本研究提出以TSMC 0.18 μm 1P6M CMOS平台單晶整合包含濕度/風速/溫度之環境感測中樞。所提出的設計包含電容式濕度感測器、熱線式風速感測器與二極體溫度感測器。本研究除實現三種感測器之系統整合，於系統內各元件也進行優化設計:(1)濕度感測器使用電容式的感測機制，並延伸了柱狀電極陣列的結構，提出無感濕材料的設計，此設計因水氣無需經過擴散係數較小的材料，而大幅縮短響應時間。此外，由於不需要填充感濕材料，得以縮小柱狀電極間距，增加電極對數，進而增加響應；(2)具懸浮結構的熱線式風速感測器由整體晶片頂部之金屬層(M5)與上/下介電層堆疊而成。因此，晶片上的平坦表面可以確保穩定的氣流。此外，此懸浮結構可增強加熱效率並進一步提升靈敏度；(3)溫度感測器則為一個二極體，此元件已發展成熟，並呈現線性的訊號輸出。量測結果成功驗證:(1)CMOS平台具有單晶整合濕度/風速/溫度感測器之可行性；(2)濕度感測器即使無感濕材料，也可透過CMOS平台小線寬的優勢實現合理的靈敏度，並於響應時間有近83倍的提升，而整合加熱器則可使遲滯現象約4到6倍的改善；(3)具有懸浮結構設計之風速感測器，可使靈敏度提升44%

Apparent temperature is a useful information for the public to better understand environmental conditions. Through the advantages of CMOS platform e.g. process compatibility of several different sensors and analog signal processing circuits, it could enable the apparent-temperature measurement on portable devices. This study presents the monolithic integration of humidity, flow, and temperature sensors to realize an environmental hub for apparent-temperature detection. The design is based on TSMC 0.18µm 1P6M CMOS platform. Features of the proposed design are: (1) For system: SoC environmental hub for apparent-temperature detection, (2) For component: capacitive humidity sensors without moisture sensitive filler. Moreover, a microheater integrated underneath the humidity sensor can avoid hysteresis, and (3) For component: suspended hot-wire flow sensors for thermal-isolation can increase sensitivity. Measurements of the proposed environmental hub shows: the humidity sensor can not only achieve reasonable sensitivity, but an improvement in response time of 83 times. Additionally, the integration of a heater improves hysteresis performance by 4 to 6 times. The flow sensor, exhibits a sensitivity improvement of 44%. Finally, the temperature sensor with a sensitivity of 0.66mV/℃ has a linear response. The apparent-temperature measurement is also demonstrated.

摘要 I
Abstract II
誌謝 III
目錄 VIII
圖目錄 XI
表目錄 XVIII
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 4
1-2-1 相對濕度感測器感測機制 5
1-2-2 熱式風速感測器感測機制 7
1-2-3 接觸式溫度感測器感測機制 10
1-2-4濕度、風速、溫度感測器整合 13
1-2-5 CMOS-MEMS製程 16
1-3 研究動機與目標 19
1-4 全文架構 22
第二章 感測原理與設計分析 43
2-1 TSMC 0.18\mathrm{\mu}m 1P6M製程平台 43
2-2 感測原理 44
2-2-1 電容式濕度感測器感測原理 44
2-2-2 熱線式風速感測器感測原理 47
2-2-3 熱電子式二極體溫度感測器感測原理 50
2-3 元件設計 51
2-4 模擬分析 53
2-4-1濕度感測器之電容值模擬 54
2-4-2風速感測器之絕熱模擬 55
第三章 製程規劃與結果 64
3-1 晶片整體佈局 64
3-2 CMOS後段製程流程 65
3-3 製程結果與討論 68
3-4 晶背矽蝕刻結果與討論 70
第四章 量測結果與討論 78
4-1 濕度感測器量測結果 78
4-1-1 電容初始值與靈敏度量測結果 79
4-1-2 響應時間量測結果 80
4-1-3 濕度遲滯曲線量測結果 82
4-1-4 無感濕材料之濕度感測器量測結果討論 83
4-2 風速感測器量測結果 85
4-3 溫度感測器量測結果 87
第五章 結論與未來工作 98
5-1 結論 98
5-2 未來工作 99
5-2-1 風速感測器幾何結構設計優化 100
5-2-2 以覆晶接合實現本元件之可行性 101
5-2-3 量測架設之改善方式 102
參考文獻 107
附錄A 風速感測器幾何結構設計優化 113
附錄B 以覆晶接合實現本元件設計 120

[1] J.-C. Zhao, C.-L. Wang, "A Great Adventure in Human Body: The Medical Endoscope," 科儀新知, vol. 32, no. 1, pp. 87-94, 2010.
