在本文中，利用巴比涅原理(Babinet’s principle)及八木天線(Yagi-Uda
antenna)為基礎，在金膜上以簡單的奈米狹縫結構和入射光的偏振態來決定表面
電漿波之傳遞方向。設計出在不同波長下都擁有強指向性之奈米天線，且加以
進行幾何排列，得出擁有最佳消光比之幾何排列。另外模擬因為 FIB 製程上有
可能造成的結構缺陷，如狹縫寬度、梯形結構等對消光比的影響，同時也計算
單對奈米狹縫組合適用頻段，並嘗試以實驗佐證模擬之結果。

In this thesis, based on Babinet’s principle and concept of Yagi-Uda antenna,
propagating direction of surface plasmon polaritons(SPP) can be controlled by using
simple nanoslits structure and polarization of incident laser. In the simulation, strongunidirectional nanoantennas for different wavelength are designed and get the results
of different alignment with the best extinction ratio. In addition, simulates the impact
on extinction ratio due to the structural defects caused by FIB, such as width of slits,
trapezoidal structure, etc. Also, calculates bandwidth for single pair of nanoantennas
and try to meet results on simulations with experiments.

摘要…………………………………………………………………………………….Ⅰ
Abstract……………………………………………………………………………Ⅱ
誌謝…………………………………………………………………………………Ⅲ
目錄…………………………………………………………………………………Ⅴ
圖目錄……………………………………………………………………………Ⅵ
第一章 序論…………………………………………………………………………1
1.1 前言……………………………………………………………………………1
1.2 研究目的及動機………………………………………………………………2
第二章 研究背景及理論……………………………………………………………3
2.1 金屬材料的光學反應…………………………………………………………3
2.2 表面電漿子……………………………………………………………………7
2.3 激發表面電漿子……………………………………………………………12
2.3.1 Otto 配置…………………………………………………………………12
2.3.2 Kretschmann 配置………………………………………………………13
2.3.3 週期性結構………………………………………………………………14
2.4 八木-宇田天線………………………………………………………………16
2.5 巴比涅原理……………………………………………………………………17
第三章 奈米天線設計原理及模擬…………………………………………………18
3.1 運算環境……………………………………………………………………18
3.2 非對稱性光學奈米天線設計………………………………………………19
3.3 製程缺陷預測………………………………………………………………26
3.3.1 狹縫寬度…………………………………………………………………26
3.3.2 非理想狹縫………………………………………………………………27
3.3.3 奈米天線適用頻寬………………………………………………………33
第四章 實驗量測……………………………………………………………………34
4.1 樣品製作……………………………………………………………………34
4.2 實驗架設……………………………………………………………………37
4.3 實驗結果與討論……………………………………………………………38
第五章 結論與未來展望……………………………………………………………42
參考文獻……………………………………………………………………………43

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