本研究利用TSMC所提供之 0.18 μm 1P6M CMOS製程平台，將三種(溫度、濕度、壓力)感測單元製作在單一晶片上，整合出環境感測單元。此晶片主要以濕度感測元件為出發點，利用雙面CMOS後製程針對濕度感測元件的結構進行設計，主要會對反應時間進行改善，並且透過CMOS平台實現單晶整合壓力與溫度感測元件。而雙面CMOS後製程可以同時製作出濕度與壓力元件的背腔製作，且感濕材料選擇與CMOS製程相容性較高的聚酰亞氨高分子材料，而對於濕度計的背腔設計進而使水氣反應時間大幅縮短，並設計一套完善的製程流程融入溫度與壓力感測元件，整合成環境感測單元。
而元件成功製作後，將獨立量測各感測元件，從本研究量測結果可得知，利用指叉狀電極並掏空元件背腔的濕度感測器，將縮短五倍的反應時間，且感濕材料擁有良好的穩定性，而各感測器雖然會發生相互干擾的情況，我們仍可利用二極體溫度計進行溫度校正。由此研究可知單晶整合環境感測單元已成功地被實現在CMOS平台上。

This research reports a monolithically integrated Humidity/Thermometer/Pressure sensor to realize an environment sensing hub. The environment sensing hub is designed and implemented using the TSMC 0.18μm 1P6MCMOS platform and the follow-up double-side post-CMOS micromachining processes. Monolithic integration of H/T/P sensors on a single chip has small footprint with less packaging effort. Furthermore, double-side post-CMOS process can simultaneously fabricate backside cavities for H/P sensors, and removal of backside silicon by double-side post-CMOS process can enhance vapor diffusion of capacitive RH sensor. Therefore, the response time of relative-humidity (RH) sensor is fast.
After the environmental chip is realized, all of environment test will be measured separately. From the measurement result, the environment sensor has good performance in signal, even humidity sensor has near 5-fold enhancement. In addition, humidity sensing materials, PI, have the advantage of good stability. It can be seen that the environmental sensing hub has been successfully implemented on the CMOS platform.

摘要 I
Abstract II
誌謝 III
目錄 VI
圖目錄 IX
表目錄 XIII
第1章 緒論 1
1-1 前言 1
1-2 文獻回顧 6
1-2-1 相對濕度感測機制分類 7
1-2-2 電容式濕度感測材料介紹 11
1-2-3 CMOS-MEMS後製程 14
1-3 研究動機與目標 15
第2章 元件設計與分析 30
2-1 TSMC 0.18µm 1P6M CMOS 製程平台 30
2-2 電容式濕度感測原理 31
2-2-1 電容式溼度計靈敏度與初始電容 31
2-2-2 濕度計反應時間 34
2-3 電容式壓力感測原理 35
2-4 二極體式溫度感測原理 36
2-5 元件設計與模擬 37
2-5-1 元件結構設計 38
2-5-2 元件性能模擬 39
第3章 光罩布局與後製程結果 45
3-1 溫濕壓元件結構佈局 45
3-2 CMOS 晶片後製程 46
3-3 後製程結果 49
第4章 初步量測結果與討論 62
4-1 濕度感測元件性能量測 62
4-1-1 濕度計靈敏度量測 62
4-1-2 濕度計反應時間量測 64
4-1-3 空氣與感濕材料性能比較 65
4-1-4 感濕材料選擇性量測 66
4-1-5 感濕材料穩定性量測 66
4-2 壓力感測元件性能量測 67
4-3 溫度感測元件量測 68
4-4 感測元件串擾量測 69
4-4-1 在壓力/溫度變化下濕度元件性能 69
4-4-2 在濕度/溫度變化下壓力元件性能 70
4-4-3 在濕度/壓力變化下溫度元件性能 71
第5章 結論與未來工作 87
5-1 結論 87
5-2 未來工作 88
參考文獻 92

