本研究的目的為藉由調整製程參數而不使用金屬鈦介層，在D2工具鋼上沉積具有良好機械性質的氮化鈦厚膜。使用非平衡磁控濺鍍系統鍍製，主要控制參數為改變渦輪分子幫浦與鍍膜腔體間閘閥開口大小，以及降低渦輪分子幫浦轉速；為了維持鍍膜過程中固定之工作壓力，以固定比例的方式隨之調整氮氣與氬氣通入的流量。實驗分為三組參數，即全開閥、半開閥、以及降低渦輪分子幫浦轉速。本研究成功在D2工具鋼上鍍覆出膜厚6.5微米且具有良好機械性質的氮化鈦厚膜。研究中的試片氮鈦比例介於1.0-1.1之間，硬度介於23-26GPa之間，不隨厚度而改變。半開閥系列試片之殘留應力稍微隨著厚度上升，但皆保持在約-4.2GPa。進一步分析試片HV510的應力梯度，發現殘留應力在薄膜中的分佈是沿著厚度上下波動，此現象可能致使膜厚成功達到6.5微米，其原因為在鍍膜過程中發生了應力釋放的機制。半開閥以及降轉速系列的殘留應力大多隨厚度減小。當膜厚增加至一定值時，在塗層表面有多面擠壓物產生，而導致殘留應力的降低。然而，這些擠壓物不利於塗層的附著性與耐磨耗性。刮痕測試與磨耗試驗的結果顯示，在所有研究試片中，半開閥試片510具有最佳的耐磨性以及優異的附著力。在半開閥和降轉速的沉積條件下，渦輪分子幫浦的消耗能量比起在全開閥的沉積條件分別降低19%和51%，並且可以延長渦輪分子幫浦的保養期限，不但可以節省能源並可以降低維護的成本，對於塗層工業而言相當有益。

摘要 i
Abstract ii
致謝 iii
Content v
List of Tables xi
Chapter 1 Introduction 1
Chapter 2 Literature Review 2
2.1 Deposition Method 2
2.2 Characteristics of TiN 4
2.3 Effect of Deposition Parameters 7
2.4 The Mechanical Properties of TiN Coatings 9
Chapter 3 Experimental Details 12
3.1 Substrate Preparation 12
3.2 Coating Process 12
3.3 Characterization Methods for Structure and Composition 17
3.3.1 X-Ray Photoelectron Spectroscopy (XPS) 17
3.3.2 Field-Emission Gun Scanning Electron Microscopy (FEG-SEM) 17
3.3.3 X-Ray Diffraction (XRD) and Grazing Incidence XRD (GIXRD) 18
3.3.4 Atomic Force Microscopy (AFM) 19
3.4 Characterization Methods for Properties 19
3.4.1 Hardness 19
3.4.2 Residual Stress: cos2αsin2ψ Method 20
3.4.3 Layer-by-Layer Method 21
3.4.4 Coloration 22
3.4.5 Scratch Test 23
3.4.6 Wear Test 24
Chapter 4 Results 27
4.1 Compositions and Structure 27
4.2 Mechanical properties 43
4.2.1 Hardness 43
4.2.2 Residual stress 43
4.2.3 Stress gradient of HV510 43
4.2.4 Scratch Test 47
4.2.5 Wear Test 51
4.3 Energy Consumption of Turbomolecular Pump 59
Chapter 5 Discussion 60
5.1 Effect of Processing Parameters on the Structure and Mechanical Properties of Thick TiN Coatings 60
5.1.1 Processing parameters for depositing thick TiN coatings 60
5.1.2 Residual stress 65
5.1.3 Adhesion strength 67
5.1.4 Wear rate 68
5.2 Effect of Different Substrates 69
5.3 Energy Saving During Deposition 73
Chapter 6 Conclusions 75
References 76
Appendix A 82
Appendix B 85
Appendix C 89
Appendix D 95
Appendix E 96
Appendix F Calculations about Gas Flow data 100

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