對於切削刀具及機器零件，硬質保護薄膜扮演著極其重要的角色。高熵合金薄膜及其氮化膜因具備許多良好的特性，例如高硬度、良好的耐磨耗性以及抗氧化性等特性，因此，近年來被廣泛研究。本研究主要是探討四種不同組成成分的鉭系高熵合金(AlCrTaTiZr、HfNbTaTiZr、MoNbTaTiZr及Al2Cr2HfMoNbTa) 及其氮化物薄膜的成分、微結構、機械性質、界面附著能力、抗氧化、耐磨耗性質及抗沾黏能力。實驗發現隨著氮氣流量比例 (RN) 增加，從高熵合金薄膜變為高熵合金氮化膜時，結構均轉變為FCC結構；機械性質在RN =30 %時均能達到約30 GPa。於抗氧化方面，含有Al和Cr元素的高熵合金氮化物薄膜的抗氧化溫度能達到600°C。此外，對於磨耗性質而言，透過Mo元素的添加，使氮化膜的摩擦係數顯著下降，能有效提升耐磨耗性質。

Multi-component alloy and nitride coatings have been developed to improve the mechanical performance, thermal stability and wear/oxidation resistance of protective hard coatings. High-entropy coatings with a simple solid-solution structure have particularly attracted great interest in recent years. In this study, several coatings of Ta-based AlCrTaTiZr, HfNbTaTiZr, MoNbTaTiZr, Al2Cr2HfMoNbTa high-entropy alloys and nitrides were deposited using a single-target sputtering system in an N2/Ar mixed atmosphere. The microstructures, mechanical properties, oxidation behaviors, wear resistance and anti-sticking properties of these coatings were studied by the XRD, SEM, scratch, nanoindentation, wear tester and anti-sticking tester. With the increase of the N2 flow rate, these coatings’ structure transform to a face-centered-cubic (FCC) structure. When the RN =30 %, the hardness of these films reach nearly 30 GPa. Their oxidation behaviors of these coatings were almost fully oxidized and became quite porous and loose at annealing temperature to 700°C. Meanwhile, incorporation of Mo is intended to exhibit the low friction coefficient and superior wear resistance.

摘要 I
Abstract II
目錄 III
圖目錄 VII
表目錄 XIX
誌謝 1
壹、前言 2
貳、文獻回顧 3
2-1硬質薄膜 3
2-1-1硬質薄膜發展 3
2-1-2奈米尺度疊層/超晶格薄膜 5
2-1-3奈米複合薄膜 9
2-1-4多元硬質薄膜 12
2-2高熵合金 15
2-2-1高熵效應 15
2-2-2高熵硬質薄膜 16
2-3硬質薄膜特性表現 23
2-3-1耐高溫與抗氧化薄膜 23
2-3-2耐磨耗薄膜 37
2-4元素組成成分的貢獻 49
2-4-1 Al元素 49
2-4-2 Cr元素 50
2-4-3 Hf元素 51
2-4-4 Mo元素 54
2-4-5 Nb元素 56
2-4-6 Ta元素 58
2-4-7 Ti元素 60
2-4-8 Zr元素 62
2-5研究目的 64
參、實驗步驟 65
3-1實驗規劃 65
3-2實驗步驟 66
3-2-1 各成分把材製備 66
3-2-2 基板準備 68
3-2-3 AlCrTaTiZr、HfNbTaTiZr、MoNbTaTiZr及Al2Cr2HfMoNbTa -Nx薄膜沉積 68
3-2-4微結構、表面形貌與化學成分 70
3-2-5 機械性質量測 72
3-2-6界面附著強度量測 74
3-2-7 抗氧化能力測試 74
3-2-8耐磨耗能力測試 76
3-2-9 XPS分析 76
肆、結果與討論 78
4-1鋁鉻鉭鈦鋯氮化物 (AlCrTaTiZr-Nx) 薄膜之研究 78
4-1-1 AlCrTaTiZr-Nx 薄膜基本性質分析 78
4-1-2 AlCrTaTiZr-Nx 薄膜奈米機械性質分析 80
4-2 鉿鈮鉭鈦鋯氮化物 (HfNbTaTiZr-Nx) 薄膜之研究 85
4-2-1 HfNbTaTiZr-Nx 薄膜基本性質分析 85
4-2-2 HfNbTaTiZr-Nx薄膜奈米機械性質分析 87
4-3 鉬鈮鉭鈦鋯氮化物 (MoNbTaTiZr-Nx) 薄膜之研究 92
4-3-1 MoNbTaTiZr-Nx薄膜基本性質分析 92
4-3-2 MoNbTaTiZr-Nx 薄膜奈米機械性質分析 93
4-4 鋁鉻鉿鉬鈮鉭氮化物 (Al2Cr2MoNbTa-Nx) 薄膜之研究 99
4-4-1 Al2Cr2MoNbTa-Nx薄膜基本性質分析 99
4-4-2 Al2Cr2MoNbTa-Nx 薄膜奈米機械性質分析 101
4-5薄膜界面附著強度分析 106
4-6 薄膜抗氧化性分析 110
4-6-1鋁鉻鉭鈦鋯氮化物 (*N30) 薄膜 110
4-6-2鉿鈮鉭鈦鋯氮化物 (*N30) 薄膜 111
4-6-3鉬鈮鉭鈦鋯氮化物 (*N30) 薄膜 112
4-6-4鋁鉻鉿鉬鈮鉭氮化物 (*N30) 薄膜 113
4-7 薄膜室溫磨耗性質分析 132
4-8薄膜之XPS分析 141
伍、結論 147
陸、參考文獻 148

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