隨著醫療科技和機器人的進展，觸覺感測器的需求也越來越重要，在機器人手指觸覺感測器的應用上，為了要準確地控制正向力的大小來避免抓取物體時造成物體的損壞，需要偵測機器人手指和物體之間滑動所產生的剪力大小來讓機器人手指能夠精準地控制所施加於物體的正向力。本研究提出一結合矽和高分子及奈米碳管的觸覺剪力感測器，透過SOI晶圓和高分子填充技術的結合來達成不用矽質彈簧的元件並利用奈米碳管來達成元件電性導出的目的，並降低正向力對剪力所造成的影響，完成電容式觸覺剪力感測器。整體元件特色整理如下： (1)利用PDMS作為元件的介電層，可以提高介電常數，增大電容值，而在元件上方填入PDMS更可達到保護元件的作用，(2)藉由PDMS來取代彈簧調變剛性的設計，由調變不同PDMS混和比例提供元件具有不同的靈敏度和感測範圍，(3)利用奈米碳管或矽質彈簧作為懸浮元件電性導出的目的。

With the progress of medical technology and robotics, the demand of tactile sensor is more and more important. In the application of tactile sensor on robotic fingers, in order to control the size of normal force to avoid the damage by grab the object, we need to detect the shear force caused by sliding between robotic fingers and objects to let robotic finger accurate control the normal force. This study proposes a tactile shear force sensor combined with silicon and PDMS. With combining the SOI wafer and fill-in technique to achieve the device without silicon spring and reduce the influence of normal force to the shear force to complete the tactile shear force sensor. The device’s characteristics are summarized as follows: (1)Using PDMS as device’s dielectric layer can increase dielectric constant and capacitance value. The PDMS also can protect the device form damage. (2)The most important is the design which PDMS can replace the function of silicon spring of modulate stiffness. Changing the mix ratio of PDMS can provide the device different sensitivity and sensing range. (3)Using CNT or Silicon spring as electrical routing.

目錄
摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
表目錄 XIII
第1章 緒論 1
1-1 前言 1
1-2 研究動機 2
1-3 文獻回顧 3
1-3.1 感測原理 3
1-3.2 製程技術 4
1-3.3 奈米碳管整合微機電製程之介紹 7
1-4 研究目標 8
第2章 元件分析與模擬 27
2-1 元件設計與模擬 27
2-2 差分式電容感測 30
2-3 MS3110電容感測電路 32
第3章 矽質彈簧與打線結構觸覺感測器 41
3-1 矽質彈簧觸覺感測器 41
3-1.1 製程步驟41
3-1.2 製程結果42
3-1.3 量測結果43
3-2 打線結構觸覺感測器 43
3-2.1 製程步驟43
3-2.2 製程結果45
3-2.3 製程結果討論46
第4章 結合奈米碳管之觸覺剪力感測器 58
4-1 製程步驟 58
4-2 光罩佈局 60
4-3 製程結果 61
4-4 製程結果討論 62
4-4.1 成長奈米碳管之問題62
4-4.2 背面深式反應離子蝕刻63
4-4.3 HF懸浮元件導致PDMS脫膜之問題64
第5章 結論與未來工作 78
5-1 結論 78
5-2 未來工作 79
參考文獻 82

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