目前軟性觸覺感測器大多只能量測正向力與軸向的側向力，對於感測器而言，如能準確測得側向力的施力方向，則可使得元件具有更多操作應用上之選擇。本研究旨在建立偏移電容式觸覺感測器之誤差分析模型，藉由推導製程與元件作動過程，分析元件於側向力檢測功能。並藉由分析結果進行改良，以能更準確地測得側向力之方向角度與降低隨機誤差為目的。
　　誤差分析方面首先著重於找出造成偏移式電極設計在經由多重物理量耦合分析軟體(COMSOL)模擬，以及元件實際量測數據上，分別與理論計算間產生誤差之原因，並依此結果改良偏移式電極之設計，使元件在檢測側向力施力角度上可達到更精確之目的，以應用於觸控面板上。
　　感測器將以PET、PDMS等具有可撓性之材料為基板與結構層，ITO為材料製作電極，完成之偏移電容式觸覺感測器將以演算法、模擬以及實驗量測等方法對感測器之效能進行驗證。量測將對元件施以不同方向之側向力，以及模擬不同貼合誤差之情形，並使用數位電容轉換器進行電容測量，進行角度換算，以檢測對於角度量測誤差和隨機誤差上之改善。

摘要 I
致謝 II
目錄 III
圖目錄 VI
表目錄 XII
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 3
1.3 研究動機與目標 10
1.4 論文架構 13
第二章 角度量測之誤差分析 14
2.1 角度誤差之來源分析 14
2.1.1 電容式感測器設計示意圖 15
2.1.2 角度量測方法 16
2.1.3 造成角度量測誤差之原因 16
2.2 角度誤差之影響 19
2.2.1 偏移貼合誤差 19
2.2.2 旋轉貼合誤差 23
2.2.3 感測器上下電極間距改變對角度誤差之影響 27
2.2.4 角度誤差變化公式 31
2.3 新型結構及改良方案 36
2.3.1 旋轉貼合誤差改善結果 37
2.3.2 貼合誤差耦合情形之改善 39
第三章 電極設計及其功能模擬 41
3.1 平行電容板理論值推導 41
3.2 新型電極設計 43
3.3 角度演算法 46
3.4 模擬結果 48
3.4.1 正向力之模擬結果 49
3.4.2 角度模擬結果 50
3.4.3 側向力角度結果分析 59
第四章 元件製作 61
4.1 製程說明 61
4.2 電極製作 64
4.3 非電極製作 66
4.4 多層對準與貼合 67
第五章 量測結果與討論 71
5.1 實驗平台 71
5.2 量測結果 73
5.2.1 角度量測 73
5.2.2 角度誤差改善之結果 78
第六章 結論與未來工作 85
6.1 結論 85
6.2 未來工作 86
參考文獻 87

[1] Flexible display：http://en.wikipedia.org/wiki/Flexible_display

[2] U. Paschen, M. Leineweber, J. Amelung, M. Schmidt, and G. Zimmer, "A novel tactile sensor system for heavy-load applications based on an integrated capacitive pressure sensor," Sensors and Actuators A: Physical, vol. 68, pp. 294-298, 1998.

[3] W. H. Ko and Q. Wang, "Touch mode capacitive pressure sensors," Sensors and Actuators A: Physical, vol. 75, pp. 242-251, 1999.

[4] S. Guo, J. Guo, and W. H. Ko, "A monolithically integrated surface micromachined touch mode capacitive pressure sensor," Sensors and Actuators A: Physical, vol. 80, pp. 224-232, 2000.

[5] W. Y. Chang, T. H. Fang, H. J. Lin, Y. T. Shen, and Y. C. Lin, "A Large Area Flexible Array Sensors Using Screen Printing Technology," Journal of Display Technology, vol. 5, pp. 178-183, 2009.

[6] H. K. Kim, S. Lee, K. S. Yun, "Capacitive tactile sensor array for touch screen application," Sensors and Actuators A: Physical, vol. 165, pp. 2-7, 2011.

[7] E. S. Hwang and Y. J. Kim, "A Polymer-based Flexible Tactile Sensor and Its Application to Robotics," The 6th Annual IEEE Conference on Sensors, pp. 784-787, Oct. 28-31 2007, Atlanta, GA.

