以有機半導體應用於感測器、電晶體等等，大部分是P型半導體為主。其原因在於P型有機半導體相較於N型半導體穩定、較不受外界影響，N型有機半導體更容易受到水氧的影響，即便N型有機材料看似各項缺點、容易受到環境影響，但本論文仍以N型有機半導體做為氣體感測器為研究。極度不穩定的缺點或許能成為感測氣體的優點。本論文將會探討以N型有機半導體製成之感測器相關特性和實驗成果。
以N型有機半導體材料進行氣體感測器的製作之外，也對於有機高分子進行相關氣體感測器研究。將探討其在通入不同濃度的氣體之下，其介面影響、電流、對各氣體反應、不同環境下變數、壽命、SEM圖……等等進行探討。

Generally speaking, it is using p-type organic semiconductors as a transistor or gas sensor. The reason is that p-type organic semiconductor is more stable than n-type organic semiconductor and is less affected by the external environment. The n-type organic semiconductor is more susceptible to moisture and oxygen. This study still targets N-type organic semiconductor as gas sensors, even n-type organic materials appear to be shortcomings and are susceptible to environmental influences. In terms of sensitivity, perhaps this shortcoming can be a benefit for gas sensor. This study will explore the sensor-related characteristics and experimental results of N-type organic semiconductor.
In addition to the production of gas sensors using N-type organic semiconductor materials, gas sensor research is also conducted on organic polymers. We will discuss its interface effects, current, reaction to different gas, variables in different environments, lifetime, SEM image.

摘要 ii
Abstract iii
致謝 iv
目錄 1
圖目錄 3
表目錄 8
Chapter1 緒論 9
1-1前言 9
1-2先期成果 12
1-3研究動機 15
1-4論文架構 16
Chapter2 有機材料簡介與元件操作原理 17
2-1有機材料特性與載子傳輸理論 17
2-2有機材料氣體感測機制 20
2-3定義氣體感測模式 22
2-4半導體與金屬接觸面介紹 25
2-5有機二極體物理介紹 27
2-5-1熱離子發射理論(Thermionic emission theory) 27
2-5-2穿隧效應(Tunneling effect) 28
2-5-3塊材限制(Bulk limit) 29
Chapter3 標準有機半導體氣體感測元件製程 31
3-1基本之圖樣定義製程 31
3-2垂直式孔洞結構感測器之製程 35
Chapter4 氣體量測方法 40
4-1空氣背景量測系統介紹 40
4-2溼度控制量測系統介紹 42
Chapter5 N-type有機材料於氣體感測器應用 43
5-1以PCBM材料製程元件之實驗結果 43
5-2提升PCBM元件電流及反應 45
5-2-1PCBM摻雜DBU 45
5-2-2PEG/PCBM雙層結構 48
5-3就PEG/PCBM雙層特性探討 53
5-3-1以PTB7、CT替換PCBM 60
Chapter6 新概念有機高分子氣體感測器 66
6-1以PEG製程元件之實驗結果 68
6-1-1不同平均分子量之電性分析 68
6-1-2量測電流後影響 71
6-1-3重覆性及氣體選擇性 72
6-1-4絕緣層PVP厚度影響 75
6-1-5以RIE氧電漿給予再生測試 77
6-1-6濕度環境之影響 79
6-1-7壽命追蹤 83
6-2以鹽類混入PEG製程元件之實驗結果 87
Chapter7研究總結與未來展望 94
7-1研究總結 94
7-2未來展望 95
參考文獻 96

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