近年來，社會進步的步調非常的迅速，而氨氣感測器在如今蓬勃發展的科技產業裡，扮演著非常重要的角色，例如在化工行業上，因為氨氣可以做為製冷劑協助製冷系統的運作，因此及時的偵測製作過程中的氨氣含量，可以提高生產的產率。亦或是在半導體產業裡，對於製程時其環境內所含有的氣體，都會一定程度的對晶圓造成影響，而氨氣也是會干擾元件良率的氣體之一，因此要如何能夠迅速的掌握環境中氨氣的含量是件重要的議題，並且由於在製程時其環境的溼度會隨時改變，例如在無塵室裡的濕度約50%，而實驗腔體內的濕度可能為10%以下，或者是在水槽附近的溼度會來到70%左右，因此要能夠對於濕度的改變，依舊能穩定的偵測氨氣，是個非常重要的主題。
以往的氨氣感測器，其為使用金屬氧化物或者是有機半導體製作而成，而本論文是使用新穎吸水性高分子材料作為元件，並探討其在不同濕度下的反應。

In recent years, the pace of social progress has been very rapid, and ammonia gas sensors play a very important role in today's booming technology industry, such as in the chemical industry, because ammonia gas can be used as a refrigerant to assist the refrigeration system Therefore, the timely detection of the ammonia content in the production process can improve the production yield. Or in the semiconductor industry, the gas contained in the environment during the process will affect the wafer to a certain extent, and ammonia gas is also one of the gases that will interfere with the yield of the components. Therefore, how to quickly grasp the The content of ammonia in the environment is an important issue, and since the humidity of the environment will change at any time during the process, for example, the humidity in the clean room is about 50%, while the humidity in the experimental chamber may be below 10%. Or the humidity near the sink will reach about 70%, so it is a very important topic to be able to stably detect ammonia gas for changes in humidity.
The previous ammonia sensor was made of metal oxides or organic semiconductors, but this paper uses novel water-absorbing polymer materials as components, and discusses the reaction under different humidity.

摘要 i
Abstract ii
致謝 iv
目錄 1
表目錄 6
Chapter1 緒論 7
1-1前言 7
1-2先期成果 11
1-3研究動機 12
1-4論文架構 13
Chapter2 材料簡介與氣體感測原理 14
2-1 有機高分子材料 14
2-2 吸水性材料介紹 15
2-2 有機吸水性高分子材料氣體感測機制 17
Chapter3 奈米孔洞垂直通道元件製程 19
3-1 基本圖形定義製程 19
3-2微米柵狀結構垂直通道元件製程 22
3-2奈米間隔垂直通道元件製程 25
3-3 量測系統介紹 29
3-3-1 濕度控制系統 30
3-3-2 NaOH 控濕系統 32
Chapter4 奈米間格垂直通道吸水性材料氣體感測 34
器於不同濕度下之探討 34
4-1 不同 ph 值下對元件反應之影響 35
4-2鹽類摻雜對元件反應之影響 46
4-3 主動層材料濃度對元件反應之影響 49
4-4 吸水性材料比較 50
Chapter5 微米柵狀垂直通道吸水性材料氣體感測器於不同濕度下之探討 52
5-1 微米柵狀垂直通道與奈米間格垂直通道比較 53
5-2 鹽類摻雜對元件反應之影響 55
5-2-1 量測電壓調變測試 58
5-3 調變主動層中甘油比例對元件反應之影響 61
5-3-1 重複性測試 66
5-3-2 選擇性測試 70
5-4 元件壽命表現 71
5-5 元件在大氣下與 NaOH 系統之比較 72
Chapter 6 研究總結與未來展望 74
6-1 研究總結 74
6-2 未來展望 77
Chapter7 附錄-電化學式葡萄糖感測器 83
7-1 元件於不同 ph 溶液下電流變化 84
7-2 不同 PEG 濃度之元件比較 91
7-3 不同 PEG 分子量之元件比較 98

[1] https://www.cnet.com/pictures/ibms-future-vision-for-our-five-senses-images/5/
[2] Jae HoonBang, YongJungKwon, Jung-HoonLee, Ali Mirzaei,Ha YoungLee,HyeunseokChoiSangSub Kim,YoungKyu Jeong,HyounWooKim, “Proton-beam engineered surface-point defects for highly sensitive and reliable NO2 sensing under humid environments“ Journal of Hazardous Materials Volume 416, 15 August 2021, 125841
[3] Jiawen Shi, Sen Liu, Peng Zhang, Ning Sui, Shuang Cao, Tingting Zhou∗ and Tong Zhang “Sb/Pd co-doped SnO2 nanoparticles for methane detection: resistance reduction and sensing performance studies“ Nanotechnology, Volume 32, Number 47
[4] Fajr I.M.Ali, Falah Awwad, Yaser E.Greishc Ayah, F.S.Abu-HanidSaleh, T.Mahmoud, “Fabrication of low temperature and fast response H2S gas sensor based on organic metal oxide hybrid nanocomposite membrane.”, Organic Electronics, Volume 76, January 2020, 105486
[5] Zhou Q, Lu Z, Wei Z, Xu L, Gui Y and Chen W “Hydrothermal Synthesis of Hierarchical Ultrathin NiO Nanoflakes for High-Performance CH4 Sensing“. Front. Chem. 6:194
