超材料是一種具有特殊且不易於自然界獲得的性質的結構。由於光學超材料在生物感測，生物影像中具有可能的應用，因此近年來有大量的研究學者投入工作於此。在光學區域中，由金屬所構成的超材料，表面電漿子效應扮演特殊的角色。而在此論文中，我們利用超材料以及電漿子的特性，來實現高靈敏度的感測器。
表面電漿共振為存在於金屬與介電層交界面上自由電子的集體震盪行為，由於此現象的共振條件會隨周遭折射率改變，透過共振條件改變，我們可以判斷介電層之折射係數變化。這些介電層的折射係數變化會反映在光譜中，因此可以將表面電漿共振應用在折射係數感測器上。若將尺度縮小至奈米等級的應用，就會進入局部表面電漿共振的領域。局部表面電漿共振具有即時性、無須標定、簡易的量測架設以及不需要耦合等特性，因此在感測方面有很多優勢以及廣泛的應用。
局部表面電漿共振是由奈米尺度的結構進行共振，而這些共振的結果會跟奈米結構有相當大的關聯。會受到奈米結構的大小、形狀、材料以及間距等各種條件的影響。大部分局部表面電漿共振感測器會選用金作為材料，這是因為金擁有很高的穩定性不容易腐蝕或氧化，同時又因為金本身的性質可以使感測器的表現提升。
一般而言，使用局部表面電漿共振的感測器有兩種方式，分別為透過波長變化以及相位變化來量測。近年來，有許多的學者投入有關波長變化的量測，但卻較少人研究如何提升相位量測感測器的效能。相位量測具有其特殊的提升感測器靈敏度的方式，透過其自然產生的相位波形，可以進行更深入的討論和研究。
在此實驗中，我們利用週期性的金屬圓盤結構，在可見光的波段下，可以達到六極的電漿子共振；同時結合我們設計的共光路相位計算方式，可以達到高折射係數的解析結果。相較於其他使用波長偵測法，我們的量測方式可以達到很大的提升。同時，由於多極的電漿子共振模態，可以提供較好的品質因子的共振模式，因此可以提升感測器的靈敏度。在實驗中，我們可以達到175.83 rad/RIU的高靈敏度以及良好的線性關係。這項結果，明顯高於目前其他的研究所可以得到的數字。總結來說，我們透過引入高模態的共振，來使我們局部表面電漿共振的感測器，達到折射係數靈敏度的大幅提升。

In these years, refractive-index sensors based on localized surface plasmonic resonances (LSPRs) have been considerably developed. Since the advantages of label-free, coupler-free, real-time measurement and no complicated measurement setup, LSPRs significantly impact the field of biological sensing. The resonance of LSPR-based sensors are highly influenced by their shape, size, material, inter-particle distance and the refractive index of the environment. Most of the LSPR-based sensor will choose gold to be the material. It is because of the stability and also the low loss for gold that can give the sensor an enhanced performance. Recently, there appeared a variety of methods to promote the sensitivity of the wavelength interrogation, for example, lifting the plasmonic nanostructure with a supporting dielectric layer or introducing Fano resonances with greater quality factors. However, there are only few research about phase interrogation. Phase interrogation has been proposed to enhance the sensitivity of LSPR sensors due to the nature of a rapid phase flip at resonances.
Thus, in this work, to fulfill an ultra-sensitive sensors, we employ the concept of the localized surface plasmon resonance and design a gold nanodisc array resonator. To further enhance its quality factor, we design a nanodisc that supports plasmonic resonances of hexapole modes at visible light region. Combining with the common-path optical system and phase-contrast algorithm to enhance the sensing resolution of refractive index sensor. The sensing resolution is greater than other conventional refractive index sensor.The method to increase the sensibility of the phase-interrogation sensor is to employ higher-order mode resonances. The higher mode resonances allow better sensing capability due to their greater quality factors. The phase change of resonance modes can be sharper with higher quality factor, which help to boost the sensitivity for phase interrogation. The sensor will be investigated under phase interrogation and compare with other LSPR-based resonance sensor to find the enhancement.
In conclusion, we demonstrated a gold nanodisc array resonator which can show high sensitivity of 175.83 rad/RIU. Our result show 10 times higher than other LSPR based phase interrogation senor. Moreover, we can also employ other higher-order mode resonances with different structure design in the future if the sensibility want to be further enhanced.

摘要 I
Abstract III
誌謝 V
Contents VII
List of Figures X
List of Tables XIV
Chapter 1 Introduction 1
Chapter 2 Theory and Literature Review 3
2.1 Surface plasmons 4
2.1.1 Surface plasmon polaritons 4
2.1.2 Surface plasmon resonance sensor 9
Intensity interrogation 12
Angle interrogation 13
Wavelength interrogation 14
Phase interrogation 16
2.2 Localized surface plasmon resonance 19
2.2.1 Mie scattering theory 20
2.2.2 Localized surface plasmon resonance sensor 22
2.3 Multipolar mode enhancement 26
2.4 Motivation 28
Chapter 3 Simulation 30
3.1 Simulation setup 30
3.1.1 Environment setting 30
3.1.2 Device Design 31
3.2 Simulation Results 36
3.2.1 Optimization for Parameters 36
3.2.2 Refractive Index Sensing 42
Chapter 4 Fabrication 49
4.1 Experimental Procedure 49
4.2 E-beam lithography 51
4.3 Physical vapor evaporation (E-gun evaporator) 54
4.4 Fabrication result 57
Chapter 5 Detection 61
5.1 Optical setup of phase interrogation method 61
5.2 Measurement for the sensor 64
5.3 Comparison and improvement 74
Chapter 6 Conclusion 77
Chapter 7 Appendix 79
7.1 Device design 79
7.2 Thickness effect 82
7.3 Angle effect 84
Chapter 8 Reference 87

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