓電性與電流密度、沉積時間、施加波形以及沉積溫度等因素之關係。本研究所得到之最佳化參數為溫度25 ℃下施加電流密度34.7 μA/cm2沉積10分鐘，壓電薄膜厚度可達3 μm，壓電效應差值可達5.99 pm/V。與過去文獻相比，以本論文開發方法製作之壓電薄膜面積縮小了99.87 %，而成膜圖案化以及極化製程時間則縮短了92.00 %。
最後以最佳化的參數製作直徑680 m之環狀超音波發送器與接收器，整合於30 μm的流道上下兩端，以去離子水為介質進行測試並與對照組比對，其操作的頻率上限分別是1 MHz（10 dB）以及242.45 kHz（20 dB）。而從效能轉換率分析，目前之設計在發送端與接收端的轉換效率最高可達29.03 %。與過去壓電高分子超音波研究文獻來比，以本論文開發方法製作之超音波收發器面積縮小了99.74 %。而與市售薄膜相比，本研究所開發的環狀超音波收發器所量測到的的振幅大42.74倍（10 kHz）。而根據標準正規化的結果，所開發的環狀超音波收發器試片在每單位瓦數中可在量測端多提供3.61 V（100 kHz）。
在未來製程研究上，可持續探討電泳沉積微壓電高分子薄膜之極化增強方式、縮小特徵尺寸、薄膜穩定性；在未來應用上，可持續探討超音波收發器陣列、微型幫浦、壓力感測器、流速感測器、生醫感測器等。

This study presents the micropatterning method of piezoelectric polymer, poly (vinylidene difluoride-co-trifluoroethylene (P(VDF-TrFE)), by electrophoretic deposition (EPD) technique. This developed method has several advantages as below : (1) patterning P(VDF-TrFE) films at micro scale, (2) easier and faster process, (3) material deposition and poling process in one single step. Also, the developed method can greatly reduce the material consumption.
This research studies the surface topography and piezoelectricity of electrodeposited piezoelectric polymer film for optimization of the fabrication parameters. In this work, several parameters have been investigated, such as thickness, piezoelectricity, current density, deposition duration, applied waveform, and deposition temperature. The best electrodepostion condition is under current density of 34.7 μA/cm2 for 10 minute at 25 ℃. So far, the maximum thickness of piezoelectric film is 3 μm while the piezoelectric response is up to 5.99 pm/V. In comparison with the previous works, the size of piezoelectric thin film fabricated by EPD is reduced by 99.87 %, and the fabrication time is reduced by 92.00 %.
Finally, we apply the developed method to fabricate the circular interdigitated ultrasonic transceiver with a diameter of 680 μm. The upper limit of the operating frequency is 1 MHz (10 dB), and the maximum transduction efficiency is 29.03%. Compared with other related works, the size of our developed ultrasonic transceiver is reduced by 99.74 %. After the normalization by input power, our developed ultrasonic transceiver can provide 3.61 V/watt at 100 kHz.
In future, the developed method can be further applied to ultrasonic transceiver array, micropumps, pressure sensos, flow rate sensors, and biosensors.

摘要 I
Abstract III
誌謝 V
目錄 VI
圖目錄 IX
表目錄 XV
第一章 緒論 1
1.1 研究背景 1
1.2 壓電材料 2
1.2.1 壓電效應 2
1.2.2 無機壓電材料 3
1.2.3 有機壓電材料 3
1.3 壓電材料製程 4
1.3.1 厚膜製程 4
1.3.2 薄膜製程 5
1.4 壓電材料圖案化製程 6
1.4.1 光蝕刻製程（photolithography） 6
1.4.2 軟微影技術（soft lithography） 7
1.4.3 射出成型（inject molding） 10
1.4.4 噴印（inkjet printing） 12
1.4.5 電沉積（electrodeposition） 13
1.5 壓電材料極化處理 15
1.5.1 平行板高壓電場極化 16
1.5.2 應力極化 17
1.5.3 退火極化 18
1.6 研究動機 20
1.7 研究目的及方法 20
1.8 論文計劃書架構 21
第二章 設計與模擬 23
2.1 電極形狀設計 23