[6] Fidel Toldra-Reig and Jose M. Serra, “Development of Potentiometric Sensors for C2H4 Detection“ Sensors2018,18(9), 2992
[7] Panagiotis Mougkogiannis , Michael Turner and Krishna Persaud “Amine Detection Using Organic Field Effect Transistor Gas Sensors“ Sensors 2021, 21, 13
[8] Chuang Yu,Jing-Hui He,Xue-Feng Cheng,Hong-Zhen Lin,Haitao Yu,Jian-Mei Lu “An Ion-In-Conjugation-Boosted Organic Semiconductor Gas Sensor Operating at High Temperature and Immune to Moisture “Angew. Chem. Int. Ed.2021,60, 15328–15334
[9] Chen, CW (Chen, Chia-Wei) Hsieh, JC (Hsieh, Ju-Chun) Lin, YC (Lin, Yu-Chi) Chang, JH (Chang, Jen-Hao) Chen, IC (Chen, I-Chung) Horng, SF (Horng, Sheng-Fu) Meng, HF (Meng, Hsin-Fei) Lu, CJ (Lu, Chia-Jung) Zan, HW (Zan, Hsiao-Wen) “Micrometer-Scale Grating Vertical Structure OSC Ammonia Gas Sensor with a PEDOT:PSS Coupling Layer Using the Current Spreading Effect to Achieve ppb-Regime Sensing Capability” ACS Appl. Electron. Mater. 2020, 2, 2514−2524
[10] HaifengLiu,ChengboLi,RuishiXie,JieLi,GuohuaMa,KuiZheng,XingquanZhang,HeyanHuang,TongjiangPeng,JichuanHuo"Rapid and high sensing response to acetone based on La1-xBaxMnO3+δ nanopowders” Ceramics International Volume 47, Issue 5, 1 March 2021
[11] Wen Ye,Jing-Hui He,Qiang Cao,Wu-Ji Sun,Jia Wang,Ze-Kun Chen,Xue-Feng Cheng,Chuang Yu,Jian-Mei Lu” Surfactant-Free, One-Step Synthesis of Lead-Free Perovskite Hollow Nanospheres for Trace CO Detection” Adv.Mater.2021, 33, 2100674
[12] Kuan Yi Lee, Ju Chun Hsieh, Chi An Chen, Wei Lun Hen, Hsin Fei Meng, Chia Jung Lu, Sheng Fu Horng, Hsiao Wen Zan,“Ultrasensitive detection of hydrogen sulfide gas based on perovskite vertical channel chemo-sensor. ”, Sensors and Actuators B: Chemical, Volume 326, January 2021, 128988
[13] Rui Ma, Zetong Chen,Danna Zhao,Xujing Zhang,Jingting Zhuo,Yajiang Yin,Xiaofeng Wang,Guowei Yang andFang Y “Ti3C2Tx MXene for electrode materials of supercapacitors“ J. Mater. Chem. A, 2021,9, 11501-11529
[14] PramilaPatil,Yogesh T.Nakate,Revan C.Ambare,Rahul S.Ingole,Snehal L.Kadam,Umesh T.Nakate “2-D NiO nanostructured material for high response acetaldehyde sensing application“ Materials Letters Volume 293, 15 June 2021, 129757
[15] Yan Yan Wang, Ming Yang, Wei Xiao Liu, Lei Dong, Da Chen, Chang Si Peng, “Gas sensors based on assembled porous graphene multilayer frameworks for DMMP detection.”, J. of Mater. Chem. C, Volume 7, Pages, 9248-9256, June 2019
[16] Zixuan Wu, Xing Yang and Jin Wu “Conductive Hydrogel- and Organohydrogel-Based Stretchable Sensors“ ACS Appl. Mater. Interfaces 2021, 13, 2, 2128–2144
[17] Hui Zhi, Jianmei Gao, and Liang Feng “Hydrogel-Based Gas Sensors for NO2 and NH3“ACS Sens. 2020, 5, 3, 772–78.
[18] Chen, WL(Chen,Wei-Lun),Chiu,HC(Chiu,Huang-Cheng)Chu, H(Chu,Hsuan)Hsieh, JC(Hsieh, Ju-Chun), Chen,BX(Chen,Bing-Xin), Tian,YC(Tian,Ya-Chun), Liau, SK(Liau, Shuh-Kuan), Chan, MJ(Chan, Ming-Jen), Lu,CJ(Lu,Chia-Jung), Meng,HF (Meng,Hsin-Fei), Horng,SF(Horng, Sheng-Fu), Wang, CL(Wang, Chien-Lung), Zan, HW(Zan, Hsiao-Wen) “Electronic nano sponge breath ammonia sensors using hygroscopic polymers on vertical channel nano-porous structure“ J. Mater. Chem. C, 2021,9, 12938-12950
[19] T. Nickolas, G. Frisch, A. Opotowsky, R. Arons and J. Radhakrishnan, “Awareness of kidney disease in the US population: Findings from the National Health and Nutrition Examination Survey (NHANES) 1999 to 2000”, American Journal of Kidney Diseases, vol. 44, no. 2, pp. 185-197, 2004.
