近年來隨著科技的發展，許多劃時代的發明像是無人機、自動駕駛系統及互動式機器人已經對我們的日常生活造成了很大的影響。而上述的這些科技都包含著一個基本但不可或缺的元件:光偵測器。因此，在元件這領域中，光偵測器必定在未來會占有一席之地。目前，無機鹵素鈣鈦礦材料吸引了許多的關注因為他們擁有著令人興奮的潛能來應用在光電元件上。無機鹵素鈣鈦礦材料有許多優異的性質，像是載子遷移率高、擴散路徑長、在可見光波段的吸收率高及吸收光波段與貴金屬的局域表面電漿子共振波長吻合，而這些優勢也使他們成為理想的材料應用在光偵測器上。在本論文中將會探討利用奈米金顆粒局域表面電漿子共振來增益無機鹵素鈣鈦礦材料中的全溴無機鹵素鈣鈦礦米晶體和全碘無機鹵素鈣鈦礦奈米棒形成的異質結構光偵測器的元件性能表現。在形成異質結構和經過局域表面電漿子增益後，局域表面電漿子增益的全溴無機鹵素鈣鈦礦米晶體/全碘無機鹵素鈣鈦礦奈米棒異質結構光偵測器的偵測率、響應度及電流開關比可達1.93 × 1010 Jones、9.71 × 10-4 A/W和1230。
本論文主要分為五章節，第一章是簡介，其內容涵蓋奈米科技的介紹、光偵測器的工作原理、局域表面電漿子共振效應和無機鹵素鈣鈦礦材料的性質。第二章為實驗部分包含實驗步驟及實驗所需之儀器介紹。第三章則為研究數據之結果與討論，在此章節中含有無機鹵素鈣鈦礦的材料分析、元件分析及元件的光電特性量測。第四章為第三章研究結果的總結和結論。最後，第五章則是此研究未來的發展性。

Recently, the cutting-edge technology such as drone, self-driving automobile and robotic have caused a great impact to our daily life. These applications all contain a basic but indispensable component, photodetectors, which act as the bridge connecting the machine to the environment. Hence, the development of a photodetector with high performances is an important issue in the future. Currently, all-inorganic perovskite materials CsPbX3 (X = Cl, Br and I) have attracted a great deal of attentions due to their exciting and promising applications in optoelectronic devices. All-inorganic perovskite materials have the merits of high carrier mobility, long carrier diffusion length, excellent visible light absorption and well overlapping with localized surface plasmon resonance of noble metal nanostructures which make them become the ideal candidates for the photodetectors. Herein, the photodetectors based on CsPbBr3 nanocrystals are designed to form a heterostructure with CsPbI3 nanorods and utilize localized surface plasmon resonance of Au nanoparticles to enhance the device performances. After the formation of heterojunction and localized surface plasmonic enhancement, the detectivity, responsivity and on-off ratio of the Au-CsPbBr3 nanocrystals/CsPbI3 nanorods photodetectors can attain the value of 1.93 × 1010 Jones, 9.71 × 10-4 A/W and 1230, respectively.
In this thesis, five main chapters are presented. The introduction of nanotechnology, mechanisms of photodetector, localized surface plasmon resonance and properties of all-inorganic perovskite materials are discussed in chapter 1. The experimental procedures and experimental equipment are included in chapter 2. The experimental results including the characterization of the perovskite materials and device measurements are discussed in chapter 3. The experimental results are summarized in chapter 4. Finally, the future prospects of this research are discussed in chapter 5.

