隨著半導體製程線寬持續微縮，光學微影(lithography)是推動先進製程更往前進極重要的一環；而光源則扮演著主要的角色。在90奈米製程以上等更先進製程，光學微影的光源為深紫外光/極紫外光，光投影在晶圓上的強度分布控制將會是影響晶片良率的因素之一。
傳統光子感測器採用像素(pixel)的組成使用光電二極體與多個電晶體，需要外加的電源才能達成訊號量測與讀取，整合至微影系統將面臨相當大的挑戰。 因此，提高了自我驅動之無線光感測模組的需求。
本篇論文提出一個自我驅動之深紫外光/極紫外光無線感測模組；利用特殊設計之接觸槽以耦合浮動閘極的元件，將光強度資訊轉換成電壓控制環震盪器(Voltage Control Ring Oscillator)之電壓來源。電壓控制環震盪器所輸出訊號頻率可以反應即時光強度資訊，並利用On-Chip Antenna (OCA)整合式天線將訊號無線傳出。如此不僅能即時反應曝光時的光強度資訊，且此感測模組之供能來源皆來自於曝光光源本身，無須另外提供電源供應器，增加其應用彈性。

As the CMOS technology node scaled to nano-meter regime, lithography becomes an extremely important part in driving these advanced process. In these system, light source determines the critical dimensions in each generation of technology. Beyond the 90nm technology, light sources move into deep ultraviolet (DUV) and extreme ultraviolet (EUV). The intensity control of the light projection on the wafer is one of key factor affecting the yield control.
Conventional photo sensing modules require external power supply, which might create challenge in integrating onto advanced lithography chamber. Therefore, a self-powered wireless DUV/EUV sensing module can be advantageous.
In this thesis, a self-powered wireless DUV/EUV sensing module is proposed. A specially designed coupling structure is used to transform photo current on ESP to a designed voltage range for a voltage control ring oscillator (VCO). The frequency of the output signal will reflect the real-time light intensity, and the signal will be transmitted wirelessly by means of a signal amplifier and on-chip antenna (OCA). Not only the light intensity information during exposure can be reflected in real-time, but the energy source of the sensing module comes from the DUV/EUV light source. Hence, no additional power supply is required for the realization of these on-wafer self-powered wireless DUV/EUV sensing modules. This invrease the flexible and adaptability of such sensing module.

摘要 ii
Abstract iii
致謝 iv
內文目錄 v
附圖目錄 vii
附表目錄 ix
第一章 序論 1
1-1 研究動機 1
1-2 論文大綱 2
第二章 深紫外光/極紫外光感測模組之發展與文獻回顧 6
2-1 電荷耦合器件(Charge-coupled Device, CCD) 6
2-2 單相主動式像素感測器(Active Pixel Sensor, APS) 7
2-3 新型接觸槽耦合浮動閘極偵測元件 8
2-4 小結 9
第三章 新型深紫外光/極紫外光無線感測模組與操作機制 13
3-1 光電流模型與量測結果 13
(a) 光電效應 13
(b) 光電流模型 14
(c) 微型金屬板光電流量測方法與結果 15
3-2 自我驅動之深紫外光/極紫外光無線感測模組 16
(a) 自我驅動之深紫外光/極紫外光感測器架構與操作原理 16
(b) 浮動閘極耦合電晶體 17
(c) 感光環震盪器 18
(d) 無線訊號發射器 18
3-3 小結 19
第四章 新型深紫外光/極紫外光無線感測模組模擬與量測特性分析 33
4-1 耦合汲極-閘極相接電晶體模擬與量測結果 33
4-2 感光環震盪器模擬與量測結果 35
4-3 無線訊號發射器模擬結果 37
4-4 小結 38
第五章 總結 49
5-1 自我驅動光感測器與現行方法之比較 49
5-2 結語與未來展望 50
參考文獻 52

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