[2] HAMAMATSU, Mini-spectrometer C12666MA. [Online]. Available: https://www.hamamatsu.com/eu/en/product/optical-sensors/spectrometers/mini-spectrometer/C12666MA.html.
[3] M.-H. Tsai, C.-M. Sun, Y.-C. Liu, C. Wang, and W. Fang, "Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors," Journal of Micromechanics and Microengineering, vol. 19, no. 10, p. 105017, 2009.
[4] S.-C. Chen, V. P. Chung, D.-J. Yao, and W. Fang, "Vertically integrated CMOS-MEMS capacitive humidity sensor and a resistive temperature detector for environment application," in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017: IEEE, pp. 1453-1454.
[5] C.-M. Sun, C. Wang, M.-H. Tsai, H.-S. Hsie, and W. Fang, "A novel double-side CMOS-MEMS post processing for monolithic sensor integration," in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008: IEEE, pp. 90-93.
[6] J.-H. Lee, S.-K. Yeh, and W. Fang, "Monolithic/vertical integration of piezo-resistive tactile sensor and inductive proximity sensor using CMOS-MEMS technology," in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019: IEEE, pp. 826-829.
[7] Central Weather Bureau. [Online]. Available: https://www.cwb.gov.tw/V8/C/.
[8] A. Schroth, K. Sager, G. Gerlach, A. Haberli, T. Boltshauser, and H. Baltes, "A resonant polyimide-based humidity sensor," in Proceedings of the International Solid-State Sensors and Actuators Conference-TRANSDUCERS'95, 1995, vol. 2: IEEE, pp. 740-742.
[9] T. Boltshauser, M. Schonholzer, O. Brand, and H. Baltes, "Resonant humidity sensors using industrial CMOS-technology combined with postprocessing," Journal of Micromechanics and Microengineering, vol. 2, no. 3, p. 205, 1992.
[10] Z. Li, H. Zhang, W. Zheng, W. Wang, H. Huang, C. Wang, A. G. MacDiarmid, and Y. Wei, "Highly sensitive and stable humidity nanosensors based on LiCl doped TiO2 electrospun nanofibers," Journal of the American Chemical Society, vol. 130, no. 15, pp. 5036-5037, 2008.
[11] C.-L. Dai, M.-C. Liu, F.-S. Chen, C.-C. Wu, and M.-W. Chang, "A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique," Sensors and Actuators B: Chemical, vol. 123, no. 2, pp. 896-901, 2007.
[12] S. Chatzandroulis, A. Tserepi, D. Goustouridis, P. Normand, and D. Tsoukalas, "Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor," Microelectronic Engineering, vol. 61, pp. 955-961, 2002.
[13] N. Lazarus, S. S. Bedair, C.-C. Lo, and G. K. Fedder, "CMOS-MEMS capacitive humidity sensor," Journal of Microelectromechanical Systems, vol. 19, no. 1, pp. 183-191, 2009.
[14] U. Kang and K. D. Wise, "A high-speed capacitive humidity sensor with on-chip thermal reset," IEEE Transactions on Electron Devices, vol. 47, no. 4, pp. 702-710, 2000.
[15] C.-C. Chang, P.-H. Hong, S.-K. Yeh, Y.-C. Lin, M.-F. Lai, and W. Fang, "Environmental sensing hub on single chip using double-side post-CMOS processes," in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020: IEEE, pp. 877-880.
[16] J. T. Kuo, L. Yu, and E. Meng, "Micromachined thermal flow sensors—A review," Micromachines, vol. 3, no. 3, pp. 550-573, 2012.
[17] W. Xu, X. Wang, Z. Ke, and Y.-K. Lee, "Bidirectional CMOS-MEMS airflow sensor with sub-mW power consumption and high sensitivity," IEEE Transactions on Industrial Electronics, vol. 69, no. 3, pp. 3183-3192, 2021.
[18] J. Kim, H. Cho, S.-I. Han, A. Han, and K.-H. Han, "A disposable microfluidic flow sensor with a reusable sensing substrate," Sensors and Actuators B: Chemical, vol. 288, pp. 147-154, 2019.
[19] T. E. Miller and H. Small, "Thermal pulse time-of-flight liquid flow meter," Analytical Chemistry, vol. 54, no. 6, pp. 907-910, 1982.
[20] J. Wu and W. Sansen, "Electrochemical time of flight flow sensor," Sensors and Actuators A: Physical, vol. 97, pp. 68-74, 2002.