Acknowledgments.....i
摘要.....ii
Abstract.....iii
Table of Contents.....v
Chapter 1 Introduction.....1
1.1 Overview of Nanotechnology.....1
1.2 Nanostructures.....5
1.2.1 Zero-Dimensional (0D) Nanostructures.....5
1.2.2 Synthesis of 0D Nanostructures.....5
1.2.3 Mechanisms of Forming Uniform Nanocrystals via Hot Injection .....6
1.2.4 One-Dimensional (1D) Nanostructures.....10
1.3 Photodetector.....11
1.3.1 Photoconductive Effect.....12
1.3.2 Photoconductor.....13
1.3.3 Photodiode.....13
1.3.4 Key Parameters in Performances of Photodetector.....14
1.4 Metal-Semiconductor Contact (MS Contact).....17
1.4.1 Ohmic Contact.....18
1.4.2 Schottky Contact.....19
1.4.3 Metal-Semiconductor-Metal Contact (MSM Contact).....20
1.5 Heterostructure.....22
1.6 Plasmonic Properties of Nanomaterials.....24
1.6.1 Overview of Plasmonic Properties of Nanomaterials.....24
1.6.2 Localized Surface Plasmon Resonance (LSPR).....25
1.6.3 Plasmonic Materials.....27
1.6.4 Mechanisms of Plasmon Enhanced Photodetection.....28
1.7 Inorganic Perovskite.....30
1.7.1 Structure of CsPbBr3 and CsPbI3.....30
1.7.2 Properties of CsPbBr3 and CsPbI3.....31
Chapter 2 Experimental Section.....33
2.1 Experimental Procedures.....33
2.1.1 Synthesis of CsPbBr3 Nanocrystals.....33
2.1.2 Synthesis of CsPbI3 Nanorods.....35
2.1.3 Device Fabrication.....36
2.2 Experimental Equipments.....38
2.2.1 Synthesis System of CsPbBr3 NCs and CsPbI3 NRs.....38
2.2.2 Centrifuge.....39
2.2.3 Spin Coater.....40
2.2.4 Three-zone Furnace.....40
2.2.5 Electron Beam Evaporation System.....41
2.3 Characterization Instruments.....43
2.3.1 X-ray Diffractometer (XRD).....43
2.3.2 Scanning Electron Microscope (SEM).....44
2.3.3 Transmission Electron Microscope (TEM).....45
2.3.4 Scanning Probe Microscope (SPM) 47
2.3.5 Photoluminescence Spectroscope (PL).....48
2.3.6 UV-visible Spectroscope (UV-vis) 49
2.3.7 Probe Station and Semiconductor Characterization System.....50
Chapter 3 Results and Discussion.....52
3.1 Characterization of CsPbBr3 Nanocrystals.....52
3.1.1 XRD Analysis.....52
3.1.2 TEM Analysis.....53
3.1.3 PL and UV-visible Absorption Spectra.....54
3.2 Characterization of CsPbI3 Nanorods.....55
3.2.1 XRD Analysis.....55
3.2.2 SEM and EDX Analysis.....55
3.2.3 TEM Analysis.....56
3.2.4 UV-visible Absorption Spectrum.....57
3.3 Characterization of Devices.....58
3.3.1 SEM Analysis of Au Nanoparticles.....58
3.3.2 UV-visible Absorption Spectrum of Au Nanoparticles.....58
3.3.3 Surface and Thickness Analysis of CsPbBr3 NCs Film.....59
3.3.4 SEM Analysis of Interdigitated Electrodes.....61
3.3.5 Band Structure of CsPbBr3 NCs/CsPbI3 NRs Heterojunction.....61
3.3.6 Cross-section TEM Analysis of Devices.....63
3.3.7 Time Correlated Single Photon Counting (TCSPC) Analysis of Device.....64
3.4 Device Measurements.....67
3.4.1 Optoelectronic Properties of Device Based on CsPbBr3 NCs Film .....67
3.4.2 Optoelectronic Properties of Devices Based on CsPbBr3 NCs/CsPbI3 NRs Heterostructures.....71
3.4.3 Optoelectronic Properties of Device Based on Au-CsPbBr3 NCs/CsPbI3 NRs Heterostructure.....73
Chapter 4 Summary and Conclusions.....79
Chapter 5 Future Prospects.....80
5.1 Vertical Photodetector.....80
5.2 Plasmon Enhanced Photodetection with Metal Nanostructure Arrays .....81
References.....82

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