2.2 有限元素法電場模擬與分析 24
2.2.1 三維電極模型建立與材料選擇 25
2.2.2 施加之電壓邊界條件 26
2.2.3 收斂性測試與網格選擇 27
2.3 模擬結果 29
第三章 材料與製程 35
3.1 壓電高分子材料介紹 35
3.1.1聚二氟乙烯 (PVDF) 35
3.1.2聚二氟乙烯-共-三氟乙烯 ( P(VDF-TrFE) ) 37
3.1.3 溶劑選擇 37
3.2聚二氟乙烯-共-三氟乙烯壓電薄膜製作 39
3.2.1 介電極化（dielectric polarization）現象 39
3.2.2 傳統電鍍製程介紹 42
3.2.3 聚二氟乙烯-共-三氟乙烯之介面電位（zeta potential） 43
3.2.4 電泳沉積參數規劃 46
第四章 實驗與量測結果 47
4.1 非圖案化之溶劑選擇對照組實驗結果 47
4.2 電泳沉積製程參數探討與厚度量測 49
4.2.1 光學顯微鏡表面觀察 50
4.2.2 表面粗度儀（α-step）厚度量測原理 58
4.2.3 量測電泳沉積圖案化定義範圍之P(VDF-TrFE)壓電薄膜厚度 58
4.3聚二氟乙烯-共-三氟乙烯( P(VDF-TrFE) ) 圖案化定義壓電薄膜之極化量測 69
4.3.1 壓電力顯微鏡（PFM）材料壓電性量測原理 69
4.3.2 壓電力顯微鏡量測電泳沉積圖案化定義範圍P(VDF-TrFE)壓電薄膜 70
4.4 對P(VDF-TrFE)的電泳沉積參數探討 77
4.4.1 施加波形對電泳沉積之影響 77
4.4.2 環境因子對電泳沉積之影響 85
4.5 結論 89
第五章 超音波收發器 91
5.1 發展動機 91
5.2 超音波元件成像原理與其應用 91
5.3 壓電材料於聲學領域發展之文獻探討 95
5.4 超音波收發器的設計分析 99
5.5 超音波收發器實驗架設 107
5.6 實驗結果 108
5.7 推論驗證實驗 114
5.8 市售壓電薄膜比較實驗 115
5.9 結論 119
第六章 結論以及研究成果與研究發展 121
6.1 總結 121
6.2 研究成果 122
6.3 學術貢獻點 124
6.4 未來研究建議 131
附錄 135
參考文獻 140
作者簡介 148
發表著作 149

[1] Pierre Curie and Jacques Curie, Bull. Soc. Fr. Mineral., 1880. 3(90).
[2] Abid A. Shah, A FEM-BEM interactive coupling for modeling the piezoelectric health monitoring systems. Latin American Journal of Solids and Structures, 2011. 8(3): p. 305-334.
[3] Andreas Schroth, Ryutaro Maeda, Jun Akedo, and Masaaki Ichiki, Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator. Japanese Journal of Applied Physics, 1998. 37(9B): p. 5342-5344.
[4] B. Morten, G. De Cicco, and M. Prudenziati, Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films. Sensors and Actuators A: Physical, 1992. 31(1-3): p. 153-158.
[5] Dorey, R.A., S.B. Stringfellow, and R.W. Whatmore, Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric properties of a PZT composite thick film. Journal of the European Ceramic Society, 2002. 22(16): p. 2921-2926.
[6] Michael Koch, Nick Harris, Alan G.R. Evans, and Neil M. White, A novel micromachined pump based on thick-film piezoelectric actuation. Sensors and Actuators A: Physical, 1998. 70(1-2): p. 98-103.
[7] Vittorio Ferrari, Daniele Marioli, and Andrea Taroni, Thick-film resonant piezo-layers as new gravimetric sensors. Measurement Science and Technology, 1997. 8(1): p. 42-48.
[8] Yongbae Jeon, Jaeshik Chung, and Kwangsoo No, Fabrication of PZT Thick Films on Silicon Substrates for Piezoelectric Actuator. Journal of Electroceramics, 2000. 4(1): p. 195-199.
[9] P.Muralt, A.Kholkin, M.Kohli, and T.Maeder, Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions. Sensors and Actuators A: Physical, 1996. 53(1-3): p. 398-404.
[10] Elvira M. C. Fortunato, Pedro M. C. Barquinha, Ana C. M. B. G. Pimentel, Alexandra M. F. Goncalves, Antonio J. S. Marques, Luis M. N. Pereira, and Rodrigo F. P. Martins, Fully Transparent ZnO Thin-Film Transistor Produced at Room Temperature. Advanced Materials, 2005. 17(5): p. 590-594.