[1] P. Wiederhold, "The Principles of Chilled Mirror Hygrometry," Sensors Magazine, vol. 17, pp. 46-51, July 2000.
[2] D. K. Roveti, "Choosing a Humidity Sensor: A Review of Three Technologies," Sensors -The Journal of Applied Sensing Technology, vol. 18, pp. 54-58, 2001.
[3] M. Kimura, Absolute-humidity sensing independent of the ambient temperature, In Sensors and Actuators A: Physical, Volume 55, Issue 1, Pages 7-11, 1996.
[4] J. Fraden (2010) Humidity and Moisture Sensors. In: Handbook of Modern Sensors. Springer, New York, NY.
[5] Z. Li, H. Zhang, W. Zheng, W. Wang, H. Huang, C. Wang, A. G. MacDiarmid, and Y. Wei, “Highly Sensitive and Stable Humidity Nanosensors Based on LiCl Doped TiO2 Electrospun Nanofibers,” Journal of the American Chemical Society, 130, pp. 5036-5037, 2008.
[6] C.-L. Dai, M.-C. Liu, F.-S. Chen, C.-C. Wu, and M.-W. Chang, “A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique,” Sensors and Actuators B: Chemical, 123, pp. 896-901, 2007.
[7] P.-G. Su, C.-J. Ho, Y.-L. Sun, and I. C. Chen, “A micromachined resistive-type humidity sensor with a composite material as sensitive film,” Sensors and Actuators B: Chemical, 113, pp. 837-842, 2006.
[8] C.-D. Feng, S.-L. Sun, H. Wang, C. U. Segre, and J. R. Stetter, “Humidity sensing properties of Nation and sol-gel derived SiO2/Nafion composite thin films,” Sensors and Actuators B: Chemical, 40, pp. 217-222, 1997.
[9] J. Wang, B. Xu, J. Zhang, G. Liu, T. Zhang, F. Qiu, and M. Zhao, “Humidity sensors of composite material of nanocrystal BaTiO3 and polymer (R)nM+X−,” Journal of Materials Science Letters, 18, pp. 1603-1605, 1999.
[10] S. Chatzandroulis, A. Tserepi, D. Goustouridis, P. Normand, and D. Tsoukalas, “Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor,” Microelectronic Engineering, 61–62, pp. 955-961, 2002.
[11] C.-Y. Lee and G.-B. Lee, “Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation,” Journal of Micromechanics and Microengineering, 13, pp. 620-627, 2003.
[12] V.K. Khanna, R.K. Nahar, Effect of moisture on the dielectric properties of porous alumina films, In Sensors and Actuators, Volume 5, Issue 3, Pages 187-198, 1984.
[13] Y. Kim, B. Jung, H. Lee, H. Kim, K. Lee, and H. Park, "Capacitive humidity sensor design based on anodic aluminum oxide," Sensors and Actuators B: Chemical, 141, pp 441-446, 2009.
[14] C.-L. Hsieh, P.-H. Lo, and W. Fang, “Dual-layer nanoporous anodic aluminum oxide with embedded electrodes for capacitive relative
humidity sensor,” in TRANSDUCERS & EUROSENSORS XXVII, pp. 2572-2575, 2013.
[15] https://www.nasa.gov/topics/technology/features/aerogels.html
[16] V. P. J. Chung, C.-L. Cheng, M.-C. Yip, and W. Fang, “A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement,” in IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 767-770, 2015.
[17] T. Boltshauser and H. Baltes, “Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimide,” Sensors and Actuators A: Physical, 26, pp. 509-512, 1991.
[18] T. Boltshauser, C. Azeredo Leme, and H. Baltes, "High sensitivity CMOS humidity sensors with on-chip absolute capacitance measurement system," Sensors and Actuators B: Chemical, 15, pp 75- 80, 1993.
[19] U. Kang and K. D. Wise, "A high-speed capacitive humidity sensor with on-chip thermal reset," in IEEE Transactions on Electron Devices, vol. 47, no. 4, pp. 702-710, Apr 2000.
[20] H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, and O. Tabata, CMOS-MEMS: Advanced Micro and Nanosystems: John Wiley & Sons, 2008.
[21] O. Brand, “Fabrication Technology,” in CMOS—MEMS, ed: Wiley-VCH Verlag GmbH, pp. 1-67, 2008.
[22] G. K. Fedder, “CMOS-based sensors, ” in IEEE Sensors, pp. 125-128, 2005.
[23] M. J. Lee, J. S. Kim, K.-Y. Kwak, N. K. Min, “Micromachining of Multilayer Thin Films for High-Speed Humidity Sensor Fabrication,”Japanese Journal of Applied Physics, Volume 48, Number 8S1, 2009.
[24] C. H. Chen, C. Y. Lee, S. M. Kuo and C. H. Lin, "High performance Humidity Sensor Based on Deliquescent Salt Diffused PI Film," 2006 5th IEEE Conference on Sensors, pp. 956-959, 2006.
[25] C. L. Dai and D. H. Lu, "Fabrication of a micro humidity sensor with polypyrrole using the CMOS process," 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, pp. 110-113, 2010.
[26] J. B. Hasted, Aqueous Dielectrics. London, UK: Chapman and Hall, 1973.
[27] Y.-C. Liu, C.-M. Sun, L.-Y. Lin, M.-H. Tsai, and W. Fang, "Development of a CMOS-Based Capacitive Tactile Sensor With Adjustable Sensing Range and Sensitivity Using Polymer Fill-In," Journal of Microelectromechanical Systems, 20, pp 119-127, 2011.
[28] H. Looyenga, “Dielectric constants of heterogeneous mixtures,” Physica, 31, pp. 401-406, 1965.
[29] H. Shibata, M. Ito, M. Asakursa, and K. Watanabe, "A digital hygrometer using a polyimide film relative humidity sensor," IEEE Transactions on Instrumentation and Measurement (TIM), 45, pp 564-569, 1996.
[30] N. Lazarus and G. K. Fedder, “Designing a robust high-speed CMOS-MEMS capacitive humidity sensor,” Journal of Micromechanics and Microengineering, 22, p. 085021, 2012.
[31] M. Mansoor, I. Haneef, S. Akhtar, A. De Luca, and F. Udrea, “Silicon diode temperature sensors—A review of applications,” Sensors Actuators A, vol. 232, pp. 63-74, 2015.
[32] M.-H. Tsai, C.-M. Sun, Y.-C. Liu, C. Wang, and W. Fang, “Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors,” Journal of Micromechanics and Microengineering, 19, p. 105017, 2009.
[33] https://www.consumerreports.org/cro/smartwatch/buying-guide
[34] https://www.postscapes.com
[35] http://www.cwb.gov.tw/V7/knowledge/encyclopedia/in009.htm
[36] http://www.esa.int/spaceinimages/Images
[37] https://catalogue.museogalileo.it/object
[38] http://www.senyao1718.com/Article/gsqwdjjcgs.html
[39] https://www.bosch-sensortec.com