光學透明平板為顯示器中不可或缺的元件，隨著顯示器輕薄化與大尺寸化的發展趨勢，透明平板的表面性質與厚度均勻性將會影響顯示影像之品質，甚至導致Mura現象發生。
本研究提出一適用於量測透明材料厚度之新型方法，即角度入射干涉術(Angular Incidence Interferometry, AII)，其優點為非接觸式、全域性、即時性與架設簡易，並可用於線上快速檢測。
本研究以玻璃基板做為實驗試片，成功地量測出試片厚度不均之情形，並從玻璃製程上探討厚度不均之成因，最後則以力學觀點分析玻璃基板厚度不均與Mura現象之間的關聯性。

Optical transparent plate is an essential component in display device. With the development of lightweight and large size , the surface properties and thickness uniformity of transparent plates will more likely to have influence on display quality, even result in Mura effects.
A novel method for measuring the thickness of transparent materials was proposed, with the superiority of non-contact, whole-filed, real-time and simple, which can be utilized for online thickness inspection.
The non-uniform thickness of glass substrate had been measured in this research, which might had been caused during manufacturing process, and the relation between thickness non-uniformity and Mura effect was analyzed by mechanical view.

一、簡介 1
二、文獻回顧 4
三、實驗原理 6
3.1 角度入射干涉術[17] 6
3.2 條紋分段正規化與相位展開 9
3.2.1 條紋分段正規化 9
3.2.2 相位展開[17] 10
3.3 量測系統最佳化分析 12
四、實驗裝置與試片 16
4.1 實驗裝置 16
4.2 實驗試片 18
五、實驗程序 20
5.1 數位影像座標校正[17] 20
5.2 影像濾波 21
5.3 量測系統自我驗證實驗 22
5.3.1 試片擺放角度與其厚度分布之關係 22
5.3.2 入射參數與試片厚度分布之關係 22
5.4 玻璃基板厚度量測實驗 23
六、結果與討論 24
6.1 量測系統正確性分析 24
6.1.1 B-70-1試片於不同擺放角度下之厚度分析 24
6.1.2 B-70-1試片於兩種不同入射參數下之厚度分析 25
6.2 玻璃基板厚度分布 26
6.2.1 試片A之量測結果 26
6.2.2 試片B之量測結果 28
6.2.3 AII與厚度量錶量測結果之比較 29
6.2.4 探討玻璃基板厚度不均之成因 29
6.3 量測系統誤差分析 31
6.4 Mura與玻璃基板厚度不均之分析 33
七、結論與未來展望 35
7.1 結論 35
7.2 未來展望 36
八、參考文獻 38

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