相對於傳統接觸式軸承，液靜壓軸承透過軸體與軸承面的高壓油膜來提供承載所需要的剛性，也作為軸承潤滑的來源。而液靜壓軸承有著高剛性、高承載力、低磨耗、壽命長等優勢，在精密加工產業的應用上具有很高的潛力。但因為液靜壓軸承可能因為外部負載改變、不平均，甚至是潤滑油在不同溫度下所產生的黏度改變，導致油膜厚度的變化，進而影響剛性或是加工的精準度。雖然液靜壓軸承可藉由安裝節流器，達到壓力調節的效果，但因為並不是主動式的機制，所能調節的範圍仍然有限。
本研究與上銀科技合作開發主動式液靜壓滑軌，將液靜壓滑軌的構型與控制系統的概念結合，透過渦電流感測器偵測油膜厚度的變動，並以主動式的油壓比例閥，調節腔壓，提供額外的壓力平衡外部負載的改變，使油膜厚度能維持在定值，以達到穩定的軸承性能以及加工精準度。首先將液靜壓滑軌進行建模，並以此為基礎，設計控制器，透過軟體分析，先行預測此系統的控制性能。再來則進行實驗的架設，透過實際測試，確定此系統能滿足原先所設定目標，在不同的軸承負載下，油膜厚度皆能維持在設計值，並持續優化性能，未來則能將此系統持續擴展到液靜壓滑軌平台。

Compared with traditional ball bearings, hydrostatic bearings rely on a thin film of high pressurized oil to provide stiffness, supporting force and lubrication. Based on this feature, hydrostatic bearings have the advantages of high stiffness, high load capacity, low friction and long service life, which lead to high potential for adoption in ultra-precision machining. However, there are still limitations in the performance of hydrostatic bearings. The oil film thickness might vary under some unstable operating conditions such as changes in bearing load and oil viscosity, which would affect the manufacturing accuracy. Although lots of researches have been worked showing that hydrostatic bearings could be used alongside restrictors to regulate the recess pressure under varying bearing load, the regulating range is still limited due to the fact lacking active devices.
This study proposes a new active hydrostatic bearing linear guideway, combining the original linear guideway design with the concept of closed-loop control. By using the eddy current signal as the feedback signal and the pressure valve as the actuator, the oil film thickness can be detected and then compensated through the extra supporting force provided by the valve to maintain the constant oil film thickness. The performance of this control system was verified through both analytical and experimental processes in this research work.

摘要 I
Abstract II
目錄 III
圖目錄 V
表目錄 X
第一章 序論 1
第二章 文獻回顧 8
2.1液靜壓軸承工作原理 8
2.2薄膜式節流器 11
2.3 壓電材料於比例閥系統之應用 12
2.4 油膜厚度控制之控制演算法比較 15
2.5 結語 17
第三章 研究方法與步驟 18
3.1 液靜壓軸承基本理論公式 18
3.2 薄膜式節流器流阻與膜片變形之關係 21
3.3 控制系統架構 23
3.4 PID控制器與驅動電路原理 28
第四章 控制器設計流程與性能模擬 36
4.1油壓比例閥作動原理及調整範圍分析 36
4.2受控場系統辨識 43
4.3控制器參數設計 47
4.4油膜厚度補償模擬 54
4.5受控場條件變動對於控制性能影響探討 58
4.6驅動電路性能分析 71
第五章 液靜壓線性滑軌油膜厚度控制實驗 75
5.1實驗架設 75
5.2驅動電路性能實測 77
5.3壓電致動器測試 80
5.4油膜厚度控制實驗之性能實測 85
第六章 結論 96
6.1研究成果 96
6.2未來展望 98
參考文獻 100

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