[11] Yamazaki Osamu, T. Mitsuyu, and K. Wasa, ZnO Thin-Film SAW device. Sonics and Ultrasonics, IEEE, 1980. 27(6): p. 369-379.
[12] Jijun Wang, Huihui Li, Jichun Liu, Yongxin Duan, Shidong Jiang, and Shouke Yan, On the α → β Transition of Carbon-Coated Highly Oriented PVDF Ultrathin Film Induced by Melt Recrystallization. Journal of the American Chemical Society, 2003. 125(6): p. 1496-1497.
[13] Norio Fujitsuka, Jiro Sakata, Yukio Miyachi, Kentaro Mizuno, Kazuo Ohtsuka, Yasunori Taga, and Osamu Tabata, Monolithic pyroelectric infrared image sensor using PVDF thin film. Sensors and Actuators A: Physical, 1998. 66(1-3): p. 237-243.
[14] Seok Ju Kang, Youn Jung Park, Jinwoo Sung, Pil Sung Jo, Cheolmin Park, Kap Jin Kim, and Beong Ok Cho, Spin cast ferroelectric beta poly(vinylidene fluoride) thin films via rapid thermal annealing. Applied Physics Letters, 2008. 92(1): p. 012921-012921-3.
[15] Peng Gao, Xiaosong Tang, Xujiang He, Santiranjan Shannigrahi, Yaolong Lou, Jian Zhang, and Kanzo Okada, A piezoelectric micro-actuator with three dimensional structure and its micro-fabrication. Sensors and Actuators A: Physical, 2006. 130-131: p. 491-496.
[16] K. Prashanthi, N. Miriyala, R.D. Gaikwad, W. Moussa, V.Ramgopal Rao, and T. Thundat, Vibtrational energy harvesting using photo-patternable piezoelectric nanocomposite cantilevers. Nano Energy, 2013. 2(5): p. 923-932.
[17] Bing Xu, Francisco Arias, and George M. Whitesides, Making Honeycomb Microcomposites by Soft Lithography. Advanced Materials, 1999. 11(6): p. 492-495.
[18] Seok Ju Kang, Youn Jung Park, Insung Bae, Kap Jin Kim, Ho-Cheol Kim, Siegfried Bauer, Edwin L. Thomas, and Cheolmin Park, Printable Ferroelectric PVDF/PMMA Blend Films with Ultralow Roughness for Low Voltage Non-Volatile Polymer Memory. Advanced Functional Materials, 2009. 19(17): p. 2812-2818.
[19] Yu Jin Shin, Seok Ju Kang, Hee Joon Jung, Youn Jung Park, Insung Bae, Dong Hoon Choi, and Cheolmin Park, Chemically Cross-Linked Thin Poly(vinylidene fluoride-co-trifluoroethylene)Films for Nonvolatile Ferroelectric Polymer Memory. ACS Applied Materials & Interfaces, 2011. 3(2): p. 582-589.
[20] Leslie J. Bowen and Kenneth W. French, Fabrication of piezoelectric ceramic/polymer composites by injection molding, in Eighth IEEE International Symposium on Applications of Ferroelectrics. 1992. p. 160-163.
[21] Youn Jung Park, Yong Soo Kang, and Cheolmin Park, Micropatterning of semicrystalline poly(vinylidene fluoride) (PVDF) solutions. European Polymer Journal, 2005. 41(5): p. 1002-1012.
[22] Oliver Pabst, Jolke Perelaer, Erik Beckert, Ulrich S. Schubert, Ramona Eberhardt, and Andreas Tünnermann, All inkjet-printed piezoelectric polymer actuators: Characterization and applications for micropumps in lab-on-a-chip systems. Organic Electronics, 2013. 14(2): p. 3423-3429.
[23] Heavens N, Electrophoretic deposition as a processing route for ceramics. In: Binner GP, editor. Advanced ceramic processing and technology, 1990. 1: p. 255-283.
[24] Laxmidhar Besra and Meilin Liub, A review on fundamentals and applications of electrophoretic deposition (EPD). Progress in Materials Science, 2007. 52(1): p. 1-64.
[25] Zhitomirsky I, Cathodic electrophoretic deposition of ceramic and organoceramic materials – fundamental aspects. Adv Colloid Interface Sci, 2002. 97: p. 279-317.
[26] Jonathan D. Foster and Richard M. White, Electrophoretic Deposition of the Piezoelectric Polymer P(VDF-TrFE) in 201st Meeting of The Electrochemical Society (Microfabricated Systems and MEMS VI). 2002: Philadelphia, PA, USA.
