本文提出生物感測器系統和有限元素數值模型，利用剪切式表面聲波(Shear Horizontal Mode Surface Acoustic Wave, SH-SAW)原理研究高靈敏的感測器。將模擬結果與實驗結果進行比較，討論感測器靈敏度並建立半經驗模型來預測生物分子轉鐵蛋白受體(transferrin receptor, CD71)的濃度對感測器響應。
利用有限元素分析法模擬感測器特性。得知在頻域研究分析中，透過模擬和量測發現中心頻率分別為122.6 MHz和122.3 MHz；時間相依中，在耦和共振分析下，靈敏度較高的配置具有高平均剪應力於表面，分析剪應力可以預測感測器配置靈敏度大小；特徵頻率下分析出質量靈敏度並建立了一個半經驗模型，透過實驗驗證其係數，可將生物分子的濃度與SH SAW感測器的頻移做關聯性，有效而準確地分析頻 移對目標物分子濃度的分布性，降低了感測薄膜中質傳分析的複雜性。
實驗利用36°YX Black LiTaO3當作壓電材料進行黃光微影製程技術完成感測晶片且用陣列化電路進行訊號量測。實驗目的以偵測低濃度生物分子為目標，在感測區表面進行修飾上鏈黴親和素(Streptavidin)，在以生物素化的抗體(Biotinylated antibody)與表面鍵結，以檢測癌症相關的生物標誌物轉鐵蛋白受體抗原為目標。首先對生化處理的表面接上帶有螢光的生物素與表面鍵結以確認表面修飾的活性。對於多次量測做濃度-頻率關係圖，可得在不同高度波導層下量測觀察到1.4 µm的靈敏度會大於0.5 µm，最低是0.8 µm；轉鐵蛋白受體抗原量測時低於1.66 μg/mL 的抗原濃度時，靈敏度水平為947 Hz/μg/mL SH SAW 感測器的濃度與頻移之間顯示出指數關係，測量結果表明此免疫感測器對抗體抗原的質量附載有明確的反應。
表面聲波作為微質量感測器具有結構簡單、成本低、靈敏度高、且可以即時偵測到各種生物分子的訊息，定量測定薄膜上微量的吸附變化已被廣泛應用於各種領域中。

In this work, surface acoustic wave (SH SAW) biosensor, which is label free and performs highly sensitive horizontal shear, have been proposed experimentally and numerically. With the proposed model, estimate the concentration of a cancer related biomarker antigen transferrin receptor CD71 in the sample.
In frequency domain simulation, it sets up computational model as SH SAW center frequency. The center frequency was found to be 122.6 MHz and 122.3 MHz from simulation and measurement, respectively. In time dependent study, the results show that the configuration with higher sensitivity has a high average shear stress on the surface. The analysis of the shear stress can predict the sensitivity of the sensor configuration. By Eigen-mode analysis, different slope in the plots represent that the mass sensitivity varies with different thickness of the guiding layer.
The SH-SAW devices were fabricated by MEMS techniques, and interdigital transducers (IDTs) were deposited on the piezoelectric substrate (36°YX-Black LiTaO3). The self-assembled film was functionalized on the silicon dioxide layer to capture target. With the concentration of the targeted biomarker varied from 0.66~4.16 μg/mL, a typical exponential relation was found between the concentration and the frequency shift of the SH-SAW sensor, and the sensitivity level is found to be 974 Hz/(μg/mL) as the biomarker concentration is less than 1.66 μg/mL. Experimental results showed a clear response of this immunosensor to the mass-loading effects of the antibody-antigen.
Finally, an empirical model was proposed to calculate the frequency shift which corresponding to the concentration of specific biomolecules. The developed method is useful for quickly estimating the frequency shift with respect to the concentration of the target molecules in the simulation for SH-SAW sensors.

目錄
摘要
第1章----------1
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第3章----------17
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第6章----------58
第7章----------75
第8章----------77
參考文獻----------80

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