[21] R. Waikhom, L.-J. Yang, H.-Y. Shih, and C.-R. Kuo, "Self-heating CMOS flow sensor," in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021: IEEE, pp. 1279-1282.
[22] R. J. Adamec and D. V. Thiel, "Self heated thermo-resistive element hot wire anemometer," IEEE Sensors Journal, vol. 10, no. 4, pp. 847-848, 2010.
[23] R.-H. Ma, D.-A. Wang, T.-H. Hsueh, and C.-Y. Lee, "A MEMS-based flow rate and flow direction sensing platform with integrated temperature compensation scheme," Sensors, vol. 9, no. 7, pp. 5460-5476, 2009.
[24] H.-M. Chuang, K.-B. Thei, S.-F. Tsai, and W.-C. Liu, "Temperature-dependent characteristics of polysilicon and diffused resistors," IEEE Transactions on Electron Devices, vol. 50, no. 5, pp. 1413-1415, 2003.
[25] S. Pan, Y. Luo, S. H. Shalmany, and K. A. Makinwa, "A resistor-based temperature Sensor With a 0.13 pJ $\cdot $ K2 Resolution FoM," IEEE Journal of Solid-State Circuits, vol. 53, no. 1, pp. 164-173, 2017.
[26] Y. Shi, Y. Wang, Y. Deng, H.i Gao, Z. Lin, W. Zhu, H. Ye, "A novel self-powered wireless temperature sensor based on thermoelectric generators," Energy Conversion and Management, vol. 80, pp. 110-116, 2014.
[27] R. Feng, F. Tang, N. Zhang, and X. Wang, "Flexible, high-power density, wearable thermoelectric nanogenerator and self-powered temperature sensor," ACS applied materials & interfaces, vol. 11, no. 42, pp. 38616-38624, 2019.
[28] G. Wang and G. C. Meijer, "The temperature characteristics of bipolar transistors fabricated in CMOS technology," Sensors and Actuators A: Physical, vol. 87, no. 1-2, pp. 81-89, 2000.
[29] Y. M. Shwarts, V. Borblik, N. Kulish, E. Venger, and V. Sokolov, "Limiting characteristics of diode temperature sensors," Sensors and Actuators A: Physical, vol. 86, no. 3, pp. 197-205, 2000.
[30] A. Bobby, N. Shiwakoti, P. Gupta, and B. Antony, "Barrier modification of Au/n-GaAs Schottky structure by organic interlayer," Indian Journal of Physics, vol. 90, no. 3, pp. 307-312, 2016.
[31] M. Mansoor, I. Haneef, S. Akhtar, A. De Luca, and F. Udrea, "Silicon diode temperature sensors—A review of applications," Sensors and Actuators A: Physical, vol. 232, pp. 63-74, 2015.
[32] M. K. Matters-Kammerer, L. Tripodi, R. Van Langevelde, J. Cumana, and R. H. Jansen, "RF Characterization of Schottky Diodes in 65-nm CMOS," IEEE Transactions on Electron Devices, vol. 57, no. 5, pp. 1063-1068, 2010.
[33] J. Wu, Z. Wu, H. Ding, Y. Wei, X. Yang, Z. Li, B.-R. Yang, C. Liu, L. Qiu, and X. Wang, "Multifunctional and high-sensitive sensor capable of detecting humidity, temperature, and flow stimuli using an integrated microheater," ACS applied materials & interfaces, vol. 11, no. 46, pp. 43383-43392, 2019.
[34] W. Xu, H. Tavakkoli, J. Cabot, X. Zhao, M. Duan, and Y.-K. Lee, "Single-Chip Integration of CMOS Compatible Mems Temperature/Humidity and Highly Sensitive Flow Sensors for Human Thermal Comfort Sensing Application," in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021: IEEE, pp. 1219-1222.
[35] W. Xu, H. Tavakkoli, X. Zhao, and Y.-K. Lee, "CMOS Compatible MEMS Multienvironmental Sensor Chip for Human Thermal Comfort Measurement in Smart Buildings," IEEE Transactions on Electron Devices, vol. 69, no. 11, pp. 6290-6297, 2022.
[36] C.-H. Yang, C.-C. Chang, Y.-C. Lee, Y.-L. Chen, and W. Fang, "Capacitive CMOS Humidity Sensor with Novel Fringe Electrodes and Polyimide-Pillars for Performance Enhancement," in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021: IEEE, pp. 66-69.
[37] 楊家閎, "新穎邊際電擊電容式濕度感測系統之設計與實現," 國立清華大學碩士論文, 2021.