[27] Wang Hongjin, Meng Qingfeng, and Zhang Kai, Discussion and Experimental Verification on the Relations of Polarization, Deformation and Induced Voltage of Piezoelectric Material. 2013 International Conference on Mechanical and Automation Engineering (MAEE), 2013: p. 30-33.
[28] Thanh D. Nguyen, John M. Nagarah, Yi Qi, Stephen S. Nonnenmann, Anatoli V. Morozov, Simonne Li, Craig B. Arnold, and Michael C. McAlpine, Wafer-Scale Nanopatterning and Translation into High-Performance Piezoelectric Nanowires. Nano Letters, 2010. 10(11): p. 4595-4599.
[29] Ashis Banerjee and Susmita Bose, Free-Standing Lead Zirconate Titanate Nanoparticles  Low-Temperature Synthesis and Densification. Chemistry of Materials, 2004. 16(26): p. 5610-5615.
[30] Mauro M. Costa and José A. Giacometti, Electric‐field‐induced phase changes in polyvinylidene fluoride Effects from corona polarity and moisture. Applied Physics Letters, 1993. 62(10): p. 1091-1093.
[31] Y.R.Wang, J.M.Zheng, G.Y.Ren, P.H.Zhang, and C.Xu, A flexible piezoelectric force sensor based on PVDF fabrics. Smart Materials and Structures, 2011. 20(4): p. 045009-045009-7.
[32] Dahiya.R.S, Valle.M, Metta.G, Lorenzelli.L, and Pedrotti.S, Deposition, Processing and Characterization of P(VDF-TrFE) Thin Films for Sensing Applications in Sensors, 2008 IEEE. 2008. p. 490-493.
[33] Fangxiao Guan, Jilin Pan, Jing Wang, Qing Wan, and Lei Zhu Crystal Orientation Effect on Electric Energy Storage in Poly(vinylidene fluoride-co-hexafluoropropylene) Copolymers. Macromolecules, 2010. 43(1): p. 384-392.
[34] S. J. Kang, Y. J. Park, J. Hwang, H. J. Jeong, J. S. Lee, K. J. Kim, H. C. Kim, J. Huh, and C. Park, Localized Pressure-Induced Ferroelectric Pattern Arrays of Semicrystalline Poly(vinylidene fluoride) by Microimprinting. Advanced Materials, 2007. 19(4): p. 581-586.
[35] Sang-Hoon Bae, Orhan Kahya, Bhupendra K. Sharma, Junggou Kwon, Hyoung J. Cho, Barbaros Ozyilmaz, and Jong-Hyun Ahn, Graphene-P(VDF-TrFE) Multilayer Film for Flexible Applications. ACS Nano, 2013. 7(4): p. 3130-3138.
[36] Alan Chen, Fabrication of Piezoelecric Polymer Thin Films Based on Non-Electrical Polarization Process and Its Applications to Flexible Nanostructured Tactile Sensor Array. 2012.
[37] Chao Wang, Zheyao Wang, Tian-Ling Ren, Yiping Zhu, Y. Yang, Xiaoming Wu, Haining Wang, Huajun Fang, and Litian Liu, A Micromachined Piezoelectric Ultrasonic Transducer Operating in d33 Mode Using Square Interdigital Electrode. Sensors Journal, IEEE, 2007. 7(7): p. 967-976.
[38] R. Belouadah, D. Kendil, E. Bousbiat, D. Guyomar, and B. Guiffard, Electrical properties of two-dimensional thin films of the ferroelectric material Polyvinylidene Fluoride as a function of electric field. Physica B: Condensed Matter, 2009. 404(12-13): p. 1746-1751.
[39] Marcel Benz, William B. Euler, and Otto J. Gregory, The Role of Solution Phase Water on the Deposition of Thin Films of Poly(vinylidene fluoride). Macromolecules, 2002. 35(7): p. 2682-2688.
[40] H. Ohigashi, Piezoelectric polymers—Materials and manufacture. Japanese Journal of Applied Physics, 1985. 24: p. 23-27.
[41] A. Pecora, F. Maita, and A. Minotti, Flexible PVDF-TrFE pyroelectric sensor driven by polysilicon thin film transistor fabricated on ultra-thin polyimide substrate. Sensors and Actuators A: Physical, 2012. 185: p. 39-43.
[42] W. D. Kingery, H. K. Bowen, and D. R. Uhlmann, Introduction to Ceramics. Wiley, 2nd edition, 1976: p. 918.
