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作者(中文):朱珈立
作者(外文):Chu, Chia-Li
論文名稱(中文):基於簡化群體演算法之混合特徵選擇方法應用於半導體製造分類問題
論文名稱(外文):A Hybrid Feature Selection Method based on Simplified Swarm Optimization for Data Classification in Semiconductor Manufacturing
指導教授(中文):葉維彰
指導教授(外文):Yeh, Wei-Chang
口試委員(中文):梁韵嘉
謝宗融
賴智明
口試委員(外文):Liang, Yun-Chia
Hsieh, Tsung-Jung
Lai, Chyh-Ming
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工業工程與工程管理學系
學號:109034702
出版年(民國):112
畢業學年度:111
語文別:中文
論文頁數:48
中文關鍵詞:混合式特徵選擇簡化群體演算法半導體製造
外文關鍵詞:hybrid feature selectionSimplified Swarm Optimizationsemiconductor manufacturing
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在半導體製造產業中,高良率是維持市場競爭力的重要因素之一。隨著半導體技術演進,使用傳統的統計管制手法進行品質管控已無法負擔日趨複雜、多樣化的製程,無法即時發現產線異常會導致額外的生產成本,也影響客戶的合作意願。面對半導體製造過程中產生的大量高維度、非線性、不平衡資料,需要跳脫傳統,引入機器學習方法,透過非線性分類模型達到更即時的異常偵測,並進一步分析異常發生的根本原因,以提前發現產線問題並即時改進。
由於半導體製造的產線資料的特徵數量相當高,需要進行資料降維以減少資料中的雜訊、降低計算成本。而特徵選擇為資料降維的主要方法之一,並進一步區分為過濾器、包裝器與嵌入式方法。基於統計理論的過濾器計算迅速、泛用性高,而基於啟發式演算法的包裝器雖時間複雜度高,但經常能在個案中得到良好的表現,若將兩者進一步結合為混合式方法,能同時滿足資料品質和運算成本。為此,本研究將提出一兩階段特徵選擇模型,首先利用互資訊刪去冗餘特徵,縮小特徵空間後,再以簡化群體演算法,設計獨特的適應度函數以從候選特徵中,挑選出最佳特徵集合,最後選用支援向量機為分類模型進行驗證。從實際案例中可發現,本研究所提的特徵選擇方法,在晶圓異常分類問題中,以較少的特徵數量得到較佳的分類精度。在公開數據集中的表現,也進一步佐證了此方法的有效性和泛化能力。
High yield is vital for competitiveness in semiconductor manufacturing. Traditional statistical control methods fail to detect real-time production line abnormalities, causing extra costs and hampering customer collaboration. To address the high-dimensional, nonlinear, and imbalanced data in this field, machine learning methods are needed for real-time anomaly detection. And further analysis of the root causes of anomalies allows for early detection of production line issues and timely improvements.
Facing the high dimensionality of production line data, dimensionality reduction reduces data noises and costs. Feature selection is a primary method for data dimensionality reduction, including Filter, Wrapper, and Embedded methods. Filter methods provide fast computation and generality based on statistical theory, while wrapper methods offer higher accuracy but with higher time complexity. A hybrid approach combines both, addressing data quality and computational costs. In this paper, we proposes a two-stage feature selection model , starting with the elimination of redundant features using mutual information to reduce the feature space. Then, a Simplified Swarm Optimization algorithm is used to select the optimal feature subset from the candidate features. Finally, support vector machines are employed as the classification model for validation. In wafer anomaly classification case study, results show improved accuracy with fewer features. And the performance on public datasets further validates the effectiveness and generalization capability of this method.
摘要 i
Abstract ii
目錄 iii
表目錄 iv
圖目錄 v
第一章 緒論 1
1.1 研究背景與動機 1
1.2 研究目的 3
1.3 論文結構 5
第二章 文獻回顧 7
2.1 半導體製造異常問題 7
2.2 特徵選擇 12
2.3 分類演算法 15
2.4 簡化群體演算法 20
2.5 不平衡分類問題 21
2.6 文獻回顧小結 24
第三章 研究方法 25
3.1 互資訊 25
3.2 基於SSO的特徵選擇 26
第四章 實驗結果與分析 30
4.1 資料集說明 30
4.2 MI-SSO參數設定 31
4.3 實驗結果 34
4.4 個案驗證 37
第五章 結論與未來展望 40
5.1 結論 40
5.2 後續研究方向 40
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