[20] L. R. Narasimhan, W. Goodman, and C. Kumar N. Patel, “Correlation of breath ammonia with blood urea nitrogen and creatinine during hemodialysis”. Proceedings of the National Academy of Sciences, vol. 98, no. 8, pp. 4617-4621, 2001.
[21] G. Neri, A. Lacquaniti, G. Rizzo, N. Donato, M. Latino, M. Buemi, “Real-time monitoring of breath ammonia during haemodialysis: use of ion mobility spectrometry (IMS) and cavity ring-down spectroscopy (CRDS) techniques,” Nephrology Dialysis Transplantation, vol. 27, no. 7, pp. 2945-2952, 2012.
[22] T. Hibbard, K. Crowley, F. Kelly, F. Ward, J. Holian, A. Watson, A. J Killard, “Point of care monitoring of hemodialysis patients with a breath ammonia measurement device based on printed polyaniline nanoparticle sensors,” Analytical chemistry, vol. 85, no. 24, pp. 12158-12165, 2013.
[23] M, Chuang, C. Chen, H. Zan, H. Meng, C. Lu, “Organic Gas Sensor with an Improved Lifetime for Detecting Breath Ammonia in Hemodialysis Patients,” ACS Sensors, vol. 2, no. 12, pp. 1788-1795, 2017.
[24] S. Yu, T. Tung, H. Yang, G. Chen, C. Shih, Y. Lee, C. Chen, H. Zan, H. Meng, C. Lu, C. Wang, W. Jian, O. Soppera, “A Versatile Method to Enhance the Operational Current of Air-Stable Organic Gas Sensor for Monitoring of Breath Ammonia in Hemodialysis Patients,” ACS Sensors, vol. 4, no. 4. pp. 1023-1031, 2019.
[25] Chen, C. C., Hsieh, J. C., Chao, C. H., Yang, W. S., Cheng, H. T., Chan, C. K., Lu,
[26] M. Dai, Y. Lin, H. Lin, H. Zan, K. Chang, H. Meng, J. Liao, M. Tsai, and H. Cheng, “Highly sensitive ammonia sensor with organic vertical nanojunctions for noninvasive detection of hepatic injury,” Analytical chemistry, vol. 85, no. 6, pp. 3110-3117, 2013
[27] 陳韋綸, “超靈敏有機高分子氣體感測器”, 清大電子所, 碩士論文, 2020
[28] J. Wu, Z. Wu, S. Han, B. Yang, X. Gui, K. Tao, J. Liu, C. Miao, L. Norford, “Extremely Deformable, Transparent, and High-Performance Gas Sensor Based on Ionic Conductive Hydrogel,” ACS Applied Materials & Interfaces, vol. 11, no. 2, pp. 2364-2373, 2019
[29] 邱皇城, “吸水性高分子氣體感測器”, 清大電子所, 碩士論文, 2021
[30] M. Chen, Y. Li, C. Wu, Y. Lee, H.Zan, H. Meng, C. Lai., Y. Tiam. “Breath Ammonia Is a Useful Biomarker Predicting Kidney Function in Chronic Kidney Disease Patients,” Biomedicines, vol. 8, no. 11, 8110468, 2020.
[31] P. Atkins and J. De Paula, Atkins' physical chemistry. Oxford: Oxford University Press, 2009.
[32] 陳家薇, “微米製程垂直通道有機半導體氣體感測器研發”, 交大物理所, 碩士論文, 2019
[33] Jia-De Yan, Ching-Chou Wu, “ Development of Electrochemical Biosensors for Continuous Glucose Monitoring “
[34] Muhammad Umar1, Kyungtaek Min , Sunghwan Kim “Advances in hydrogel photonics and their applications“APL Photonics 4, 120901 (2019)
[35] Sandra Reitmaier, Ludwika Kreja, Katharina Gruchenberg, Britta Kanter, Joana Silva-Correia, Joaquim Miguel Oliveira, Rui Luís Reis, Valeria Perugini, Matteo Santin, Anita Ignatius, Hans-Joachim Wilke “ In vivo biofunctional evaluation of hydrogels for disc regeneration “European Spine Journal volume 23, pages19–26 (2014)
[36] Madden J, Barrett C, Laffir FR, Thompson M, Galvin P, O' Riordan A. On-Chip Glucose Detection Based on Glucose Oxidase Immobilized on a Platinum-Modified, Gold Microband Electrode. Biosensors, 25 Jul 2021, 11(8):249