數位微流體系統是極具潛力的微流體傳輸方式，可利用介電濕潤效應操控微小液滴，各種藥物、試劑、甚至是生物分子、粒子與細胞，都能分裝在微小液滴內進行傳輸，而且每個液滴可以個別地操作，不會有液滴互相交錯污染的影響。
在早期的時候，我們實驗室首次把光華科技開發公司中的有機影印機中的有機光導電染料酞菁氧钛(TiOPc)引進和取代數位微流體系統中的光電濕潤晶片結構中的光導電層-非晶矽，因為酞菁氧钛和非晶矽都同時擁有光導電的特色，故可引用和取代，成為有機化的光電濕潤晶片。因為酞菁氧鈦是有機光導染料，在價格上便宜。而且引用TiOPc的有機光導電濕潤晶片的製作方式十分簡單，只需要使用Spin coating的方式便可製造，不像使用非晶矽的光電濕潤晶片，要使用半導體製程技術，使製程變得複雜。因為以上種種原因，使得我們的有機光電濕潤晶片有着價格便宜、製程簡單、有良好的光敏性、可量產等優點。
雖然有機化後的光電濕潤晶片有着很多優點，可是它跟有機半導體元件一樣，遇到了高温製程的問題。在光電濕潤晶片的結構上，它會有一層介電層薄膜，而這一層介電層薄膜的介電性能會對整個光電濕潤晶片的性能有所影響，其介電層的介電性能越好，其光電濕潤晶片的性能會越好，可是一般在工業界上高介電性能的介電層薄膜的製程技術都要經過高温，可是一般的有機化合物都不適合高温製程，分子結構會被高温破壞，所以致使高介電性能的介電層薄膜無法應用到我們的有機光電濕潤晶片上，導致我們的晶片在性能上無法達到最佳化的效果。
相同的問題，在有機半導體元件中也有遇到，所以在這幾年間中，有一個新型的製程技術被開發出來，叫有機無機複合薄膜技術，這個技術可在室温下製造出一層擁有高介電性能的介電層薄膜，它已成功有效的應用在很多電子元件上得到不錯的結果，如NMOS，CMOS，積體電路等等。
本論文首次把這一種新穎的製程技術引進去我們的光電濕潤晶片中，並使用數值模擬來模擬出介電層的性能跟晶片的關係，接下來使用工業界常用的奈米粉體製程技術-水熱反應法和溶膠凝膠法分別製做出兩種大小不一和擁有高介電性能的鈦酸鋇奈米粉體，經SEM 和X-ray饒射儀分析可量出使用水熱反應法所製做出的奈米粉體半徑大約在180~220nm之間，溶膠凝膠法所製作出粉體的半徑大約在125~165nm，兩種鈦酸鋇的奈米粉體的晶格都屬於立方晶體，同時擁有高的介電常數，再使用奈米粉體分散技術和薄膜製程技術把這一層高介電性能的薄膜製造在我們的有機光電濕潤晶片上和ITO玻璃上，在ITO玻璃上的介電層薄膜我們把它拿來進行介電特性量測、膜厚量測、表面粗糙度量測。發現水熱反應法所造出來的有機無機複合介電層薄膜，含有比較高的介電性能。結合高介電性能薄膜的有機光電濕潤晶片，我們對它進行了奈米粉體濃度相對應的驅動電壓的性能量測實驗，發現有機光電濕潤晶片的驅動電壓會隨着奈米粉體的濃度增加而慢慢被拉低，實驗最優化的結果顯示，我們可把一顆250nL液珠，它原本的驅動電壓為62V，我們把這一種新型的高介電性能的介電層薄膜(奈米粉體濃度1.8%wt，介電常數為35，膜厚780nm，表面粗糙度0.88nm)引進晶片後，在一般空氣環境下，最小的驅動電壓變為18V，得到了良好的優化和改善。

