近年隨著自駕車的興起，作為自駕車的重要感測技術之一的光學雷達由於具有較佳的解析度以及在夜裡操作不受影響，因此被受關注。微機電式的光學雷達可透過批量製造的方式降低成本、元件體積可微縮化以及快速響應的優勢可應用在各種不同的領域。本研究採用具有低功耗、較大的致動力以及車輛環境的相容性高的壓電式的致動機制實現微掃描的設計。微掃描面鏡設計將會朝向掃描角以及頻率作為本研究的目標。本研究採用雙彎曲的致動器以提升致動器的尖端位移量，並透過拓寬致動器在固定端的面積以增加剛性，藉由S-型連接彈簧的設計以提升元件性能表現。本研究利用以沉積的壓電薄膜PZT的SOI晶圓，藉壓電製程平台批量製作出壓電微掃描面鏡。完成元件製程後會針對微掃描面鏡的動態分析及性能量測。量測結果顯示S型彈簧設計的微掃描面鏡在通以12V_pp的驅動電壓下，共振頻為7345Hz，光學角達到82.8°，當電壓持續提高時元件不幸失效。經由實驗發現，鏡面的掃描頻率隨角度的增加而造成頻率飄移的現象，使掃描模態過於接近出平面模態而造成元件發生斷裂。

In recent years, LiDAR has attracted much attention as one of the vital sensing technologies for self-driving automotive, due to its better resolution and being unaffected at night during an operation with the rise of smart vehicles. MEMS LiDAR can be used in various field due to its advantages of having a lower cost through batch fabrication, size miniaturization and fast response. In this study, a piezoelectric actuation mechanism with low power consumption, large actuation force, and high compatibility with the vehicle environment were adopted to design and implement MEMS scanner. The MEMS mirror design will focus on the scanning angle and frequency. This goal would be achieved through a dual-curved actuator to increase the vertical displacement, expand the actuator area and the S-shaped connection spring. It was fabricated from a PZT thin film on SOI wafer with piezoelectric standard platform. The measurement results show that the S-shaped spring design achieved 82.8°scanning angle at 7345Hz by using 12V_pp driving voltage. The device failed when the voltage increased continuously. It has been discovered through experiments that the scanning frequency of the mirror causes frequency drift as the scanning angle increases. This phenomenon causes the scanning mode to become too closely aligned with the out-of-plane mode, resulting in device fractures.

摘要 I
Abstract II
致謝 III
目錄 VI
圖目錄 VIII
表目錄 XII
第一章 緒論 1
1-1 前言 1
1-2 微掃描面鏡文獻回顧 8
1-2-1 靜電式微掃描面鏡 8
1-2-2 電磁式微掃描面鏡 12
1-2-3 壓電式微掃描面鏡 15
1-3 研究動機 19
1-4 全文架構 20
第二章 致動原理與元件設計 34
2-1 微掃描面鏡之性能指標 34
2-2 壓電效應 36
2-3 壓電材料的選擇 38
2-4 微掃描面鏡之結構設計 40
2-4-1 雙彎曲式致動器設計 40
2-4-2 S-型彈簧設計 45
2-4-3 模擬結果之比較 46
第三章 製程流程與結果 56
3-1 製程流程 56
3-2 製程結果與討論 58
第四章 量測結果 64
4-1 元件共振頻率量測 64
4-2 元件共振模態量測 65
4-3 光學掃描角量測 66
4-4 元件失效探討及分析 67
第五章 結論與未來工作 74
5-1 結論 74
5-2 未來工作 75
參考文獻 85
附錄 94

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