本論文旨在以設計鎖相迴路並製作出一個讓微掃描鏡面穩定成像之電路。成功展示利用鎖相迴路輸出並經由高壓放大器驅動微掃描鏡面，並由感測電路得知微掃描鏡面之共振頻率。由量測之結果證明鎖相迴路具有在一定的頻寬下鎖頻並藉由此特性將可在不同環境或是製程誤差下，結構共振頻率都會有所偏移之情況下，穩定影像。
此論文中，鎖相迴路具備前述所提到的一定的頻寬下都可以鎖頻，規格為電壓操作在5V、電流為2.56mA以及鎖相迴路頻寬為42.5-46.5KHz。此晶片面積大小為2x2 mm2。微掃描鏡面快軸掃描軸其共振頻為45.6KHz。
鎖相迴路方面，以類比式與數位式的設計做為此次的研究架構，主要是由相位偵測器(Phase Detector)、壓控震盪器(VCO)、除頻器(÷ N)以及低通濾波器(Low Pass Filter)所組成。
關鍵字:鎖相迴路、微掃描鏡面

This paper design and produce a phase-locked loop allows stable imaging of scanning micromirror circuit. Successfully demonstrated the use of phase-locked loop output via high-voltage amplifier to drive scanning micromirror and sensed that micromirror of the resonance frequency. The measured results show that the phase-locked loop has locked in a certain bandwidths and this feature will be available in different environments or process error, the images will stable.
That a phase-locked loop mentioned above have certain bandwidths can be locked, voltage operation at 5V, current of 2.56mA and a phase-locked loop bandwidth is 42.5-46.5KHz. This chip area size is 2x2 mm2. Fast scan axis scanning micromirror its resonant frequency of 45.6KHz.
PLL that analog and digital design as the research framework, mainly by the phase detector (Phase Detector), voltage-controlled oscillator (VCO), divider (÷ N) and the low pass filter formed.
Keywords: phase-locked loop, scanning micromirror

致謝 I
摘要 II
Abstract III
目錄………….. IV
圖目錄 VI
表目錄 IX
附錄 IX
第1章 緒論 1
1-1 研究動機 1
1-2 鎖相迴路(Phase-Locked Loop)技術 1
1-3 互補式金氧半導體微機電系統(CMOS-MEMS) 2
1-4 文獻回顧與比較 3
1-5 論文架構 6
第2章 二維投影微掃描鏡面介紹 7
2-1 微掃描鏡面系統工作原理 7
2-2 結構致動方式 7
2-3 微鏡面設計 8
2-4 二維投影微掃描鏡面製作流程 9
2-5 微鏡面光學性能 10
第3章 電路介紹與設計 12
3-1 鎖相迴路工作原理 12
3-2 鎖相迴路電路分類 12
3-3 鎖相迴路各電路設計 13
3-3-1 相位偵測器設計 13
3-3-2 迴路濾波器設計 15
3-3-3 壓控震盪器設計 17
3-3-4 除頻器設計 21
3-4 鎖相迴路的迴路模型 22
3-5 二維投影微掃描鏡面感測電路設計 22
第4章 模擬及量測 25
4-1 相位偵測器模擬與量測 25
4-2 壓控震盪器模擬與量測 27
4-3 除頻器量測與模擬 28
4-4 主動式低通濾波器模擬與量測 31
4-5 迴路模擬 32
4-6 鎖相迴路量測 33
4-7 鎖相迴路與二維投影微鏡面總量測 38
4-8 二維投影掃描鏡面物性量測 41
4-8-1 微掃描共振頻量測 41
4-8-2 光學掃描角度量測 42
4-9 晶片佈局 43
第5章 結論 46
5-1 結果與討論 46
5-2 未來規劃 46
參考文獻 47
附錄 49

