本研究目的為以機器學習方法連結圖樣變異與電磁響應，以便快速預測阿基米德螺旋天線之電磁特性。本研究使用高效率低誤差法量化圖樣邊緣粗糙度，透過黃光微影製程，在印刷電路板製作可支援天線應用的阿基米德螺旋，並模擬與量測天線之頻率響應，呈現製程中的圖樣變異，再將圖樣特徵與其電性連結。本研究以具有不同正弦波振幅的螺旋天線作為驗證標的，模擬製程中惡化的程度。研究結果顯示，隨著振幅上升，頻率往低頻飄移。開發過程運用影像辨識，將實驗製作的眾多樣本，以機器學習建立快速光學辨識產品優劣的方法，預測天線的作用頻率。

The purpose of this research is to link pattern characteristics and electromagnetic (EM) responses by machine learning to support efficient EM response prediction in Archimedean spiral antennas. High-efficiency and low-error method is used in this research to quantify line edge roughness (LER). Through the photolithography process, the Archimedean spiral antenna is fabricated on the printed circuit board, and the frequency response of the antenna is simulated and measured. The pattern variation, such as bulges and necking, displays the connection between the pattern features and the corresponding electrical properties.
Spiral antennas are designed with different pattern (amplitude) variations as the verification to imitate the process deteriorations. As the amplitude increases, the frequency drifts towards low frequency. Image recognition is used to build relationships in experimental samples with EM response and LER by machine learning. It is possible to establish a method for rapid optical inspection of product quality and to predict the frequency of antennas by machine learning model.

目錄
摘要 I
ABSTRACT II
致謝 III
目錄 IV
圖目錄 VIII
表目錄 XIII
符號表 XIV
第1章 緒論 1
1.1 前言 1
1.1.1 印刷技術 1
1.1.2 邊緣粗糙度之重要性 2
1.1.3 電性與製程的選擇 3
1.2 文獻回顧 4
1.2.1 邊緣粗糙度法 4
1.2.2 步進法 5
1.2.3 高效率低誤差法 5
1.2.4 圖樣變異與電性關係 6
1.3 研究動機 8
第2章 理論與設計 21
2.1 邊緣粗糙度定義 21
2.2 阿基米德螺旋設計 23
2.2.1 天線頻率範圍與尺寸 23
2.2.2 振幅設計 24
2.3 頻率響應之模擬 25
2.3.1 八木─宇田天線模擬 26
2.3.2 螺旋天線模擬 28
2.4 機器學習 29
第3章 實驗製程與方法 42
3.1 實驗流程圖 42
3.2 實驗製程與設備 43
3.2.1 八木─宇田天線 45
3.2.2 螺旋天線 46
3.3 影像處理 47
3.4 計算螺旋天線邊緣粗糙度 48
3.5 量測頻率響應 50
第4章 結果與討論 61
4.1 實作阿基米德螺旋天線影像處理 61
4.2 實作阿基米德螺旋天線邊緣粗糙度 62
4.3 實作量測八木─宇田天線的效率 64
4.4 頻率響應量測結果 66
4.5 機器學習模型結果分析 68
4.5.1 高斯過程迴歸分析 68
4.5.2 預測結果分析 70
第5章 結論 84
第6章 未來工作 86
參考文獻 88
附錄：量測電磁響應流程 92

