在本論文中，我們主要研究橫向磁光柯爾效應(TMOKE)在光柵式
Au/Fe/Au 結構的表面電漿增強效應用在非標定、高敏感度的光學生
物量測。藉由材料選擇與結構優化來達到最佳化磁光訊號，之後整合
微流道封裝成面積25´14mm2的元件來做流體量測。我們分析了元件的
磁光特性與生物量測的能力。所量測到的最大磁光訊號約為0.035 並
能觀察到磁光訊號在表面電漿共振波長附近具有相當大的色散特性。
接著透過整合好的磁光感測晶片來量測不同濃度的食鹽水，所量測的
本質解析度與食鹽水(bulk solution)解析度分別約為 10-7 RIU
∼、0.004%(wt)。此外，我們利用高親和力的avidin/bBSA 生物組合動態
(real time)量測avidin 與biotin 之間的交互作用，並驗證表面電漿磁光
訊號具有線性量測與定量分析的特性。量測avidin 的解析度約為
1.5nM。最後，我們所設計的感測晶片可由奈米技術生產並整合微流
道成晶片實驗室(lab-on-chip)作為生物感測器。

In this thesis, a novel transverse magneto-optical Kerr effect (TMOKE) on the
composite surface plasmon grating is proposed and developed to implement a
label-free, high-sensitive optical biosensor. The Au/Fe/Au grating structure is
designed and optimized to achieve maximal Kerr parameter. The device area is 25x14
mm2 and is integrated with a single microfludic channel for delivering liquid for test.
After fabricating the device, we characterize the magneto-optical effect of the
Au/Fe/Au plasmon grating and capabilities of detecting bio-molecules. The measured
maximum of Kerr parameter is about 0.035 and a very dispersive near the SPP
wavelength. Through this integrated magneto-optics device, we have demonstrated
detection of NaCl in salt solution in low concentrations. The calculated detection of
limit is around 10-7 RIU , corresponding to a minimal concentration of 0.004% (wt).
Moreover, we investigate avidin/bBSA binding and show a result of real-time
monitoring of avidin and bBSA interaction. The minimum detectable concentration of
avidin is measured to be around 1.5nM. Our device could be fabricated by a
nanoimprinting technique for mass production and integrated with microfludic
channels for implementing a lab-on-chip system to detect bio-molecules.

第一章 緒論 ........................................................................................... 1
1.1 前言.................................................................................................................. 1
1.2 研究動機.......................................................................................................... 2
1.3 文章架構.......................................................................................................... 4
第二章 理論背景 ................................................................................... 5
2.1 表面電漿原理(Surface Plasmon) .................................................................... 5
2.2 磁光效應原理.................................................................................................. 6
2.3 磁光柯爾效應.................................................................................................. 8
2.4 表面電漿在金屬平面模態............................................................................ 10
2.5 激發表面電漿波............................................................................................ 13
2.6 稜鏡耦合(prism coupling) ............................................................................. 14
2.7 表面電漿磁光效應........................................................................................ 16
2.8 周期性結構表面電漿磁光效應.................................................................... 17
2.9 生物感測器之應用........................................................................................ 20
第三章 實驗模擬與元件設計 ............................................................. 22
3.1 等向性色散曲線............................................................................................ 22
3.2 非等向性色散曲線........................................................................................ 24
3.3 耦合波理論(RCWA) ..................................................................................... 26
3.4 元件最佳化設計............................................................................................ 30
第四章 量測系統與元件製作 ............................................................. 35
4.1 元件製作流程圖............................................................................................ 35
4.2 元件製作流程說明........................................................................................ 37
4.3 微流道製作.................................................................................................... 42
4.4 表面電漿量測系統........................................................................................ 44
4.5 功率放大器與電磁鐵製作............................................................................ 45
第五章 實驗量測與分析 ..................................................................... 46
5.1 磁光訊號量測................................................................................................ 46
5.2 光學系統本質的偵測極限............................................................................ 47
5.3 元件的磁光特性與液體的影響.................................................................... 49
5.4 食鹽水的量測與解析度估計........................................................................ 50
5.5 生物檢體組.................................................................................................... 53
5.6 生物檢體量測方法........................................................................................ 55
5.7 動態生物檢測................................................................................................ 57
5.8 動態生物線性量測........................................................................................ 58
5.9 表面形貌對生物分子位置的影響................................................................ 60
5.10 溫度、電路與玻璃反射光對量測系統的影響.......................................... 61
第六章 結論與改善 ............................................................................. 63
6.1 結論................................................................................................................ 63
6.2 改善................................................................................................................ 63
Appendix A ............................................................................................... 64
Appendix B ............................................................................................... 66
Appendix C ............................................................................................... 67
參考資料 ................................................................................................... 75

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