本論文針對微機電振動式陀螺儀的結構設計，提出結合全解耦合式機構搭配雙質量塊(音叉式)的架構，以試圖提升陀螺儀的效能。所謂的全解耦合式機構為透過單自由度的彈簧以及特殊的耦合機構設計，將陀螺儀的驅動系統與感測系統的運動彼此獨立，進而降低陀螺儀的耦合誤差，除此之外，本文在結構設計上也導入了耦合(科氏力)的質量塊，其除了能有效傳遞科氏力之外，透過對幾何形狀的設計以及空間的合理分配，整體元件的尺寸也能進一步縮小。另一方面，一般商用的陀螺儀都會使用雙質量塊的架構以降低外界擾動(加速度)對陀螺儀輸出訊號的影響，然而大部分的陀螺儀的機構設計皆使用單純的線性彈簧，其仍必須仰賴後端的差分電路來消除大量的線性運動訊號，並且也可能會受到運動非線性的影響，因此本文提出新型的T型槓桿耦合機構，其對於線性運動具有相當優異的抑制能力，並透過全差分式電極的擺放，此機構設計不需要後端的差分電路即可達到相當優異(低)的加速度靈敏度。
本論文對於微機電振動式陀螺儀的操作原理、誤差來源與結構設計考量皆有完整的說明，並在量測與系統架設方面也有詳細的討論與比較。量測結果指出，本文所提出的陀螺儀的確具有較低的耦合誤差(正交誤差=100 deg/s)以及對加速度不靈敏(<0.5 deg/s/g)的特性，證明本文的設計概念正確且具有成效；另外，本論文的陀螺儀在操作穩定性方面的表現也相當優異，量測結果指出其操作非線性度<0.6 %(wihtin 300 deg/s)以及溫度靈敏度<0.3 %/K，最後在雜訊表現方面，本文的陀螺儀可達到ARW=3 deg/hr/sqrt(Hz)以及Bias instability=0.8 deg/hr，可滿足Tactical-grade的應用需求。

This thesis presents the structural design of a single-axis MEMS vibratory gyroscope, which combines the fully-decoupled mechanism with the tuning fork architecture (a FDTF gyro), to enhance the gyroscope performances. The fully-decoupled mechanism is realized by introducing the Coriolis-mass between the drive system and the sense system, and utilizing the orthogonally arranged 1-DOF (degree of freedom) springs as the interconnections. Therefore, the motions of the operating modes of the FDTF gyro are independent, resulting in a low coupling (quadrature) error. Moreover, the FDTF gyro consists of two fully-decoupled systems, which are connected to each other through the specific coupler designs to form the tuning fork architecture. As the result, the FDTF gyro enables the anti-phase drive and sense operations, and enhances the vibration resistance utilizing the T-shaped lever coupler design and the differential sensing scheme.
This thesis introduces the operating principles and error sources of the MEMS CVGs, and the detailed measurement setup and results are also be given and discussed. Experimental results show the fabricated FDTF gyro has a small quadrature error of 100 deg/s, and the acceleration sensitivity is below 0.5 deg/s/g, showing the feasibility of the proposed structural design. Moreover, the stability and long-tern operation characterizations are also examined. The non-linearity is 0.6 % (within 300 deg/s) and the scale factor variation w.r.t. temperature is 0.3 %/K. The bias instability of the FDTF gyro is 0.8 deg/hr and the ARW is 3 deg/hr/sqrt(Hz), satisfying the Tactical-grade requirements.

致謝 II
摘要 IV
Abstract V
目錄 VI
圖目錄 IX
表目錄 XIV
第1章 序論 15
1-1 陀螺儀發展簡介及其應用 15
1-2 陀螺儀重點規格與規範 18
1-3 陀螺儀基本操作原理 21
1-4 微機電技術發展簡介 23
1-5 全文架構 24
第2章 微機電振動式陀螺儀 33
2-1 發展簡介 33
2-2 機械系統特性分析 34
2-2.1 線性運動方程式 34
2-2.2 機械共振現象 35
2-2.3 科氏力響應 37
2-2.4 模態匹配操作 39
2-3 誤差來源分析 41
2-3.1 耦合誤差 41
2-3.2 加速度靈敏度與雙質量塊系統 44
第3章 文獻回顧與研究動機 53
3-1 解耦合結構設計 53
3-2 振動式陀螺儀文獻回顧 55
3-2.1 角度陀螺儀 55
3-2.2 角速度陀螺儀 56
3-2.3 單質量塊系統 57
3-2.4 雙質量塊系統 59
3-2.5 多質量塊系統 62
3-3 研究動機 63
第4章 結構設計考量 79
4-1 雙質量塊系統 79
4-1.1 誤差分析 79
4-1.2 耦合機構介紹 81
4-2 機械彈簧設計 83
4-2.1 彈簧剛性 83
4-2.2 正交誤差與剛性耦合係數 85
4-2.3 彈簧受應力影響與其線性運動範圍 86
4-3 電極設計 87
4-3.1 靜電式驅動與誤差分析 87
4-3.2 電容式感測與非線性 89
4-3.3 靜電彈簧相關應用 91
4-4 頻率縮放效應 93
4-5 空氣阻尼 95
第5章 元件設計 104
5-1 結構設計概念 105
5-2 結構特性探討 106
5-3 T型槓桿耦合機構 108
5-4 結構特性模擬與討論 109
5-5 量測電路 112
5-5.1 感測解析度與訊雜比 112
5-5.2 轉阻放大器之設計 114
5-5.3 電路規劃與模擬 116
5-6 元件製程 117
第6章 製程與量測結果 133
6-1 陀螺儀製程結果 133
6-2 陀螺儀結構與電路之基本特性 134
6-3 角速度量測 135
6-3.1 量測架設 135
6-3.2 角速度靈敏度與各軸互感 136
6-4 耦合(正交)誤差 137
6-5 加速度靈敏度 139
6-5.1 加速度產生之誤差評估 139
6-5.2 量測架設與結果討論 140
6-6 雜訊(Bias stability)分析 141
6-6.1 艾倫方差(Allan variance) 141
6-6.2 陀螺儀雜訊分佈 143
6-6.3 量測結果與討論 144
6-7 溫度對元件性能之影響 145
第7章 結論與未來工作 164
7-1 研究貢獻 164
7-2 未來工作 165
參考文獻 172
附錄A 188
附錄B 191
附錄C 195
附錄D 196

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