[8] J. G. V. da Rocha, P. F. A. da Rocha, and S. Lanceros-Mendez, "Capacitive Sensor for Three-Axis Force Measurements and Its Readout Electronics," IEEE Transactions on Instrumentation and Measurement, vol. 58, pp. 2830-2836, 2009.

[9] 王詠辰，“可檢測正向力和剪力之透明軟性觸覺感測器系統”，國立清華大學動力機械工程學系碩士論文，2011。.

[10] N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto and I. Shimoyama, "High sensitive 3D tactile sensor with the structure of elastic pyramids on piezoresistive cantilevers," Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp.41-44, Jan. 20-24 2013, Taipei, Taiwan.

[11] 鍾易宸，“利用偏移電容式觸覺感測器陣列量測具角度之側向力”，國立清華大學動力機械工程學系碩士論文，2013。

[12] B. Kloeck, S. D. Collins, N. F. de Rooij, and R. L. Smith, "Study of Electrochemical Etch-Stop for High-Precision Thickness Control of Silicon Membranes, " IEEE Transactions on Electron Devices, Vol. 36, No. 4, pp. 663-669, 1989.

[13] J. Fricke, and E. Obermeier, "Cantilever beam accelerometer based on surface micromachining technology," J. Micromech. Microeng, Vol. 3, pp. 190-192, 1993.

[14] J. A. Plaza, J. Esteve, and E. Lora-Tamayo, "Simple technology for bulk accelerometer based on bond and etch back silicon on insulator wafers," Sensors and Actuators A: Physical, Vol. 68, pp. 299-302, 1998.

[15] H. chwenke, W. Knapp, A. Weckenmann, R. Schmitt, F. Delbressine, "Geometric error measurement and compensation of machines—An update," Manufacturing Technology. Vol 57, pp. 660-675, 2008.

[16] 藍慶斌，余志成，“壓電薄膜加速度微感測器之系統模擬分析”， 第二十三屆中華民國力學學會，pp1-8，Dec 17-18，1999，新竹，台灣。

[17] 藍慶斌，余志成，“壓電薄膜加速度微感測器之設計穩健化”， 第十六屆中國機械工程學會，pp 140-147，Dec 3-4，1999，新竹。

[18] 趙思浩，陸明泉，馮振明，“MEMS慣性器件誤差系數的Allan方差分析方法”，中國科學，Vol 5，pp 672-675，2010。

[19] H. J. Kwon and W. C. Choi, "Design and Fabrication of a Flexible Three-axial Tactile Sensor Array Based on Polyimide Micromachining," Microsystem Technologies, vol. 16, pp. 2029-2035, 2010.

[20] W. Y. Chang, T. H. Fang, S. H. Yeh, and Y. C. Lin, "Flexible Electronics Sensors for Tactile Multi-Touching," The 8th Annual IEEE Sensors, Vol. 9, pp. 1188-1203, 2009.

[21] M. Y. Cheng, X. H. Huang, C. W. Ma, and Y. J. Yang, "A flexible capacitive tactile sensing array with floating electrodes," Journal of Micromechanics and Microengineering, vol. 19, pp. 115001-1-115001-10, 2009.

[22] P. Peng and R. Rajamani, ” Flexible microtactile sensor for normal and shear elasticity Measurements,” IEEE Transaction on Industrial Electronics, vol. 59, pp. 4907-4913, 2012.

[23] B. Lee, I. Hong, Y. Uhm, and S. Park, "The Multi-Touch System with High Applicability using Tri-axial Coordinate Infrared LEDs," IEEE Transactions on Consumer Electronics, vol. 55, pp. 2416-2424, 2009.

[24] M. Takasaki, Y. Fujii, H. Kotani, T. Mizuno, and T. Nara, "Proposal of Tele-touch Using Active Type SAW Tactile Display," International Conference on Intelligent Robots and Systems, pp. 1032-1037, 2006.

[25] H. Kotani, M. Takasaki, T. Mizuno, and T. Nara, "Integration of Tactile Information and Visual Information Using A Glass Substrate Surface Acoustic Wave Tactile Display," International Joint Conference SICE-ICASE, pp. 5411-5414, Oct. 18-21 2006, Busan.

[26] 簡于涵，“於曲面下操作之軟性觸覺感測器特性分析＂，國立清華大學動力機械工程學系碩士論文，2013。