本實驗以晶圓尺寸合成修飾有金與銅氧化物的氧化鋅奈米複合材料，目的在於批量生產具氣體感測試片；此外也使用製作的試片進行臭氧氣體感測，並與二氧化氮進行比較，以探討修飾物對氣體感測結果的影響。
實驗首先在鍍有電極圖案的四吋晶圓上，使用低溫水熱法成長氧化鋅奈米柱並進行退火，接著利用光沉積法將金奈米粒子及銅氧化物修飾於氧化鋅奈米柱上，再將合成的複合材料製作成氣體感測晶片。
藉由掃描式電子顯微鏡觀察材料表面形貌，氧化鋅為直徑約100 nm的六角柱；在進行光沉積法修飾後，金／氧化鋅在奈米柱表面出現粗糙的顆粒狀結構，銅氧化物／氧化鋅的表面分散分布著數百奈米大小的顆粒，銅氧化物／金／氧化鋅在奈米柱頂端包覆著銅氧化物顆粒，金／銅氧化物／氧化鋅在銅氧化物顆粒上出現細小的顆粒。
使用以上材料分別在100 ppb的臭氧及二氧化氮環境中進行紫外光活化的氣體感測。結果顯示退火會大幅降低氧化鋅試片對臭氧及二氧化氮的響應，在進行修飾後，金／氧化鋅在臭氧及二氧化氮的響應有相似幅度的提升，銅氧化物／氧化鋅對於臭氧響應僅有少量的提升，對二氧化氮響應則有大幅的提升；銅氧化物／金／氧化鋅在二氧化氮響應上同樣有高於臭氧響應的提升，金／銅氧化物／氧化鋅則展現出提高的臭氧響應，以及下降的二氧化氮響應。
本實驗將過去少量合成材料的方式擴展為在四寸晶圓上的合成，成功進行感測試片的大面積合成；也在臭氧及二氧化氮的氣體感測結果中，觀察到修飾物除了造成響應的提升，也會對選擇性造成影響。

In this work, the nanocomposite materials based on Au and CuxO modified ZnO nanorods were synthesized in 4-inch wafer scale for the batch production of gas sensing chips. We used the synthesized sensing chips to do ozone and nitrogen dioxide gas sensing, to discuss the effects of the additives on sensing properties.
Zinc oxide nanorods were grown by a hydrothermal method on a 4-inch wafer with electrode patterns. After the annealing process, Au and CuxO were added on the surface of zinc oxide nanorods by photodeposition processes.
The morphologies of the materials were observed by the scanning electron microscope. The results showed that ZnO were hexagonal rods with a diameter around 100 nm. After the photodeposition processes, Au/ZnO showed rough structure on the nanorods and CuxO/ZnO showed randomly distributed submicron particles. CuxO/Au/ZnO showed particles on the tips of the nanorods and Au/CuxO/ZnO showed small particles on the CuxO particles.
The gas sensing experiments with 100 ppb ozone and nitrogen dioxide were done under UV activation mode. The results showed that annealing process reduced the response of ZnO. Au/ZnO* showed similarly increased responses for both ozone and nitrogen dioxide. CuxO/ZnO* showed a higher increase in the response for nitrogen dioxide than the increase for ozone. CuxO/Au/ZnO* also showed a large increase in the response for nitrogen dioxide. Au/CuxO/ZnO* showed a increased response for ozone while the response for nitrogen dioxide was decreased.
In conclusion, we successfully synthesized ZnO nanocomposites on 4-inch wafers for the batch production of gas sensing chips. The results of ozone and nitrogen dioxide gas sensing showed the additives can increase the sensing responses and cause the change in selectivity to different gases.

中文摘要 i
Abstract iii
致謝 v
總目錄 vi
圖目錄 ix
表目錄 xi
第一章 緒論 - 1 -
1.1 前言 - 1 -
1.2 研究背景 - 2 -
1.3 研究動機 - 5 -
第二章 文獻回顧 - 7 -
2.1 金屬氧化物氣體感原理 - 7 -
2.1.1 氣體吸附 - 7 -
2.1.2 氣體脫附 - 10 -
2.1.3 臭氧與二氧化氮的吸脫附反應 - 12 -
2.2 影響氣體感測器靈敏度的因素 - 13 -
2.2.1 材料微結構 - 14 -
2.2.2 材料表面缺陷 - 14 -
2.2.3 摻雜物與異質接面 - 15 -
2.3 氣體感測器的選擇性 - 18 -
2.4 複合材料 - 19 -
2.5 臭氧感測文獻回顧 - 21 -
2.6 氧化鋅簡介 - 22 -
2.6.1 氧化鋅晶體結構 - 22 -
2.6.2 氧化鋅的半導體性質 - 24 -
2.6.3 氧化鋅的光致發光性質 - 25 -
2.6.4 氧化鋅奈米材料成長方法 - 26 -
2.7 複合材料的合成 - 30 -
第三章 實驗流程與儀器 - 33 -
3.1 實驗設計 - 33 -
3.2 材料合成 - 34 -
3.2.1 氧化鋅奈米柱成長 - 34 -
3.2.2 退火熱處理 - 36 -
3.2.3 光還原法修飾 - 36 -
3.3 材料分析 - 37 -
3.3.1 掃描式電子顯微鏡 - 38 -
3.3.2 粉末X光繞射儀 - 38 -
3.3.3 能量色散X射線分析儀 - 38 -
3.3.4 螢光光譜儀 - 38 -
3.4 氣體感測實驗 - 38 -
3.4.1 臭氧感測 - 39 -
3.4.2 二氧化氮感測 - 42 -
第四章 實驗結果與討論 - 45 -
4.1 大面積合成結果 - 46 -
4.2 材料分析 - 47 -
4.2.1 材料形貌 - 48 -
4.2.2 晶體結構 - 53 -
4.2.3 元素組成 - 54 -
4.2.4 光致發光性質 - 56 -
4.3 氣體感測結果 - 58 -
4.3.1 退火前後的差異 - 59 -
4.3.2 二元復合材料的感測結果 - 61 -
4.3.3 三元複合材料的感測結果 - 65 -
4.4 選擇性比較 - 68 -
4.5 文獻比較 - 70 -
第五章 結論 - 71 -
第六章 參考文獻 - 73 -

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