本研究利用TSMC提供之0.18 μm 1P6M CMOS標準製程平台，實現一擁有快速反應時間之濕度感測系統晶片(SoC, system on chip)，該系統整合溫度計、微型加熱器用以提升濕度計之性能。本研究將感測電極設計成邊際電容感測，該電極設計容易與柱狀感濕結構結合，並隔絕垂直整合微型加熱器之電性干擾。陣列式柱狀感濕結構設計可增加水氣接觸面積，進而使濕度計反應時間縮短。本研究將一微型加熱器與該濕度計垂直整合，可對濕度計提供排濕、重置的功能，使濕度計可應用於更多情境，並透過將微型加熱器下方之矽基材移除，可使該微型加熱器之加熱效果提升、所需功耗下降。本研究同時單晶片整合二極體式溫度計，可提供濕度計進行相對濕度量測時做校正。從本研究實驗量測結果可得知，該濕度計於氧電漿蝕刻後反應時間縮短約40％；微型加熱器可有效使該濕度計升溫（1.90 oC/mW）；二極體式溫度計之整合（1.66 mV/ oC）可使該濕度計解讀出更精確的相對溼度值，該濕度計之邊際電容感測電極與平行板感測電極相比，其靈敏度較大且較不易受垂直整合的加熱器影響。

This study demonstrates a novel humidity sensing system with fringe electrodes and polyimide pillar array as humidity sensing structure. The humidity sensing system are implemented by the TSMC 0.18μm 1P6M CMOS platform and further monolithically integrated with temperature sensor and micro heater.
The presented humidity sensing unit has pillar polyimide array design to enhance the moisture absorption to improve the response time. The fringe sensing electrodes design has better sensing sensitivity compare to the traditional parallel sensing electrodes. The vertical integration of mi-cro heater can prevent moisture condensation and monolithic integration of temperature sensor can be used for signal calibration.
After the humidity sensing chip is realized, the humidity test, func-tion of micro heater and thermometer has been measured separately. From the measurement result, the humidity sensing chip has good performance in signal. Both the function of thermometer and micro heater are con-tributing to humidity sensing. The humidity sensing chip has been suc-cessfully implemented on the CMOS platform.

摘要 I
Abstract II
目錄 V
圖目錄 VIII
表目錄 XIII
第一章 緒論 1
1-1 前言 1
1-2 濕度計發展現況與簡介 3
1-3 相關文獻回顧 5
1-3-1 相對濕度感測機制分類 7
1-3-2 電容式濕度感測材料介紹 10
1-3-3 CMOS-MEMS製程 13
1-4 研究動機與目標 15
第二章 濕度感測系統設計與分析 30
2-1 TSMC 0.18µm 1P6M CMOS 製程平台 30
2-2 電容式溼度計初始電容與靈敏度 31
2-3 電容式濕度計反應時間 35
2-4 二極體溫度計原理 37
2-5 微型加熱器設計與運作原理 38
2-6 感測系統之設計與模擬 39
2-6-1 整體濕度感測系統設計 39
2-6-2 各元件相關模擬結果 42
第三章 晶片後製程結果討論 55
3-1 晶片佈局 55
3-2 晶片CMOS 後製程 56
3-3 晶片後製程結果 60
第四章 量測結果與討論 72
4-1 濕度計靈敏度量測 72
4-1-1 濕度計線性度探討 73
4-1-2 濕度計不同電極配置之比較 74
4-2 濕度計反應時間量測 75
4-3 加熱器性能量測 77
4-3-1 加熱器溫度分布量測 78
4-3-2 加熱器動態響應量測 79
4-4 溫度計性能量測與整合濕度計之量測 80
4-4-1 絕對濕度之量測 81
4-5 濕度計整合加熱器之量測 82
第五章 結論與未來工作 99
5-1 結論 99
5-2 未來工作 100
參考文獻 108

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