[43] Electrochemistry Encyclopedia 2006, Vol. 2009. 2006.
[44] Michael j. Bedzyk, G. Mark Bommarito, Martin Caffrey, and Thomas L. Penner, Diffulse-Double Layer at a Membrane-Aqueous Interface Measured with X-ray Standing Waves. Science, 1990. 248(4951): p. 52-56.
[45] Hang Li, Shiqiang Wei, Changle Qing, and Jinshan Yang, Discussion on the position of the shear plane. Journal of Colloid and Interface Science, 2003. 258(1): p. 40-44.
[46] A. Cavalli, A. Dhanabalan, J.A. Giacometti, and O.N. Oliveira Jr, Langmuir Films of P(VDF-TrFE) copolymers. Synthetic Metals, 1999. 102(1): p. 1411.
[47] Qiaoying Wang, Zhiwei Wang, and Zhichao Wu, Effects of solvent compositions on physicochemical properties and anti-fouling ability of PVDF microfiltration membranes for wastewater treatment. Desalination, 2012. 297: p. 79-86.
[48] G. Binnig, C. F. Quate, and Ch. Gerber, Atomic Force Microscope. Physical Review Letters, 1985. 56(9).
[49] Bharat Bhushan, Handbook of Nanotechnology. 1st ed. 2004, Berlin: Springer.
[50] Roger Proksch and Sergei Kalinin, Piezoresponse Force Microscopy with Asylum Research AFMs. Asylum Research, Application note 10.
[51] C.Medina, J.C.Segura, and S.Holm, Feasibility of ultrasound positioning based on signal strength. 2012 International Conference on Indoor Positioning and Indoor Navigation (IPIN), 2012.
[52] Jerrold T. Bushberg, J. Anthony Seibert, Edwin M. Leidholdt Jr., and John M. Boone, The Essential Physics of Medical Imaging. 2001.
[53] Abbie E. Smith-Ryan, Sarah N. Fultz, Malia N. Melvin, Hailee L. Wingfield, and Mary N. Woessner, Reproducibility and Validity of A-Mode Ultrasound for Body Composition Measurement and Classification in Overweight and Obese Men and Women. PLOS ONE, 2014. 9(3): p. 1-8.
[54] J. E. Wilhjelm, M.-L. M. Grønholdt, B. Wiebe, S. K. Jespersen, L. K. Hansen, and H. Sillesen, Quantitative Analysis of Ultrasound B-Mode Images of Carotid Atherosclerotic Plaque: Correlation with Visual Classification and Histological Examination. IEEE Transactions on medical imaging, 1998. 17(6): p. 910-922.
[55] Karen Ellegaard, Søren Torp-Pedersen, Hans Lund, Kirsten Pedersen, Marius Henriksen, Bente Danneskiold-Samsøe, and Henning Bliddal, The effect of isometric exercise of the hand on the synovial blood flow in patients with rheumatoid arthritis measured by color Doppler ultrasound. Rheumatology International, 2013. 33(1): p. 65-70.
[56] Takehiro Sugimoto, Kazuho Ono, Akio Ando, Kohichi Kurozumi, Akira Hara, Yuichi Morita, and Akito Miura, PVDF-driven flexible and transparent loudspeaker. Applied Acoustics, 2009. 70(8): p. 1021-1028.
[57] Jong Seob Jeong and K. Kirk Shung, Improved fabrication of focused single element P(VDF–TrFE) transducer for high frequency ultrasound applications. Ultrasonics, 2013. 53(2): p. 455-458.
[58] Yusaku Kato, Tsuyoshi Sekitani, Yoshiaki Noguchi, Tomoyuki Yokota, Makoto Takamiya, and Takao Someya, Large-Area Flexible Ultrasonic Imaging System With an Organic Transistor Active Matrix. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2010. 57(5): p. 995-1002.
[59] Li Zhang, Charles B. Theurer, Robert X. Gao, and David O. Kazmer, Design of ultrasonic transmitters with defined frequency characteristics for wireless pressure sensing in injection molding. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2005. 52(8): p. 1360-1371.
[60] George Gabriel Stokes, On the theories of the internal friction in fluids in motion, and of the equilibrium and motion of elastic solids. Transaction of the Cambridge Philosophical Society, 1845. 8(22): p. 287-342.
[61] T. Sakiyama and M. Huang, Free Vibration Analysis Of Rectangular Plates With Variable Thickness. Journal of Sound and Vibration, 1998. 216(3): p. 379-397.
