液靜壓軸承有著高剛性、高承載力及低磨耗等優勢，但其可能會因外部負載改變而導致油膜厚度發生變化，進而影響加工精度。雖然液靜壓軸承可藉由安裝節流器達到調壓之效果，但其調節範圍仍然有限。
本研究與上銀科技合作進行液靜壓線性滑軌之性能優化，其優化重點為將原先分離式油腔塊更改為一體成形設計，採用不同油墊角度配置並搭配孔口節流器補償。依性能需求調整模擬程式及設計參數選用，接著設計相關實驗驗證其滑塊模組在高油壓、高負載下之性能表現，最後將實驗數據與模擬結果做比較並分析其誤差原因。
除了優化滑塊性能，本研究亦開發一套能調節腔壓，提供額外壓力平衡外部負載，並與控制系統做整合，使滑塊油膜維持在一設定高度之主動式液靜壓線性滑軌模組，進而達到穩定的滑塊性能及提升加工精度。本研究將市售電液比例控制閥及自行開發之可控式流阻節流器，利用理論模型模擬其性能表現，選擇適當的設計參數，並根據上銀科技提供的線性軌道，設計出符合規格需求之滑塊。其中，可控式流阻節流器是採用壓電驅動器取代原先薄膜式節流器內中的金屬膜片，利用壓電材料的位移控制節流面間隙，以改變節流器流阻獲得不同油腔壓力。接著進行相關實驗，並將實驗與模擬結果做比較，過程中持續優化設計參數提升其滑塊性能，期盼未來能將此模組擴展至液靜壓滑軌平台。

Hydrostatic bearing has the advantages of high stiffness, high bearing capacity and low wear. However, due to the external load, the oil film thickness may change, thereby affecting the machining accuracy. Although the recess pressure of hydrostatic bearing can be adjusted by installing a restrictor, its adjustment range is still limited.
This research cooperated with HIWIN Technologies Corp. to optimize the hydrostatic linear guideway. The optimization focus on changing the original separate oil recess block to a one-piece design, adopting different oil pad angle configurations and matching orifice restrictor compensation. Due to the performance requirements, we adjust the simulation program and design parameter. Then, we design the related experiments to verify the performance of the guideway module under high oil pressure and high load condition. At the end, we compare the experimental results with the simulation results and analyze the causes of errors.
In addition to optimizing the performance of the guideway, this research also developed an active hydrostatic linear guideway module that can adjust the cavity pressure, provide additional pressure to balance the external load, and integrate with the control system to maintain the guideway oil film at a stable height, to achieve stable guideway performance and improve machining accuracy. In this research, the commercially electro-hydraulic proportional control valve and the self-developed controllable flow resistance restrictor are used to simulate their performance. According to the requirements of HIWIN Technologies Corp., we select a suitable design parameter, and do simulation through a theoretical model. Besides, the controllable flow resistance restrictor is using a piezoelectric actuator to replace the metal diaphragm in the original membrane restrictor. Through the displacement of the piezoelectric material, it may change the gap of the restrictor surface to control the flow resistance of the restrictor and the recess pressure. Then, carry out related experiments and compare the experiment result with the simulation result. In the process, the design parameters are continuously optimized to improve the performance of the hydrostatic linear guideway. In the future, hope that this module can be extended to the hydrostatic guideway platform.

第一章 序論 1
第二章 文獻回顧 8
2.1 液靜壓軸承工作原理 8
2.2 節流器種類 11
2.2.1 毛細管節流器及孔口節流器 11
2.2.2 薄膜式節流器 13
2.3 壓電材料應用於節流器之相關研究 18
2.4 常見閥門之構型 21
2.5 結語 23
第三章 研究方法與步驟 24
3.1 雙斜度液靜壓線性滑軌 25
3.2 主動式液靜壓線性滑軌 27
3.3 軸承參數推導 31
3.3.1 雷諾方程式 31
3.3.2 有限差分法 36
3.3.3 邊界條件及求解 39
3.4 節流器與軸承性能 40
3.5 節流器參數 41
3.5.1 薄膜式節流器 41
3.5.2 孔口節流器 44
3.5.3 毛細管節流器 46
3.6 毛細管節流器修正理論公式 48
3.7 雙斜度液靜壓線性滑軌性能分析 55
3.8 主動式液靜壓線性滑軌搭配電液比例控制閥及可控式流阻節流器之性能分析 57
3.8.1 搭配電液比例控制閥之液靜壓模組 57
3.8.2 搭配可控式流阻節流器之液靜壓模組 59
第四章 性能模擬與理論驗證 62
4.1 雙斜度液靜壓線性滑軌性能模擬 62
4.1.1 雙斜度滑塊油墊尺寸及設計參數 63
4.1.2 性能模擬結果 64
4.2 搭配電液比例控制閥之液靜壓滑軌模組性能模擬 69
4.2.1 主動式滑塊油墊尺寸 72
4.2.2 主動式滑塊設計參數 73
4.2.3 性能模擬結果 75
4.2.4 毛細管節流器設計參數 77
4.2.5 電液比例控制閥前端之節流器 78
4.3 搭配可控式流阻節流器之液靜壓滑軌模組性能模擬 84
4.3.1 主動式滑塊油墊尺寸設計及上油墊流阻計算 85
4.3.2 可控式流阻節流器設計參數 86
4.3.3 壓電驅動器工作原理 86
4.3.4 性能模擬結果 87
4.3.5 毛細管節流器設計參數 91
第五章 液靜壓線性滑軌性能實驗 92
5.1 雙斜度液靜壓線性滑軌性能實驗 92
5.1.1 油品黏度實驗 93
5.1.2 孔口節流器流阻實驗 94
5.1.3 雙斜度滑塊油膜加工間隙實測 96
5.1.4 雙斜度滑塊高負載實驗 99
5.1.5 雙斜度滑塊剛性實驗 103
5.2 主動式液靜壓線性滑軌模組性能實驗 103
5.2.1 油品黏度實驗 104
5.2.2 毛細管節流器流阻實驗 105
5.2.3 主動式滑塊油膜加工間隙實測 106
5.2.4 主動式滑塊負載實驗 109
5.2.5 剛性實驗 115
5.2.6 提升滑塊剛性實驗 116
第六章 結論 123
6.1 研究成果 123
6.1.1 雙斜度液靜壓線性滑軌優化研究重點 123
6.1.2 主動式液靜壓線性滑軌模組開發研究重點 124
6.2 未來展望 126
附錄 127
附錄A 127
參考文獻 129

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