摘要
本研究嘗試以濕蝕刻法製作背面局部鈍化（PERL）矽晶太陽能電池片，希望能夠以印刷抗蝕刻膠搭配濕蝕刻方式取代雷射開孔。首先設計了一個使用全印刷式的製程流程來達成這個結構，並討論少數載子壽命優化原子層化學氣相沉積Al2O3層退火溫度和時間，以量子效率檢視正背面的鈍化效果，藉由此結構方法，成功製作了背面氧化鋁局部鈍化太陽能電池，並將效率提升約0.4%。最後以C-V量測方式觀察氧化鋁層的負電荷變化及計算其密度，也確定了適當的退火方式對於負電荷的增加，使場效應鈍化更加明顯。

目錄
致謝 I
摘要 III
圖目錄 VII
表目錄 X
第1章 序論 1
1.1 前言 1
1.2 高效率太陽能電池發展 2
1.3 文獻 5
1.4 研究構想 6
1.5 論文大綱 7
第2章 基本原理 8
2.1 太陽能電池發電原理 8
2.2 基本半導體原理 9
2.3 基本p-n接面原理 10
2.4 太陽能電池照光特性 12
2.5 載子復合 13
2.6 太陽能電池等效電路 15
2.7 太陽能電池參數 17
2.8 原子層化學氣相沉積之氧化鋁沉積原理 21
2.9 氧化鋁的場效應鈍化原理 22
2.10 C-V量測氧化層固定電荷原理 24
第3章 實驗方法與製程流程 29
3.1 實驗概述 29
3.2 前置製程與清洗 29
3.3 參考片製作流程 31
3.4 背面局部鈍化結構片製程 33
3.5 MIS電容器製作 40
第4章 結果與討論 42
4.1 氧化鋁退火的少子壽命討論 42
4.2 各製程步驟少子壽命量測 43
4.3 不同退火條件下的少子壽命量測及討論 45
4.4 FTIR矽氫鍵量測 48
4.5 SEM背部局部鈍化觀察 49
4.6 I-V曲線效率量測 51
4.7 量子效率量測 52
4.8 氧化層電荷量測 54
第5章 結論 57
參考文獻 59

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