現今微機電系統(Micro-Electro-Mechanical System, MEMS)技術主要為利用半導體製程技術，隨著科技演進，半導體技術的發展，元件尺寸開始從微米尺寸往奈米尺寸發展，因此奈米等級元件開始受到重視，許多新興奈米材料開始被利用於製作奈米尺寸的薄膜感測器或是致動器。
本研究所使用的奈米多孔隙陽極氧化鋁具有良好的介電特性，同時由於為孔洞結構，造成體表面積較一般連續材料為大，因此能夠擁有與外界較多接觸的面積，因此本研究利用奈米多孔隙陽極氧化鋁之孔洞特性，將其運用於相對濕度的電容式感測器。透過氧化鋁表面與水分子鍵結達成化學性吸附，進而造成介電係數的上升，因此透過電容訊號感測溼度造成的訊號變化。本研究主要有兩項優點：(1) 由於使用雙層的孔洞形感測材料，因此能夠得到比單層感測材料較多的水分子吸附面積；(2)利用將感測電極埋藏於介電感測材料之中，電場線能通過上方及下方感測材料，進而造成有效感測面積的上升，已增加元件之感測訊號。單層感測材料之元件之靈敏度為0.04%/%RH，雙層感測材料之元件之靈敏度為0.15%/%RH，靈敏度之提升約為四倍左右。

Now the days, the technology of Micro- Electro- Mechanical System (MEMS) is primary using the semiconductor manufacture technology. As technology developed and semiconductor manufacture technology improved, the chip size start to narrow down from micrometer to nanometer. Therefore, the nano-size component has attracted lots of attention. Various nano material have been used to develop thin film sensors and actuators of nano-size.
Nanoporous anodic aluminum oxide (np-AAO) has good dielectric property. Due to the nanoporous structure, the volume-to-surface is large than other continuous material, and the area contacting surrounding is also large. Thus, this study uses the nanoporous structure to implement capacitive relative humidity sensor (RH sensor). After moister absorbing, the dielectric constant change of np-AAO will lead sensing capacitance change. The present RH sensors has two merits, (1) dual-layer np-AAO will increase the area for moister absorbing, (2) the electric field of embedded sensing electrodes will pass through both top and bottom np-AAO layers to increase the sensing signals.

中文摘要 I
Abstract II
致謝 III
目　錄 IV
圖目錄 VI
表目錄 IX
第一章 緒論 1
1-1 前言 1
1-2 研究動機 3
1-3 文獻回顧 5
1-3.1 奈米多孔隙陽極氧化鋁結構 5
1-3.2電容式溼度感測器 8
1-4 研究目標 11
第二章 元件設計與製造 25
2-1 電容式溼度感測元件原理與設計 25
2-2 具雙層陽極氧化鋁之埋藏式同平面電極之濕度感測器 27
2-3 電容式濕度感測元件整合微加熱器之設計與模擬 29
第三章 製程與結果 40
3-1奈米多孔隙陽極氧化鋁介電材料成長 40
3-2電容式溼度感測元件與整合微加熱器之製造 41
3-3 製程結果與討論 44
第四章 量測與討論 60
4-1電容式相對溼度感測器量測 60
4-2雙層感測材料對靈敏度改善之量測與比較 61
4-3元件反應時間與穩定度之量測 63
4-4元件溫度相依性之量測與改進 64
第五章 結論與未來工作 72
5-1 結論 72
5-2 未來工作 73
參考資料: 79

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