近年來光電產品的使用越來越大眾化，其中各種具備顯示器的光電產品像是電腦螢幕、手機、PDA、數位相機、平板電腦等等的需求與使用量逐年增加。而這類元件由於材料透明且尺寸較小，一般的量測方法並不適用於此。在先前的研究中，已經驗證了差分干涉對比顯微術(Differential Interference Contrast Microscopy, 以下簡稱：PS-DIC)用於量測透明材質元件高度的可行性。然而，要將此技術應用在生產線上，必須要探討更多不同待測物的量測效果。
本研究探討系統對於不同外貌的透形待測物量測可行性，我們設定的待測物為具有傾斜面的梯形待測物及圓弧形待測物。首先，以軟體模擬分析系統量測條件極限及準確範圍，分析重建結果及誤差原因並提出修正方法。最後再以穿透式架構的PS-DIC量測系統量測透明材質的薄膜電晶體玻璃基板及弧形壓印試片，以驗證模擬結果及探討本差分干涉系統用於量測透明材質的梯形待測物及弧形待測物的可行性。

Due to the fact that opto-electronic products have become more and more popular in recent years, the demand for displays used in computer monitors, mobile phones, PDAs, digital cameras and tablet PCs has continued to increase significantly. General methods of measurement are not particularly suitable for these objects, which are often transparent and small.
The previous study has shown that PS-DIC (phase shifting differential interference contrast interferometer) can be used to measure the profile of transparent specimen with inclined surfaces. However, to apply this technology within the actual production, we must consider more complex geometry measurements with quantitative DIC techniques.

In this study, we aim to verify the feasibility of measuring specimens with different profiles, such as trapezoid objects with inclined surfaces and elliptic specimens. Software simulation system was first used to analyze the cause of reconstruction errors, and a method to amend such errors is consequently applied. Next, we set a transmitted PS-DIC measurement system to verify the simulation. The result can provide useful information to improve the accuracy of PS-DIC.

摘要 2
Abstract 3
誌謝 4
第一章 緒論 14
第二章 文獻回顧 16
2-1形貌量測技術的發展 16
2-2差分干涉對比顯微術 21
2-3 DIC成像原理及重建方法 30
2-4其他形式的DIC 39
2-5光學元件表面形貌的量測方法與討論 41
第三章 研究目的與方法 44
3-1 研究規劃 44
第四章 梯形待測物模擬 46
4-1系統參數設定說明 46
4-2梯形待測物參數設定 48
4-3梯形待測物模擬結果 53
第五章 弧形待測物模擬 69
5-1弧形待測物參數設定 69
5-2弧形待測物模擬結果與討論分析 70
第六章 實驗設備與結果 82
6-1實驗架構 82
6-2梯型待測物形貌重建結果 88
6-3弧形待測物形貌重建結果 95
第七章 結果與建議 100
7-1結果討論 100
7-2建議 102
參考文獻 103

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