圖目錄
圖 1 1噴墨印刷(a)在實際線寬間距與理想不同、(b) 35μm墨滴間距、(c)在大線寬間距的限制、(d)在小線寬間距的限制[7] 9
圖 1 2 邊緣粗糙度對電晶體(a)在微觀造成截止電流上升、(b)在巨觀造成閘極電壓上升[9] 10
圖 1 3線寬粗糙度使驅動電流在飽和區與線性區的(a)劣化、(b)變異[10] 11
圖 1 4直線LER計算方法之影像處理(a)8位元影像(b)轉換為單色影像(c)取得輪廓(d)高像素調整(e)低像素調整(f)灰階影像(g)評估LER [2] 12
圖 1 5(a)大、(b)小、(c)不規則曲率半徑轉角之LER的計算[2] 13
圖 1 6螺旋圖案之不同角度LER計算[2] 14
圖 1 7(a)螺旋輪廓(b)步進法可調整步進距離及偵測半徑[3] 15
圖 1 8步進法等角度方式造成參考點間距不同的誤差[3] 16
圖 1 9高效率低誤差法之(a)可調整點密度及(b)線寬計算方式說明[4] 17
圖 1 10螺旋天線不同圈數的頻率響應(a)n=1.0~1.3 (b)n=1.3~1.7 (c)n=1.8~2.1 (d)n=2.1~2.4 [12] 18
圖 1 11螺旋天線的頻率響應(a)不同設計之頻寬、(b)實際量測[13] 19
圖 1 12軟性等角螺旋天線的(a)未施加應力及(b)施加應力之(c)反射係數頻率響應[14] 20
圖 2 1微影製程造成邊緣粗糙(a)光源強度不同(b)光阻不均勻[19] 32
圖 2 2邊緣粗糙度判斷示意圖 33
圖 2 3(a)阿基米德螺旋設計圖及(b)加入的波動振幅 34
圖 2 4波動振幅變異之阿基米德雙臂螺旋(a)B.A.為0 (b)B.A.為0.15 (c)B.A.為0.3 (d)B.A.為0.45 (e)B.A.為0.6(f) B.A.為0.75 35
圖 2 5運用於22-26GHz所設計之八木─宇田天線(a)圖樣設計、(b)模擬與實作S11結果圖[21] 36
圖 2 6所設計運用於2.45GHz之八木─宇田天線(a)圖樣設計、(b)模擬S11結果圖、(c)增益圖 37
圖 2 7不同波動振幅螺旋天線模擬(a)S21結果、(b)峰值位置 38
圖 2 8不同波動振幅螺旋天線電場模擬(a)B.A.為0(b)B.A.為0.15(c)B.A.為0.3(d)B.A.為0.45(e)B.A.為0.6(f)B.A.為0.75 39
圖 2 9不同波動振幅螺旋天線磁場模擬(a)B.A.為0(b)B.A.為0.15(c)B.A.為0.3(d)B.A.為0.45(e)B.A.為0.6(f)B.A.為0.75 40
圖 2 10不同波動振幅螺旋天線電流模擬(a)B.A.為0(b)B.A.為0.15(c)B.A.為0.3(d)B.A.為0.45(e)B.A.為0.6(f)B.A.為0.75 41
圖 3 1實驗流程圖 52
圖 3 2實驗光罩圖(a)八木─宇田天線(b)六種不同波動振幅的螺旋 53
圖 3 3黃光微影製程(a)電路板、(b)曝光、(c)顯影、(d)蝕刻、(e)去除光阻 54
圖 3 4實驗製程(a)顯影系統、(b)蝕刻系統 55
圖 3 5影像拍攝系統(a)架構、(b)拍攝參數 56
圖 3 6影像處理(a)圖形化使用者介面、(b)放大圖 57
圖 3 7輪廓處理(a)完整輪廓、(b)右輪廓 58
圖 3 8邊緣粗糙度校準參考線(a)標準、(b)偏右、(c)偏下、(d)過大 59
圖 3 9量測系統(a)號角天線[28]、 (b)八木─宇田天線、(c)實測圖 60
圖 4 1 (a)阿基米德螺旋天線、(b)八木─宇田天線實驗製作結果 72
圖 4 2雙臂波動振幅螺旋天線B.A.分別為(a)0、(b)0.15、(c)0.3、(d)0.45、(e)0.6、(f)0.75 73
圖 4 3雙臂波動振幅螺旋天線完整輪廓。B.A.分別為(a)0、(b)0.15、(c)0.3、(d)0.45、(e)0.6、(f)0.75 74
圖 4 4雙臂波動振幅螺旋天線邊緣粗糙度分析B.A.分別(a)0的上臂、(b)0.15的上臂、(c)0.3的上臂、(d)0.45的下臂、(e)0.6的下臂、(f)0.75的下臂 75
圖 4 5螺旋天線波動振幅與邊緣粗糙度關係(a)模擬、(b)實測 77
圖 4 6製程變異造成樣品不完美(a)B.A.為0、(b)B.A.為0.6 78
圖 4 7八木─宇田天線(a)座標圖、(b)模擬圖、(c)實測圖 79
圖 4 8八木─宇田天線(a)xy方向模擬、(b)xz方向模擬、(c)yz方向模擬、(d)xy方向實測、(e)xz方向實測、(f)yz方向實測效能圖 80
圖 4 9螺旋天線的結果(a)S21實際量測(b)模擬與實測峰值位置 81
圖 4 10機器學習模型訓練結果(a)邊緣粗糙度與頻率峰值關係圖(b)實測值與預測值關係圖 82
圖 4 11機器學習模型預測結果(a)邊緣粗糙度與頻率峰值關係圖(b)實測值與預測值關係圖 83
表目錄
表4- 1雙臂波動振幅螺旋天線邊緣粗糙度模擬分析結果 76

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