鈦金屬為良好的人體植入材料之一，常見於骨科與牙科植入應用上，為了植入材與骨組織的結合和加速骨整合縮短癒合時間，我們在材料表面做出可控制結構排列之奈米圖型，以類人成骨細胞MG-63模擬人類成骨細胞在TiO2奈米結構上的貼附與生長的特性。
在矽基材上分別以黃光製程與奈米壓印完成微米級(2 ~30 um)和奈米級結構(350 ~600 nm)，而在奈米結構部分，結合PDMS翻模完成擴大壓印的實踐，並且利用多次壓印的概念，旋轉不同角度實現單一結構複雜化，完成了簡單排列至複雜化的結構。接著在表面結構上蒸鍍鈦金屬，並且藉由熱退火製程進行表面改質，結合材料本身特性，製作出一系列結構尺寸與密度不同之TiO2表面結構。
最後，分別將MG63細胞培養在TiO2表面結構上4、12和24小時，細胞在TiO2微米結構上的生長數量相對於平坦TiO2表面改善了1.38倍 ，而奈米結構則有1.65倍的增加，證實了TiO2奈米結構具有增進MG-63細胞生長的特性，從OM的觀察中，在4小時，奈米結構上細胞貼附絲足延伸情形相對於微米結構良好，推斷奈米結構亦具有改善MG-63細胞短時間貼附情形的特性。
從實驗中得知，TiO2奈米結構具有改善細胞初期貼附與增進細胞生長數目的特性，在將來可以作為人體植入材料表面結構之參考與應用。

摘要 I
致謝 II
目錄 III
圖目錄 IV
表目錄 V
第一章 前言與研究動機 1
1-1前言 1
1-2研究動機 1
第二章 相關理論基礎 2
2-1成骨細胞:MG-63 2
2-2: Ti金屬生醫材料 3
2-3: TiO2特性 5
2-4:基材表面形貌效果 6
2-5熱退火 8
三、實驗機台介紹及相關原理 9
3-1黃光微影製程 9
3-2奈米壓印微影製程 10
3-3 乾式蝕刻 12
3-4電子槍蒸鍍系統 12
3-5 快速熱退火系統 13
3-6聚二甲基矽氧烷 13
3-7原子力顯微鏡 14
3-8 掃描式電子顯微鏡 15
四、實驗步驟及方法 17
4-1方法與製程: 17
4-2微米尺寸結構製程 18
4-3 奈米尺寸結構製程 22
4-3.1翻印子模製程 22
4-3.2 PDMS翻壓子模製程 26
4-3.3 擴大壓印製程 27
4-3.4 多重壓印製程 28
4-4:表面改質 29
4-5 細胞培養 30
4-5.1 試片處理 30
4-5.2 試片乾燥 31
4-5.3 細胞觀察 31
4-5.4 台盤藍排除法分析(trypan-blue exclusion method) 31
第五章 實驗結果與討論 32
5-1:結構製程結果 33
5-1.1微米結構結果 33
5-1.2奈米結構結果 36
5-2:細胞培養結果 42
5-2.1結構表面形貌影響 42
5-2.2結構深度影響 46
5-3:細胞貼附(OM) 48
第六章 結論 55
參考文獻 56

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