近年來在智慧車輛的概念興起後，光學雷達被視為車用主動遙測技術最重要的系統之一，光達能夠在複雜的天氣狀況中提供強大的三維空間解析及建構能力，是讓車輛達到更高的自動駕駛階級之關鍵技術。微機電式的光達相比於其他種類的光達系統有著體積小、快速響應及成本低的優勢，且能夠順應微縮化的趨勢應用在更廣泛的領域。壓電式的微掃描面鏡相比於其他種致動機制，在車輛的環境中有更好的相容性，因此本研究利用PZT壓電薄膜搭配SOI晶圓進行壓電式微掃描面鏡的設計與實現，微掃描面鏡的性能指標由掃描頻率、掃描角度以及面鏡尺寸共同決定，本研究提出藉由致動器結構的改善設計來提升整體性能指標的乘積。完成元件製程後首先針對材料的機械參數和壓電參數進行萃取與分析，接著進行微掃描面鏡元件的動態分析以及性能量測，結果顯示所提出之兩種微掃描面鏡設計，在20 Vpp的交流訊號驅動下，其掃描模態共振頻分別在1.73 kHz以及2.58 kHz，且光學角分別達48°以及50°，後者的性能指標乘積較前者提升了約56%，成功透過致動器結構的更動來達到更好的操作性能，且較高的操作頻率說明其在車輛環境中使用能保有一定的元件可靠性。

In recent years, LiDAR is regarded as one of the most important building blocks of active remote sensing technology for automobiles with the rise of smart vehicles. LiDAR can provide powerful three-dimensional imaging and analyzing capabilities of the surroundings even under adverse weather conditions, allowing smart vehicles to achieve high level automated driving systems, which is the key technology of self-driving. Compared with other types of LiDAR systems, MEMS LiDAR has the advantages of smaller size, fast response and low cost. Moreover, following the trend of miniaturization, MEMS LiDAR can be used in more fields. Piezoelectric MEMS scanners have better compatibility in the automobile environment comparing to other actuation mechanisms. Therefore, this study untilized PZT thin film alongside SOI wafer to design and implement a piezoelectric MEMS scanner. The figure of merit (FoM) of MEMS scanner decided by its scanning frequency, scanning angle and mirror size. FoM enhanced design of piezoelectric MEMS scanner would be proposed and fabricated, followed by material and piezoelectric properties extraction and analysis. The measurement results show that the two proposed design achieved scanning angle of 48° and 50° at 1.73 kHz and 2.58 kHz respectively using 20 Vpp driving voltage. The FoM was successfully enhanced by 56% through actuator structure design, and the scanning frequency was acceptable for automobile application.

摘要 I
Abstract II
誌謝 III
目錄 VIII
圖目錄 XI
表目錄 XVII
第一章 緒論 1
1-1 前言 1
1-2 微機電式掃描面鏡文獻回顧 4
1-2-1 靜電式微掃描面鏡 4
1-2-2 電磁式微掃描面鏡 8
1-2-3 壓電式微掃描面鏡 11
1-3 研究動機 16
1-4 全文架構 18
第二章 致動原理與元件設計 35
2-1 微掃描面鏡性能指標 35
2-2 壓電效應與材料選用 38
2-3 微掃描面鏡結構設計 40
2-3-1 單層壓電懸臂式致動器 41
2-3-2 雙彎曲式致動器掃描面鏡設計 46
2-3-3 彎曲式致動器優化設計 52
2-3-4 模擬結果比較與探討 54
2-4 小結 55
第三章 製程平台與製程結果 69
3-1 製程流程 69
3-2 製程結果 72
3-2-1 元件結構尺寸量測 72
3-2-2 肋補強結構 75
3-2-3 反射面鏡表面形貌 76
3-3 小結 78
第四章 量測結果 86
4-1 PZT材料參數萃取 86
4-1-1 楊氏模數 86
4-1-2 極化-電場曲線及位移-電場曲線 91
4-1-3 壓電係數d31 96
4-1-4 電容值及介電常數 100
4-2 微掃描面鏡之動態量測 101
4-2-1 元件共振頻率 102
4-2-2 共振模態分析 103
4-3 微掃描面鏡之性能量測 104
4-3-1 機械角量測 105
4-3-2 掃描角量測 107
4-3-3 元件摔落測試 108
4-3-4 元件故障分析 109
4-4 小結 110
第五章 結論與未來工作 131
5-1 結論 131
5-2 未來工作 132
5-2-1 微掃描面鏡新結構設計 132
5-2-2 壓電感測機制設計與探討 137
參考文獻 147

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