本研究主要為改善靜電式微掃描鏡慢軸，在垂直方向上因掃描速度不均，而造成的明顯亮暗帶投影畫面品質，希望透過電容式感測訊號機制，量測微掃描鏡在致動過程中，元件等效電容值大小即時變化，且與實際的描軌跡相互參照驗證其正確性。同時建立靜電式微掃瞄鏡慢軸行為的動態模型，透過系統鑑別得到真實受控場的系統參數。將系統參數代入動態模型並輔以商用軟體Simulink與回授控制理論，設計及模擬微掃瞄鏡慢軸經控制器補償後之輸出響應。最後，實現加入PID控制器的完整閉迴路控制系統，以達到即時控制之目的並驗證其效能與可行性。

摘要 I
致謝 II
目錄 IV
圖目錄 VII
表目錄 XI
第一章 緒論 1
1.1 前言 1
1.2 微型投影顯示技術介紹 1
1.3 微掃瞄鏡快軸及慢軸 7
1.4 研究背景與動機 7
1.5 文獻回顧 9
1.6 本文大綱 11
第二章 電容式回授訊號感測機制 13
2.1 電容式感測電路設計 13
2.2 電容式感測電路實現 16
第三章 靜電式微掃描鏡動態模型 20
3.1 靜電式微掃描鏡驅動原理 20
3.2 靜電式微掃描鏡系統架構 21
3.2.1 快軸元件介紹 21
3.2.2 慢軸元件介紹 23
3.3 理論模型 26
3.4 系統鑑別 29
3.5 二維掃描軌跡 34
第四章 控制系設計與模擬 38
4.1 控制目標與策略 38
4.2 PID控制器設計 41
4.3 PID控制器模擬結果 47
4.3.1 慢軸之開迴路系統模擬結果 47
4.3.2 慢軸之閉迴路系統模擬結果 50
第五章 實驗結果與討論 53
5.1 實驗平台架構 53
5.2 位置感測系統 59
5.3 實驗結果 61
5.3.1 僅慢軸致動之實驗結果 62
5.3.2 快慢軸同步致動之實驗結果 65
第六章 結論與未來工作 71
6.1 結論 71
6.2 未來工作 72
參考文獻 74

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