氮化物薄膜擁有優異的機械性質、抗氧化以及耐磨耗等特性，近年來被廣泛應用在工業領域中。隨著科技的日新月異，對於保護性鍍膜的需求也越來越高。傳統的二、三元氮化物薄膜已慢慢無法滿足現今業界的需求，所以工業界也致力於發展於多元的氮化物薄膜。
近年來高熵的概念被引入學界，增加越多的元素(多元氮化物)進入系統有利於增加合金的強度以及結構穩定性。在奈米複合薄膜也有利於薄膜的機械性質，增加矽原子進入系統中，因金屬氮化物與矽的溶解度很低，在超過固溶點之後會產生自發性的Spinodal-decomposition，除了使晶粒變小之外，也會在晶粒旁析出氮化矽將晶粒包住，更加阻止晶粒滑動而造成硬度提升的效果，但是在文獻中，多元氮化物薄膜的奈米複合材料資料較少，有鑑於此，本研究之目的為鍍製全新多元合金氮化物薄膜，透過調變矽含量，以製備有優異機械強度的多元奈米複合氮化物薄膜。
本研究乃透過反應射頻磁控濺鍍機研製多元合金氮化物薄膜，改變矽靶材的功率並固定鋁鉻鈮鈦鉬多元合金靶的功率，製備不同矽含量之多元合金氮化物薄膜。隨著矽含量的增加，薄膜硬度從原本的28.5 GPa提升到33.5 GPa，此強化效果歸因於固溶強化、晶粒細化以及氮化矽包圍金屬氮化物晶粒。
在室溫磨耗中，在矽含量為0, 3.3 與4.9 at. %的薄膜都具有優異的磨耗表現。此外，在薄膜矽含量為0 at.%時擁有最好的磨耗性質，此乃歸因於其較低的楊氏模數，使在磨耗時磨球的力量較能分散而不會應力集中。且其最高的殘留應力在磨耗時也可阻止破裂的情形發生，以至於其磨耗性質最為優異。
綜上所述，本研究透過鍍製新型多元氮化物薄膜，可表現出優異的機械強度與耐磨耗性，此優點可應用於未來之抗耐磨材料。

Nitride coatings characterize superior mechanical properties, anti-oxidation and anti-wear behavior, it has been applied widely in industry field. With ever-changing technology, the demand for hard protective coatings is growing. However, the tradi-tional binary and ternary nitride coatings could hardly satisfy the industrial require-ments. As a result, the industry is dedicating to developing the multicomponent ni-tride coatings.
In recent years, the concept of high-entropy was introduced into academia, and the larger number of elements in the system could enhance the strength and structure stability of the alloys. Furthermore, nanocomposite coatings could also benefit to the mechanical properties of the coatings owing to the solid solution strengthening, grain size refinement and phase separation of silicon nitride which could enhance the interfacial strength of the grain boundaries. However, the literature related to multicomponent nitride coatings with nanocomposite structures could hardly be found. As a result, this study is thus devoted to fabricating the new multicomponent nanocomposite nitride coatings with superior mechanical properties.
In this study, the multi-component (AlCrNbTiMoSix)N nitride coatings with different silicon contents were fabricated by RF magnetron co-sputtering. The coat-ings hardness increased from 28.5 to 33.5 GPa, which was attributed to several strengthening factors, such as grain size refinement, high residual stress induced by point defects owing to the peening effect in the sputter system. Furthermore, Si3¬N4 precipitated in the grain boundaries due to spinodal decomposition, forming the nanocomposite nc-(AlCrNbTiMo)N/a-Si3N4. Si3N4 in grain boundaries prevented dislocation movement and grain boundaries sliding, improving the cohesive strength of the grain and phase boundaries.
From the tribological test at room temperature, coatings with 0, 3.3 and 4.9 (at. %) silicon content exhibited low wear rate of 0.85, 2.27 and 3.28 (10-6mm3N-1m-1), respectively. The low coefficient of friction of the coatings is attributed to the for-mation of a self-subricating layer.
The high wear resistance was attributed to the high H3/E2 (above 0.5) and low coefficient of friction. It is demonstrated that (AlCrNbTiMoSix)N coatings could provide a potential candidate for anti-wear materials due to their favorable mechan-ical and lubricant properties.

Contents
ABSTRACT IV
CHAPTER 1 INTRODUCTION 1
1.1 BACKGROUND 1
1.2 MOTIVATION AND OBJECTIVES 4
CHAPTER 2 LITERATURE REVIEW 6
2.1 SURFACE ENGINEERING 6
2.2 SPUTTERING TECHNIQUES 10
2.2.1 Sputtering process 10
2.2.2 Magnetron sputtering 10
2.2.3 Radio-frequency (RF) sputtering 11
2.2.4 Structure-Zone model of thin-films 14
2.3 NITRIDE BASED HARD COATING 18
2.3.1 Binary nitride hard coating 20
2.3.2 Ternary nitride hard coating 21
2.3.3 High-entropy nitride hard coating 25
2.4 MATERIAL CHARACTERIZATION 28
2.4.1 Chemical composition 28
2.4.2 Hardness of the coatings 29
2.4.3 Wear mechanism 36
CHAPTER 3 EXPERIMENTAL PROCEDURES 42
3.1 SAMPLE PREPARATION 42
3.2 DEPOSITION OF (ALCRNBTIMOSIX)N COATINGS 42
3.3 MEASUREMENT AND ANALYSIS 44
3.3.1 Chemical composition Analysis 44
3.3.2 XRD Identification 44
3.3.3 Microstructure Analysis 44
3.3.4 Hardness and Elastic modulus 44
3.3.5 Residual stress 45
3.3.6 Tribological performance evaluation 45
3.3.7 Surface bonding characterization 46
3.3.8 Morphology observation 46
CHAPTER 4 RESULT AND DISCUSSIONS 47
4.1 QUANTITATIVE ELEMENTAL COMPOSITION, CRYSTAL STRUCTURE AND MICROSTRUCTURE 47
4.1.1 Chemical composition 47
4.1.2 XRD identification 49
4.1.3 Density of coatings 53
4.1.4 Microstructure 55
4.2 RESIDUAL STRESS 57
4.3 HARDNESS AND YOUNG’S MODULUS 60
4.4 TRIBOLOGICAL BEHAVIOR 66
REFERENCES 73

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