[38] O. B. H. Baltes, G.-K. Fedder, C. Hierold, J.-G. Korvink, and O. Tabata, CMOS-MEMS: Advanced Micro and Nanosystems, 1st ed., Weinheim, Germany: Wiley-VCH, 2008.
[39] H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, and O. Tabata, Cmos-mems. John Wiley & Sons, 2013.
[40] Sensirion. [Online]. Available: https://sensirion.com/.
[41] Bosch. [Online]. Available: https://www.bosch-home.com.tw/.
[42] Honeywell. [Online]. Available: https://www.honeywell.com/.
[43] R. G. Steadman, "A universal scale of apparent temperature," Journal of Applied Meteorology and Climatology, vol. 23, no. 12, pp. 1674-1687, 1984.
[44] W. Xu, B. Gao, S. Ma, A. Zhang, Y. Chiu, and Y.-K. Lee, "Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35 μm CMOS MEMS technology," in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016: IEEE, pp. 189-192.
[45] F. T. i. C.-M. O. Brand, Weinheim, Germany: Wiley-VCH, pp. 1-67, 2008.
[46] K.-L. Chau, S. Lewis, Y. Zhao, R. Howe, S. Bart, and R. Marcheselli, "An integrated force-balanced capacitive accelerometer for low-g applications," Sensors and Actuators A: Physical, vol. 54, no. 1-3, pp. 472-476, 1996.
[47] J. B. Hasted, Aqueous dielectrics. Chapman and Hall London, 1973.
[48] Y.-C. Liu, C.-M. Sun, L.-Y. Lin, M.-H. Tsai, and W. Fang, "Development of a CMOS-based capacitive tactile sensor with adjustable sensing range and sensitivity using polymer fill-in," Journal of microelectromechanical systems, vol. 20, no. 1, pp. 119-127, 2010.
[49] H. Looyenga, "Dielectric constants of heterogeneous mixtures," Physica, vol. 31, no. 3, pp. 401-406, 1965.
[50] H. Shibata, M. Ito, M. Asakursa, and K. Watanabe, "A digital hygrometer using a polyimide film relative humidity sensor," IEEE Transactions on Instrumentation and Measurement, vol. 45, no. 2, pp. 564-569, 1996.
[51] L. V. King, "XII. On the convection of heat from small cylinders in a stream of fluid: Determination of the convection constants of small platinum wires with applications to hot-wire anemometry," Philosophical transactions of the royal society of London. series A, containing papers of a mathematical or physical character, vol. 214, no. 509-522, pp. 373-432, 1914.
[52] E. F.-C. Meng, Mems technology and devices for a microfluid dosing system. California Institute of Technology, 2003.
[53] F. Udrea, S. Santra, and J. W. Gardner, "CMOS temperature sensors-concepts, state-of-the-art and prospects," in 2008 International Semiconductor Conference, 2008, vol. 1: IEEE, pp. 31-40.
[54] Q. Li, J. Wang, Y. Han, H. Min, and F. Zhou, "Fabrication of Schottky Diode in Standard CMOS Process," 2004.
[55] X. M. Zhang, M. Y. Lu, Y. Zhang, L. J. Chen, and Z. L. Wang, "Fabrication of a high‐brightness blue‐light‐emitting diode using a ZnO‐nanowire array grown on p‐GaN thin film," Advanced Materials, vol. 21, no. 27, pp. 2767-2770, 2009.
[56] Fujifilm. [Online]. Available: https://asset.fujifilm.com/.
[57] P. Kosky, R. Balmer, R. T. Balmer, W. D. Keat, and G. Wise, Exploring engineering: an introduction to engineering and design. Academic Press, 2012.
[58] N. A. David, P. M. Wild, and N. Djilali, "Parametric study of a polymer-coated fibre-optic humidity sensor," Measurement Science and Technology, vol. 23, no. 3, p. 035103, 2012.
[59] S. Cular, "The Measurement and Uncertainty of Air Dielectric Capacitors from 1 kHz to 10 MHz," Sandia National Lab.(SNL-NM), Albuquerque, NM (United States), 2014.
[60] S. Huler, Defining the wind: the Beaufort scale and how a 19th-century admiral turned science into poetry. Crown, 2007.
[61] Humidity, Relative Humidity and Temperature. [Online]. Available: https://brownell.co.uk/datasheets/basics_humidity.pdf.
[62] V. Bansal, A. Gurjar, D. Kumar, and B. Prasad, "3-D design, electro-thermal simulation and geometrical optimization of spiral platinum micro-heaters for low power gas sensing applications using COMSOL," in Proceedings of the COMSOL Conference, 2011.
[63] Longwin, LW3660. [Online]. Available: http://www.longwin.com/big5/main.html.