Digital microfluidic system is a promising technique for transporting droplet by using the phenomenon of electrowetting effect; we can control the small droplet containing drugs, particles and cells. Every droplet can be controlled individually to prevent it from the possible contamination.
Recently, our Lab proposed a new organic optoelectrowetting (OEW) chip by using the organic photoconductive material Titanyl phthalocyanine (TiOPc). The organic OEW chip has some advantages such as is low coast, simple fabrication; high photosensitivity and mass production, but it also has the similar disadvantage like the organic semiconductor.
One reason of the low electric performance with the organic OEW chip is that the high permittivity dielectric layer cannot be applied in our chip because of the requirement of high temperature fabrication. Recently, a new dielectric layer fabrication in low temperature and high electric performance has been developed to be successfully using in organic semiconductor to increate performance. In this research study, we are the first group to introduce the new dielectric layer fabrication in the organic OEW chip to enhance our chip performance.
The new dielectric layer fabrication is named as organic-inorganic composite film fabrication. In this research study, we use hydrothermal method and sol-gel method to make the nano Barium titanate powder and using SEM and X-ray diffraction technology to analyze the lattice and particle size of Barium titanate powder. We use the Nano Dispersion Technology and thin film processing technique to make the high permittivity composite film on our chip. We use the impedance measurement to check the permittivity of the composite film. The composite film has the parameters as follows-percentage concentration: 1.8wt%, permittivity: 24, thickness: 789nm, surface roughness: 0.88nm. We have successfully reduced the required driving voltage from 62V to 18V because of the high permittivity character of the composite film.

目錄
一、緒論
1-1徵機電系統的發展
1-2 微流體晶片之應用與優勢
1-3 數位微流體簡介
1-3-1電灦潤流體操控技術
1-3-2光電濕潤方式液珠操控技術
1-4有機光電濕潤晶片簡介 8
1-4-1有機電子件(Organic Electronic Device)的發展
1-4-2有機光導材料應用在光電濕潤晶片
1-5有機無機混合材料的簡介
1-5-1有機/無機混合材料在電容之應用
1-5-2有機-無機複合材料的介電特性
1-6 文獻回顧
1-6-1電濕潤晶片低電壓流體操控技術 (高介電性能薄膜的引入)
1-6-2 有機無機複合薄膜應用於半導體元件
1-7研究目的
1-8論文各章簡介
二、原理和數值模擬分析
2-1介電濕潤
2-1-1介電濕潤現象
2-1-2 Young’s equation:
2-1-3 光電濕潤晶片原理
2-3奈米分散技術的原理和介紹
2-3-1奈米粉體間的靜電斥力
2-3-2 DLOV 理論 31
2-3-3球磨分散技術
2-3-4超音波分散技術
2-3-5表面改質技術
三、實驗方法與製作流程
3-1 合成鐵電材料的方法
3-2溶膠凝膠法製備鈦酸鋇奈米粉體
3-2-1溶膠-凝膠反應機制和程序（Sol-Gel process）
3-2-2 溶膠凝膠法製備奈米鈦酸鋇粉未
3-2-3主要儀器和藥品
3-2-4實驗步驟
3-3 水熱反應法合成奈米鈦酸鋇粉體
3-3-1 水熱反應法的反應機制
3-3-2 水熱反應法影響合成的因素
3-3-3 實驗步驟
3-4有機無機混合薄膜之合成
3-4-1利用矽烷改質奈米氧化物
3-4-2-有機無機複合薄膜的合成方法
3-4-3 有機無機複合薄膜應用在有機光電濕潤晶片的製程方式
四、實驗結果與分析
4-1 奈米粉體的量測實驗
4.1-1 X光單晶繞射儀:
4-1-2 掃瞄式電子顯微鏡SEM
4-1-2 X光單晶饒射儀量測結果
4-2有機無機複合薄膜介電性能量測實驗
4-2-1高介電陶瓷材料之介電性質
4-2-2介電性能量測實驗
4-5有機無機複合薄膜引用在有機光電濕潤晶片上的實驗結果
五、結論

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