骨傳導麥克風分為加速度計式與麥克風式，前者若要達到高頻寬，會有極大的功耗，為了避免功耗問題，本研究採用麥克風式，利用單層多晶矽製程平台製作微型壓力產生器，並與氣導式麥克風進行垂直整合。首先對相關理論進行研究，並利用電腦輔助軟體進行元件特性之模擬與分析，完成製程與封裝後進行量測。根據量測之結果，設計之兩種微型壓力產生器已成功以半導體製程技術實現，一種是四彈簧式，另一種是封閉式，兩者進行比較，封閉式元件擁有較佳的性能，在1kHz之訊雜比為44.7dB，頻寬為200~2000Hz，量測範圍為0.00582~4g，其中頻寬和量測範圍與市售產品接近。

There are two types of bone conduction microphone. One is accelerometer-based type, and another is microphone-based. The former has larger power consumption when it arrives to high bandwidth. To avoid the problem, this study adopts to the latter one. The way to implement it is using one-layer polysilicon fabrication platform to finish the micromachined pressure generator, and then vertically integrating it with air conduction microphone. First, study the theorem about the structure, and use computer-assisted software to simulate and analyze the properties. After fabricating the pressure generator and finishing packaging, start to measure. According to the result, two micromachined pressure generators are successfully implemented by semiconductor fabrication skill. One is four spring type, and the other is clamped. Comparison of these two, clamped type has better performance, and its bandwidth and measurement range is close to commercial product.

摘要 I
Abstract II
誌謝 III
目錄 V
圖目錄 VIII
表目錄 XIII
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 3
1-2-1 加速度計 4
1-2-2 氣導式麥克風 7
1-2-3 骨傳導麥克風 8
1-3 研究目標 11
1-4 全文架構 11
第二章 感測原理與設計理念 23
2-1 感測原理與元件設計 23
2-1-1 壓力產生器接收骨頭振動 23
2-1-2 聲壓產生 25
2-1-3 麥克風接收聲壓 26
2-1-4 增益流程 27
2-2 元件結構設計與模擬 28
2-2-1 設計概念 29
2-2-2 壓力產生器之機械特性模擬 30
2-2-3 骨傳導麥克風之聲學特性模擬 31
第三章 製程與實驗 48
3-1 製程流程 48
3-2 製程結果與討論 49
3-2-1 薄膜成長與退火 50
3-2-2 正面蝕刻製程 51
3-2-3 背面蝕刻製程 51
3-3 結果與討論 52
第四章 元件特性量測 60
4-1 壓力產生器之機械特性量測 60
4-2 骨傳導麥克風之垂直整合與聲學特性量測 61
4-2-1整合與量測架設 61
4-2-2聲學量測結果與討論 62
4-3 小結 64
第五章 結論與未來工作 82
5-1 結論 82
5-2 未來工作 82
參考文獻 86

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