[62] N. Ganesan and K.R. Sivadas, Vibration analysis of orthotropic shells with variable thickness. Computers & Structures, 1990. 35(3): p. 239-248.
[63] K. R. Sivadas and N. Ganesan, Vibration analysis of laminated conical shells with variable thickness. Journal of Sound and Vibration, 1991. 148(3): p. 477-491.
[64] L.M. Pulido-Mancera, J.D. Baena, and J.L. Araque, Thickness Effects in the Resonance of Metasurfaces made of SRRs ans C-SRRs. IEEE INTERNATIONAL SYMPOSIUM ON ANTENNAS AND PROPAGATION AND USNC-URSI NATIONAL RADIO SCIENCE MEETING, 2013.
[65] Kai-Lun Lin, Development and Investigation of Hybrid Piezoelectric /Conducting Polymers and Their Applications in Power Nanogenerators. 2013.
[66] MicroChem Corp, SU-8 2000 Permanent Epoxy Negative Photoresist PROCESSING GUIDELINES. www.microchem.com/Prod-SU82000.htm.
[67] Sheng-Yuan Huang, Nanoimprint of Piezoelectric Polymer Films and Investigation of Their Morphology and Piezoelectricity. 2011.
[68] Weili Ong, Cangming Ke, Pin Lim, Amit Kumar, Kaiyang Zeng, and Ghim Wei Ho, Direct stamping and capillary flow patterning of solution processable piezoelectric polyvinylidene fluoride films. Polymer, 2013. 54(20): p. 5330-5337.
[69] Giancarlo Canavese, Stefano Stassi, Valentina Cauda, Alessio Verna, Paolo Motto, Angelica Chiodoni, Simone Luigi Marasso, and Danilo Demarchi, Different scale confinements of PVDF-TrFE as functional material of piezoelectric sensor devices IEEE Sensors, 2013. 13(6): p. 1-4.
[70] Z.H. Liu, C.T. Pan, L.W. Lin, and H.W. Lai, Piezoelectric properties of PVDF/MWCNT nanofiber using near-field electrospinning. Sensors and Actuators A: Physical, 2013. 193(15): p. 13-24.
[71] W. Liao, W. Liu, J. E. Rogers, F. Usmani, Y. Tang, B. Wang, H. Jiang, and H. Xie, Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging. Transducers & Eurosensors XXVII, 2013: p. 1831-1834.
[72] A. V. Bune, V. M. Fridkin, S. Ducharme, L. M. Blinov, S. P. Palto, A. V. Sorokin, S. G. Yudin, and A. Zlatkin, Two-dimensional ferroelectric films. Nature, 1998. 391: p. 874-877.
[73] R. V. Gaynutdinov, O. A. Lysova, S. G. Yudin, A. L. Tolstikhina, A. L. Kholkin, V. M. Fridkin, and S. Ducharme, Polarization switching kinetics of ferroelectric nanomesas of vinylidene fluoride-trifluoroethylene copolymer. Applied Physics Letters, 2009. 95.
[74] Sheng-Guo Lu, Hui Xiong, Aixiang Wei, Xinyu Li, and Qiming Zhang, Electrocaloric and electrostrictive effect of polar P(VDF-TrFE-CFE) terpolymers. Journal of Advanced Dielectrics, 2013. 3(2): p. 1350015.
[75] Xin Chen, Lu Liu, Shi-Zheng Liu, Yu-Shuang Cui, Xiang-Zhong Chen, Hai-Xiong Ge, and Qun-Dong Shen, P(VDF-TrFE-CFE) terpolymer thin-film for high performance nonvolatile memory. Applied Physics Letters, 2013. 102(6): p. 063103.
[76] Tushar Sharma, Sang-Soo Je, Brijesh Gill, and John X.J. Zhang, Patterning piezoelectric thin film PVDF–TrFE based pressure sensor for catheter application. Sensors and Actuators A: Physical, 2012. 177: p. 87-92.
[77] Zhonghua Zhang, Junwu Kan, Shuyun Wang, Hongyun Wang, Jianming Wen, and Zehui Ma, Flow rate self-sensing of a pump with double piezoelectric actuators. Mechanical Systems and Signal Processing, 2013. 41(1-2): p. 639-648.
[78] Jie Wang, Zhiqiang Zhu, and Hongwei Ma, Label-Free Real-Time Detection of DNA Methylation Based on Quartz Crystal Microbalance Measurement. Analytical Chemistry, 2013. 85(4): p. 2096-2101.