隨著智慧化產業的日益發展，智慧型手機鏡頭、無人車用感測器、AR擴增實境、物聯網應用等等，無一不與光學透鏡有所連結。 然而高價值之光學鏡頭所要求的鏡片表面品質高，尤其在研拋製程之規格要求往往是各大製造商難以跨越的難題。 本研究利用超低色散透鏡(Extra-low dispersion lens, ED lens)原料S-FPL51玻璃測試研拋加工製程，其材質具有高阿貝數、低色散率的優良光學性質。 然而S-FPL51玻璃透鏡材料，因硬度低易磨耗等機械性質使其在研拋加工困難，容易有刮痕產生且難以掌握其面型精度，缺乏一套有效的標準作業程序。
本研究利用反應曲面法所建立的模型與聲發射訊號對材料破壞的高敏感性，建立一較為完善的透鏡研拋製程。 在量測得原始透鏡的曲率後，藉由反應曲面法的模型獲得相應的製程決策參數，將透鏡研拋至符合曲率規格。 待符合曲率規格後，仍需固定該製程參數並持續研拋，以移除透鏡表面的刮痕損傷層。 在移除刮痕損傷層的同時須注意透鏡的材料移除，倘若移除過多材料，將導致透鏡厚度不足而超出規格。 因此本研究利用聲發射訊號對材料移除的高敏感性及其他製程因子如研拋壓力、研磨頭轉速等建立線上材料移除率（Material removal rate, MRR）評估模型。 在移除透鏡表面損傷層的同時，依據研拋期間的聲發射訊號作材料移除的線上評估。 研究結果指出，透鏡曲率的製程決策模型R^2有83.1%，且能將研拋時間縮短至多66%；透鏡材料移除率模型的R^2有91.5%，可作為線上材料移除評估的根據。
綜合上述，本研究針對曲率精度不足之透鏡快速找到相應的製程決策，並以線上材料移除率模型評估每次製程透鏡的材料移除，縮短加工進行時間以解決高精度光學透鏡完全仰賴人工經驗技術之瓶頸。







關鍵字：超低色散透鏡、研拋、聲發射、移除率

With the rapid development of intelligent industry, smart mobile phone lens, automatic guided vehicle sensors, augmented reality, applications of Internet of Things, etc. are all connected with optical lens. However, high surface quality is required in high valued optical lens, especially in the specification requirements of grinding-polishing process which are usually hard for most manufacturers to overcome. In this study, S-FPL51, a raw material of extra-low dispersion (ED) lens, is used. S-FPL51 exhibits extraordinary optical properties such as high Abbe numbers and low dispersion rate. Nevertheless, S-FPL51 is difficult to grinding-polish due to its low hardness and high wear abrasion. Therefore, it’s not only problematic to control the surface precision, such as lens curvature and lens thickness, but also lacks an effective standard operation procedure.
In this thesis, comparing to traditional grinding-polishing process, a more comprehensive grinding-polishing process is established by using the manufacturing parameters model derived from the response surface methodology and the high sensitivity of acoustic emission (AE) signals to material removal. After the curvature of originals lens is measured, the corresponding grinding-polishing parameters are obtained from the manufacturing parameters model, then the lens is grinding-polished to meet the curvature specification. After the curvature specification is met, subsequently grinding-polishing process with fixed manufacturing parameters should be carried out to remove the scratch damaged layer on the lens surface. While removing the scratch damaged layer, it should be careful on the material removal of the lens. If too much material is removed, the lens thickness will be out of the specification. Therefore, in this work, the high sensitivity of AE signals to material removal and other grinding-polishing parameters such as polishing pressure and rotational speed of polishing head are used to establish the on-line material removal rate (MRR) estimation model. When removing the damaged layer on the lens surface, the material removal of the lens could be evaluated according to the manufacturing parameters and AE signals during the grinding-polishing process. The results show that the R^2 of curvature manufacturing parameters model is 83.1%, and it can also shorten the grinding-polishing time by up to 66%; the R^2 of lens material removal rate model is 91.5%, which can be used as the basis for on-line material removal estimation.
To sum up, in order to solve the bottleneck of manufacturing high-precision optical lens always relying on rule of thumb, a manufacturing parameters model, whose R^2 is up to 83.1%, is adopted to accelerate the process of finding grinding-polishing parameters, and also shorten the processing time by up to 66%. Besides, several material removal rate models, whose R^2 is up to 91.5%, are established to on-line estimate the material removal of each grinding-polishing process.










Keywords: Extra-low dispersion lens, grinding-polishing, acoustic emission, material removal rate

目錄
摘要------------------------------------------- I
Abstract--------------------------------------- III
第一章 序論----------------------------------- 1
第二章 文獻回顧-------------------------------- 5
2-1 透鏡材料移除機制------------------------ 5
2-1.1 化學機械拋光的基本機制------------------- 5
2-1.2 機械拋光的基本機制---------------------- 7
2-2 聲發射原理及應用------------------------ 8
第三章 研究方法與步驟-------------------------- 22
3-1 研拋製程中的可控參數-------------------- 22
3-2 實驗設計與實驗步驟---------------------- 24
3-3 實驗設備與架設-------------------------- 31
第四章 研拋機構設計與模擬---------------------- 39
4-1 研拋機構設計---------------------------- 39
4-2 研拋機構變形模擬------------------------ 44
第五章 實驗結果與模型建立---------------------- 51
5-1 製程參數與材料移除量的關係--------------- 51
5-2 製程參數與工件曲率變化的關係------------- 57
5-3 製程參數與聲發射訊號的關係--------------- 64
5-3.1 製程參數與鼻形聲發射訊號的關係----------- 64
5-3.2 製程參數與水聽器聲發射訊號的關係--------- 69
5-3.3 小結----------------------------------- 77
5-4 材料移除率模型的建立-------------------- 78
5-4.1 Preston研拋材料移除率模型--------------- 78
5-4.2 線性回歸材料移除率模型------------------- 79
5-4.3 基於Preston的聲發射研拋材料移除率模型---- 80
第六章 結論----------------------------------- 83
參考文獻---------------------------------------- 87

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