[1] R. E. Best,"Phase-locked loops: design, simulation, and applications (5th edition) ",Mcgraw-Hill, New York, 2003.
[2] J. M. Bustillo, R. T. Howe, and R. S. Muller,"Surface micromachining for microelectromechanical systems",IEEE Proceedings, vol.86, pp.1552-1574, Aug.1998.
[3] H. Schenk, P. DuÈrr, D. Kunze, H. Lakner, H. KuÈck,"A resonantly excited 2D-micro-scanning-mirror with large deflection", Sensors and Actuaors A,vol.89, pp.104-111 ,Mar.2001.
[4] D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu,"Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors", IEEE J. Quantum Electron.,pp.505–513, May/June 2004.
[5] C. H. Ji, S. H. Ahn, K. C. Song, H. K. Yoon, M. Choi, S. C. Kim, and J. U. Bu,"Dual-axis electromagnetic scanning micromirror using radial magnetic field", IEEE Conf. Micro Electro Mechanical Systems, pp.32-35,2006.
[6] F. Filhol, E. Defaÿ, C. Divoux, C. Zinck, and M. T. Delaye,"Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning",Sensors and Actuaors A,vol. 123–124, pp. 483–489 , Sep. 2005.
[7] D. L. Yan, L. J. Wen, L. Peng, R. P. Singh, D. D. Pham, T. Langer, and M. Je,"The phase locked loop for mems horizontal scanning control of micro-laser projection asic",IEEE Conf. Integrated Circuits,pp.468-471, 2011.
[8] D. D. Pham, R. P. Singh, D. L. Yan, K. T. Tiew, and O. D. Bernal, T. Langer, and A. Hirshberg, M. Je,"Position sensing and electrostatic actuation circuits for 2-D scanning mems micromirror", Defense Science Research Conf. and Expo, pp.1-4 , 2011.
[9] G. L. Baldwin, and W. G. Howard,"A wideband phase locked loop using harmonic cancellation ",IEEE Proceedings, vol.57, pp.1464-1465, Aug. 1969.
[10] R. E. Scott, and C. A. Halijak,"The scem-phase-lock loop and ideal fm discrimination",IEEE Transactions Commun.,pp.390–392, Mar.1977.
[11] B. Gilbert,"A precise four-quadrant multiplier with subnanosecond response",IEEE J. Solid-State Circuits, pp. 365–373, 1968.
[12] P. R. Gray, P. J. Hurst, S. H. Lewis, and R. G. Meyer,"Analysis and design of analog integrated circuits, (4th Edition)", John Wiley, New York,pp.130, 2001.
[13] M. E. Rizkalla, and H. C. Gundrum,"Design of Analog cmos integrated circuits input stage for the operation at zero temperature coefficient using pspice",Circuits and Systems ,pp.16-19,Aug.1992.

[14] M. M. Mansour, and A. Mehrotra,"Analysis of mos cross-coupled lc-tank oscillators using short-channel device equations",Design Automation Conf.,pp.181-185 ,2004.
[15] A. Hajimiri, and T. H. Lee,"Phase noise in CMOS differential lc oscillators", Vlsi Circuits,pp.48-51,June 1998.
[16] A. Hajimiri,"The design of low noise oscillators", Kluwer Academic Publishers,2000.
[17] A. Grebennikov,"Rf and microwave transistor oscillator design",John Wiley, New York,2007.
[18] "http://www.murata.com/products/catalog/pdf/o05e.pdf";[chip inductors (chip coils) – murata].
[19] "http://www.wima.de/en/wima_fkp_2.pdf";(wima fkp 2).
[20] "http://www.toshiba.com/taec/components2/datasheet_sync//273/1377.pdf";[hn1v02h datasheet(pdf) - toshiba semiconductor - epitaxial planar type].
[21] P. Heydari, and R. Mohanavelu,"40-GHz Flip-Flop-Based Frequency Divider ", IEEE Transactions,Volume 53,pp.1358-1362,Dec.2006.
[22] "http://www.twaes.org.tw/ae/htmdata/02201025.pdf";(雷射都卜勒測速法).
[23] H. Urey, D. W. Wine, and T. D. Osborn,"Optical performance requirements for mems-scanner based microdisplays",Spie Digital Library,vol.4178, Santa Clara,California ,Aug.2000.